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When air with high purity is required, please either mount the above separator on the outlet side or use a made-to-order product (refer to page 14-19-50), which is provided with a micro mist separator (Series AWD) instead of a regulator. 3.

A Station 1 1 SOL. A Station 2 14 SOL. A Station 3 2 VQD 1 SOL. A Station 4 14 15 2 SOL. A 15 3 3 4 5 6 7 8 9 10 11 12 13 Station 5 16 17 18 19 20 21 22 23 24 25 SOL. B 16 SOL. A 4 Station 6 SOL. B DIN rail mounting bracket [-D] VVQ1000-57A for {F, L, M, P, S (EX500) kit} VVQC1000-57A-S for {S (EX250) kit} VVQC1000-57A-T for {T, S (EX126) kit} 17 SOL. A 5 Station 7 SOL. B 18 SOL.

Diaphragm B moves to the right, and at the same time diaphragm A also moves to the right pushing pilot valve A. 3. When pilot valve A is pushed, air acts upon the switching valve, drive chamber A switches to a supply state, and the air which was in drive chamber B is exhausted to the outside. 4. When air enters drive chamber A, diaphragm B moves to the left pushing pilot valve B. 5.

Bulkhead female union P. 77 KCE Use for transit connection of a tube and a male screw for installation of panel. 74 Series KC Self-seal Fittings M5 Half union: KCH M5 Applicable tube O.D. (mm) Effective orifice(mm 2) Weight (g) A Thread R(PT) Part No. H (Hex.)

(Pitch) P=19 1/8 (A port) 21 46 Series SYJ700 Type 21R Manifold: Top Ported (External Pilot Type)/SS3YJ7-21RStations (-00) [ ] for AC Grommet (G) M5 x 0.8 (X port) 63.5 L2 L1 30.5 21.5 6 1.5 14 22.5 9.5 6 21.5 49 (DIN 50.3) 26 X P A A A A 43 71.2 [73.4] 2-5.5 (For mounting) R 1/4 (P, R port) 1/8 (A port) (Pitch) P=19 21 Manual override Approx. 300 (Lead wire length) (Station n) (Station

fitting R1/8, M5 x 0.8 2 1 6 One-touch fitting 5/32" One-touch fitting NPT1/8, M5 x 0.8 1/4" One-touch fitting M5 x 0.8 female thread is cut inside the pipe.

U1 2 [With external pilot] (Pitch) P = 10.5 2n1-M5 x 0.8 [4(A), 2(B) port] 24 13.3 13.3 24 16.2 16.2 34 17 36.7 34 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 P 1 1 P A 4 X A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 2-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch fitting (X, PE port) Applicable tube O.D.: 6 2n2-One-touch fitting [4(A), 2(B) port] Applicable tube

cable O.D.: 6.8 to 11.5) CE1 CE2 Proper Auto Switch Mounting Position D-H7 D-H7C D-H7NF D-H7W D-H7BAL D-C7 D-C80 D-C73C D-C80C ML2B D-G39 D-K39 D-A33/A34 D-A44 D-B5 D-B64 D-B59W D-G5NTL Bore size (mm) C J G5-S A B A B A B A B A B A B CV 20 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.0 28.5 49.5 25.0 25 MVGQ 56.0 31.5 50.0 25.5 55.0 30.5 51.5 27.0 53.0 28.5 49.5 25.0 32 59.5 36.5 53.5 30.5

To use a floating joint to connect the cylinder rod to a driven body, secure it in place by applying a torque that is appropriate for the thread size. Also, if there is a risk of loosening during operation, take measures to prevent loosening, such as using a locking pin or thread adhesive.

To use a floating joint to connect the cylinder rod to a driven body, secure it in place by applying a torque that is appropriate for the thread size. Also, if there is a risk of loosening during operation, take measures to prevent loosening, such as using a locking pin or thread adhesive.

Screw-in Piping M5 X 0.8 Relieving port size 50 to 500mm/s Piston speed Mounting Basic, Axial foot, Front flange, Rear flange *Auto switch attachable Dimensions REC B/Basic H2 2-Rc(PT)P Width across flats B2 2-NN G G H1 Width across flats B1 Relieving port M5 X 0.8 Standard port I Relieving port 2-Eh8 D MM AL K A N N F lNA S+Stroke H F ZZ+Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA

Clean appearance The flat cable provides wiring on a printed circuit board to the individual valves at the manifold base, enabling the consolidation of external wiring at a touch through a 26 pins MIL connector.

8 circuits 12 circuits 1 2 4 8 12 Options N/A Standard type FNote) Flange type Note: No flange type in 1 circuit system Options / Mounting bracket Number of circuits Flange part number 2 circuits MQR2-F 4 circuits MQR4-F 8 circuits MQR8-F 12 circuits MQR12-F Specifications Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Throttle valve (Without check valve) -X214 Throttle valve (Without check valve) Note) M5 size: S (with seal) is not necessary. 611 A AS Series Construction AS1201-M5 AS2201/3201/4201 AS3201-02 o !1 w r u y e t !5 !2 !4 q !0 !3 i Component Parts No.

NB A S + Stroke Z + Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18.3 18.3 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 Double clevis style (D): CJ5DS R V CDH9 + 0.030 0 NB GA 0.030 0.060 Clevis pin ( ) Cdd9 Piping port 2 x M5 x 0.8

None Nil M5 x 0.8 NPT1/8 (With M5 female thread) N01 Bracket A Rc1/8, G1/8 A W1 Rc1/8 WF1 G1/8 Rc1/8, G1/8 Bracket B B M5 M5 x 0.8 (Female thread) M5 x 0.8 Bracket D C4 4 one-touch fitting D C6 6 one-touch fitting 4, 6 one-touch fitting Made to Order Panel mount adapter Combination of piping specifications with option 1 and part numbers of options 01 N01 W1 WF1 M5 C4 C6 Option 1 Description

-P-M5 M5 x 0.8 0.13 0.35 0.52 0.15 0.43 0.60 N.C.

M1 Weight (g) ASV120F-M3-04 ASV220F-M5-04 ASV220F-M5-06 Model 5 8 9 M3 x 0.5 M5 x 0.8 M5 x 0.8 5.5 8 8 9.3 9.3 11.6 7.2 9.6 9.6 21.4 22.8 23.6 25 27.6 28.4 9.8 11.1 11.1 28.6 31.4 31.4 26.1 28.6 28.6 25.8 27.7 27.7 23.3 24.9 24.9 12.7 12.7 13.5 4 4 6 Reference dimensions of M thread after installation. Inch Size Applicable tubing O.D. d T H D1 D2 L1 L2 L3 L4 A Max. Min. Max. Min.