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TB W Counter bore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60

AF-OMX0053-B PRODUCT NAME Mist Separator MODEL / Series / Product Number AFM20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFM30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.

AF-OMX0054-B PRODUCT NAME Micro Mist Separator MODEL / Series / Product Number AFD20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFD30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFD40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFD40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.

Normal output Reversed output P_1(P_2)=A-(A-B)/4 n_1(n_2)=B+(A-B)/4 A = Maximum pressure H_1(H_2)= (A-B)/2 H_1(H_2)= (A-B)/2 B = Minimum pressure If setting is not necessary press the and buttons simultaneously for 1 second or longer. -37No.PS-OMU0012-C [F 6] Fine adjustment of display value This function is to manually perform a fine adjustment of the displayed pressure value.

Load Rotary actuator Flexible coupling Bearing Fig. (9) Flexible coupling 28 - Piping and operating direction Fig. (10) shows piping ports of the rotary actuator. Table (9) shows the port size. Table (9) Port size Size Port size 30 M5 50 Rc1/8 63 Rc1/8 B Port 80 Rc1/4 100 Rc3/8 A Port Fig. (10) Port location A fixed throttle is installed inside the actuator port.

1 V 1.8 V 5 V Current output 4 mA 7.2 mA 20 mA (PF3W721-U30) A B C Voltage output 1 V 1.48 V 5 V Current output 4 mA 5.92 mA 20 mA Rated flow [L/min] Sensor model Minimum Maximum PF3W704 0.5 4 PF3W720 2 16 PF3W740 5 40 PF3W711 10 100 PF3W721-12/14 50 250 PF3W721-U30 30 250 Analogue output (Fluid temperature) A B C D Voltage output 0.6 V 1 V 5 V 5.4 V Current output 2.4 mA 4 mA 20 mA 21.6

-X10 X10 X10 IZS 40 IZS 42 1660 1660 10 10 B B Ordering example) Bar length Type 41 42 520 700 760 880 940 1000 1060 1180 1240 1360 1420 1480 1540 1660 1720 1780 1840 1960 2020 2080 2140 2200 2260 2380 2440 Symbol Specifications Contents Model with drop prevention cover The main unit is shipped fitted with a drop prevention cover available as an option.

Normal output Reversed output P_1 = A-(A-B)/4 n_1 = B+(A-B)/4 A = Max. pressure H_1 = (A-B)/2 H_1 = (A-B)/2 B = Min. pressure The set values of OUT2 become as follows "_", i.e. "P_2", "n_2" and "H_2".

Normal output Reversed output P_1(P_2)=A-(A-B)/4 n_1(n_2)=B+(A-B)/4 A = Maximum pressure H_1(H_2)= (A-B)/2 H_1(H_2)= (A-B)/2 B = Minimum pressure If setting is not necessary press the UP and DOWN buttons simultaneously for 1 second or longer. -44No.PS-OMW0005-C [F 5] Auto-shift setting Auto-shift function can be selected.

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 17 CX 38 39 15 19 10 18 19 18 D5 -X 5.5 10 5.5 5.5 NS 4 209 10.5 8.5 31 + Stroke 39.5 + Stroke 16 Data 4-M3 x 0.5 Depth 4.8 5 + Stroke 10 (mm) Stroke (mm) NS LA LB LT J 5 42 14 10 4 10 42 14 4 10 15 24 52 4 20 20 24 20 52 4 25 62 30 30 4 30 62 30 4 30 40 45 72 6 20

Auto switch groove positions (mm) B 6.9 8.8 13.7 17.1 A 10 14 19 26 Bore size (mm) 6 10 16 20 4-4.2 Auto switch mounting groove B A 38

(C) 30 35 40 45 50 15 15 15 15 15 10 10 10 10 10 5 5 5 5 5 1.71 1.37 1.09 0.89 0.75 1.31 1.05 0.84 0.68 0.58 0.92 0.74 0.59 0.48 0.40 30 1.63 1.30 1.04 0.85 0.72 1.25 1.00 0.83 0.65 0.55 0.88 0.70 0.46 0.46 0.39 32 1.56 1.25 1.00 0.81 0.69 1.20 0.96 0.77 0.62 0.53 0.84 0.67 0.37 0.44 0.37 35 1.46 1.17 0.94 0.76 0.64 1.13 0.90 0.72 0.59 0.50 0.79 0.63 0.28 0.41 0.35 40 Data C: Correction Factor

Auto switch groove position (mm) B 6.9 8.8 13.7 17.1 A 10 14 19 26 Bore size (mm) 6 10 16 20 4 x 4.2 Auto switch mounting groove B A 30 Series MXH Specific Product Precautions 1 Be sure to read before handling. Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions.

1.12 1.06 1.00 1.15 0.96 0.91 0.86 0.82 0.77 0.81 0.67 0.64 0.60 0.57 0.54 35 1.40 1.17 1.11 1.05 0.99 0.94 1.08 0.90 0.86 0.81 0.77 0.72 0.76 0.63 0.60 0.57 0.54 0.50 40 Data B Correction factor for temperature (Series IDFS) Inlet air temp. ( C) Outlet air press. dew point ( C) Ambient temp. ( C) 30 35 40 45 50 15 15 15 15 15 10 10 10 10 10 5 5 5 5 5 1.71 1.37 1.09 0.89 0.75 1.31 1.05 0.84

Normal output Reversed output P_1(P_2)=A-(A-B)/4 n_1(n_2)=B+(A-B)/4 A = Maximum pressure H_1(H_2)= (A-B)/2 H_1(H_2)= (A-B)/2 B = Minimum pressure If setting is not necessary press the UP and DOWN buttons simultaneously for 1 second or longer. -34No.PS-OMW0002-C [F 6] Fine adjustment of display value This function is to manually perform a fine adjustment of the displayed pressure value.

With bracket *5 *8 *9: Under the New Measurement Act, sales of digital gap checkers with the unit selection function have not been allowed for use in Japan. *10: Unit: kPa B 6 One-touch fitting *2 *7: Order DIN rail separately.

-Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 5 - LEC-T1 Series/ / 3) *3) 1 1 1.5 1 () 6 - TB Ver.

N01 NPT1/8 12 C4HC6HN7H 2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16 10.3 C4LC6LN7L C A B C D C4L 15.2 17.5 4 8.2 C6L 15.2 18.3 4 10.4 N7L 20.9 20.6 6 11.1 -64No.PS-OMS0006CN-G A B -65No.PS-OMS0006CN-G 0.5~7 + 0.5~7 -66No.PS-OMS0006CN-G 2 (n ) <> <> (n -1) (n -1) -67No.PS-OMS0006CN-G Revision history A B [2016 9 ] C [2018 6 ] D [2020 2 ] E [2021 2 ] F [2022 1 ] G [2022 10 ] 4-14-1, Sotokanda

2 x M5 x 0.8 (Vacuum port) 6.5 12 12 11 10 10 1 24 14 S O 20 46 24 30 K 15 (70) 10 24 24 12.5 4 12.5 4 10 30 When open F 17 17 54 4 x M6 x 1 through (Thread for mounting attachment) When open G (mm) J 32 68 88 H 176 276 316 G 138 238 278 F 98 158 178 E 38 80 100 D 87 129 149 B C 58 100 120 A MHL2-20D MHL2-20D1 MHL2-20D2 112211221122136 211 251 54 96 116 MHL2-25D 1122D A B C 12.5 +0.030 4H9

C D E F With bracket G H I J VXA21 VXA22 , , 18 21 9 10.5 40 45 21 27 55 62 64 71 11 13 36 46 46 56 1 4 3 8 10 1 8 1 4 VX 11.5 VNl Dimensions (Orifice size 8mm, 10mm) VXA225m, VXA226m VQ Thread fixed: (VXA226 2 0 -04 0nly) Bracket E Port size Rc(PT) Model A B C D VXA22 52 60 02 03 , 1 4 3 8 22 11 67 77 27 VXA226 -04 2 0 1 2 28 14.5 73 83 30 Fixing with thread is also possible. 4.1-61 VVXA21