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Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

4 i y !0 !1 !2 !4 i !5 !6 ASR530F-02 type ASR630F-03 type ASR530F-02 type ASR630F-03 type !8 u o !3 !8 u o !3 !7 !7 !9 !9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

B 2 ZP K20 06 [wBuffer] 3.8-61 Vacuum Pad Series ZP Replacement Parts: Adaptor/Buffer (Series ZPY) Construction The same symbol Without Buffer Replacement of the symbol ZX ZP Y 50 A8 UN N6 ] [ Pad model no. ZR ZM Symbol Pad dia. 1 02 to 08 ZH 2 10 to 16 3 20 to 32 ZU 4 40, 50 ZL N6 A8 4 ZP Y [qY type adaptor] ZF ZP ZCU With Buffer Vacuum related ZP 50 K20 Y A14 U6 UGN [Pad model no.]

Applicable for strong alkali-based cleaning fluid Suitable for filtering cutting fluids P.57 P.57 P.58 (For coarse filtration) (For coarse filtration) Leg Material: Stainless Steel X47 P.58 54 FGF Series Made to Order Please consult with SMC for details.

P R DC 24V, 12V 24V, 12V Coil rated voltage AC 50/60 Hz (inrush) 110V 110V A DC 3.1W, 0.3W Note3) (Holding) 1.5W Power consumption AC 1.45VA P R Plug-in, L/M type connector (With indicator light and surge voltage suppressor) Electrical entry Latching type specification Note 1) Consult P/A for available combinations. Grommet type entry is N/A with any of these options.

How to find the flow rate for air/ Flow rate formulas based on the air temperature of 20C For subsonic range where P + 0.1013 < 1.89 (P + 0.1013) Q = 226S P(P + 0.1013) For sonic range where P + 0.1013 1.89 (P + 0.1013) Q = 113S (P + 0.1013) Q : Flow rate [l/min(ANR)] S : Effective area (mm) P : Pressure drop P P (MPa) P: Upstream pressure (MPa) P: Downstream pressure (MPa) How to make

Real-time switch output Hysteresis mode Unit switching ON YES OFF P-1 P-2 For Air Instantaneous flow rate Display Instantaneous flow rate Accumulated flow "P" Window comparator mode H : Hysteresis L/min L CFM x 10-2, CFM x 10-1 ft3 x 10-1 H H ON CFM = ft3/min NO OFF P-1 P-2 High Flow Rate Type (For Air) Instantaneous flow rate OUT1 Output mode Display Instantaneous flow rate Accumulated

Note 2) 1 (P) 3 (R) Note 3) 1.13-4 Series VQD1000 Construction JIS Symbol (A) 4 (B) 2 Part name Component Parts Note Material No. q w e r t y u i o !0 Solenoid coil assembly Sub-plate Body Spool valve Poppet Guide ring Return spring Manual override Gasket Round head screw VQD1000-S-M5(Base mounted only) Aluminum ZDC 1 (P) 3 (R) q u e !

Class 3 ground Ground resistor 100 or less Command pulse (MAX.225/kpps) PULS SIGN P Incremental encoder SIGN CLR P Deviation counter clear signal (active high) 2CN PG CLR P Be certain to treat the shielding wire terminals.

186 q Installation Distance and Discharge Time p. 182 Alarm p. 186 w Static Neutralization Range p. 183 Mode Switch Setting p. 187 e Pressure Flow Rate Characteristics p. 184 Wiring p. 187 Dimensions p. 188 How to Order p. 185 Accessories (for Individual Parts) p. 185 Related Products p. 189 Specifications p. 186 AC Adapter Specifications p. 186 Specific Product Precautions p. 190 Parts

a ] [ M P a ] PF3W540 PF3W511() [ M P a ] [ M P a ] PF3W521() [ M P a ] -33No.PF-OMN0009CN-F PF3W511(PVC ) PF3W521(PVC ) [ M P a ] [ M P a ] -34No.PF-OMN0009CN-F PF3W504/520/540 PF3W504S/520S/540S [MPa] [MPa] [ M P a ] [ M P a ] a] [MP a] [MP PF3W511() PF3W521() PF3W511/521(PVC ) [MPa] [ M P a ] [ M P a ] a] [MP [MPa] a] [MP -35No.PF-OMN0009CN-F IN 3F.S.8 cm (100 L/min 11 cm

Standard (N)ZL212 40 V 54 125 Label 188 61 P Port exhaust (N)ZL212P V Vacuum pressure gauge Exhaust with silencer Exhaust port 1 25 With vacuum pressure gauge (N)ZL212-G P V Exhaust with silencer Vacuum adapter 1/8 7 With vacuum adapter (N)ZL212-GN P V Vacuum pressure switch Exhaust with silencer With digital vacuum pressure switch (N)ZL212-E P V RESETSET Approx. 500 Section A (L: approx.

Applicable model: ASV310F, ASV410F, ASV510F Sealant Applicable model Symbol Sealant P Silencer and One-touch fittings are ASV120F/E220F Wihtout Type installed. With ASV310F/E410F/E510F S 1 2 Tee Elbow (1) P Flame resistant resin body as standard.

I The dual output applies to NPN, -O~P7:~iP~tio~n~-'-~p~a~m~No~.-.~~===rr-N"~e-_ ~~ =4It PNP, and analog output.

Dust removal Dust collection Blow nozzle with improved dust removal efficiency IZH A4 size [ZVB20] 210 x 297 mm (Dimensions) 202 x 212 mm (Static neutralization space) A3 size [ZVB40] 400 x 384 mm (Dimensions) 392 x 298 mm (Static neutralization space) Lamp cover Smartphone c e s e i o p f k v r o a w r i Cosmetic case o Lens s u t s r o s p i p z e u s S .

-100.0~100.0 kPa T 2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1/8 N01 NPT1/8 C4H 4mm J (2m) C6H 6mm N7H 1/4 inch C4L 4mm C6L 6mm N7L 1/4 inch -8No.PS-OMU0002CN-D / A ZS-46-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch

"Z") 84.5 ( Without "Z": 66.5) 36.5 75.5 (Without "Z": 57) 2(A) port 24 32 40 119 Pilot EXH 14 3(R) port 2 x 5.5 Mounting hole 2 x 1/4 (: Thread type) 19 1 3 Manual override 9 23 1(P) port 3(R) port DIN terminal VFN212N-l D (Y)ll-02l-D-l 216 19 23 2(A) port Indicator light (With "Z") Applicable heavy-duty cord O.D. 6 to 8 Pg 9 84.5(Without "Z": 66.5) 36.5 75.5(Without "Z": 57) 24 SMC 32

Refer to p.0-26 and 0-27 for Safety Instruction and common precaution of the products mentioned in this catalog, and refer to p.3.0-7 to 3.0-9 for precautions on every series.