2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

ALF400 to 900, ALT-5/-9

d o M A B C D E F G H I J K L 5 T L A ) 4 7 1 ( 5 8 . 6 ) 0 7 ( 6 7 . 2 ) 6 1 ( 3 6 . ) 7 ( 8 2 . ) 1 9 ( 8 5 . 3 ) 6 0 1 ( 7 1 . 4 ) 7 9 1 ( 6 7 . 7 ) 4 2 ( 4 9 . ) 2 8 3 ( 4 0 . 5 1 ) 4 1 4 ( 0 3 . 6 1 ) 8 2 4 ( 5 8 . 6 1 S I 5 T L A ) 4 7 1 ( 5 8 . 6 ) 0 7 ( 6 7 . 2 ) 6 1 ( 3 6 . ) 7 ( 8 2 . ) 1 9 ( 8 5 . 3 ) 6 0 1 ( 7 1 . 4 ) 7 9 1 ( 6 7 . 7 ) 4 2 ( 4 9 . ) 2 8 3 ( 4 0 . 5 1 ) 4 1 4

Step Motor Controller

. 1 2 3 Circuit Cable color U V W Red White Black Connector D terminal no. 12 13 7 6 9 8 11 10 3 Connector A2 terminal no.

Digital Flow Switches

1 2 3 4 7 3 Load +0.5 0 Brown 19.4 6 2 + 36 Blue 5 1 12 to 24VDC 5 6 7 8 Series PF2W5 PF2W31-A The applicable panel thickness is 1 to 3.2mm.

Pin Clamp Cylinder Series CKQ/CLKQ

1 !3 @2 q $4 #3 #1 #0 @1 $2 !7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

Air Cylinder

1 !5 u !9 t !4 w !7 @0 e r y @1 q i !6 !3 !0 !2 Component Parts Replacement Parts/Seal Kit No. Description Material Note Bore size (mm) Kit no.

RSQ

1 w o @0 !7 i !9 !

High performance type Step Motor Controller (Servo/24 VDC)

OUT OUT OUT No 5 4 3 2 1 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 0 0 0 0 0 1 1 0 0 0 0 0 1 2 0 0 0 0 1 0 2 0 0 0 0 1 0 3 0 0 0 0 1 1 3 0 0 0 0 1 1 4 0 0 0 1 0 0 4 0 0 0 1 0 0 5 0 0 0 1 0 1 5 0 0 0 1 0 1 6 0 0 0 1 1 0 6 0 0 0 1 1 0 7 0 0 0 1 1 1 7 0 0 0 1 1 1 8 0 0 1 0 0 0 8 0 0 1 0 0 0 9 0 0 1 0 0 1 9 0 0 1 0 0 1 10 0 0 1 0 1 0 10 0 0 1 0 1 0 11 0 0 1 0 1 1 11 0 0 1 0 1 1 12 0 0 1 1 0 0 12 0 0 1

Cylinder with Lock

1 !7 @1@0 @2 @6 @3 @5@8 @4@9 #5 #7 #9 #8#6#4 #0#1 $1 $0 t !9 #3 #2 @7 Component Parts Component Parts No. Description Material Qty.

Fieldbus system DeviceNet TM compatible SI unit

Content of diagnosis 0 There is an error in unit 0. 1 There is an error in unit 1. 2 There is an error in unit 2. 3 There is an error in unit 3. 4 There is an error in unit 4. 5 There is an error in unit 5. 6 There is an error in unit 6. 7 There is an error in unit 7. Unit diagnosis byte1 Bit No.

Table of Contents

, 10 common) D-F8N/F8P/F8B D-M9N/M9P/M9B When detecting extended stroke end When detecting retracted stroke end 10 mm or more 10 mm or more (2) 1 1 3 7 Stroke 3 + Stroke 7 CUJ CU CQS Note 1) Solid state switch: D-M9 includes one auto switch.

Modular Type Air Filters Series AF

Note 7) Note 7) Note 7) Z Note 6) Note 7) Note 7) Note 7) Note 7) Note 7) Z Note 6) Note 1) Drain guide is NPT1/4.

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

LEC-OM036xx

Branch Branch N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 Shield Controller CN4 Controller CN4 Description Pin No. Description Pin No. EMG+ 1 EMG+ 1 EMG2 EMG2 SD+ 3 SD+ 3 SD4 SD4 EN_SW+ 5 EN_SW+ 5 ON 6 ON 6 DC24V 7 DC24V 7 GND 8 GND 8 Shield Shield 30 - 9.

AC Servo Motor Driver (SSCNET /H Type)

Linear encoder error 1-1 EDB 2A.2 Linear encoder error 1-2 EDB 2A.3 Linear encoder error 1-3 EDB 2A.4 Linear encoder error 1-4 EDB 2A Linear encoder error 1 2A.5 Linear encoder error 1-5 EDB 2A.6 Linear encoder error 1-6 EDB 2A.7 Linear encoder error 1-7 EDB 2A.8 Linear encoder error 1-8 EDB 2B Encoder counter error 2B.1 Encoder counter error 1 EDB 2B.2 Encoder counter error 2 EDB -68- Alarm

Compact Rotary Actuator Series CRQ2

7 !1 !9 !2 @1 @3 e u o t @2 !8 @0 @0 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 @3 w i !5 y q r q w r y !5 !

RQ

34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 7-7-14 for details on rod end nut and accessories.

Cylinder

to. : 5.5,5 1 10 '0 '2 '5 ,7 I 5 8 I M4 XO.7 M'2XlO 8 1 6.5 6 J 7 20 7 '0 I 8.5 6 I 7 I 24 9 110 30.5 35.5 40.5 45.5 55.5 I 15 '2 14 20 _' 9 i 6 -8 I MS X: O.8 M14xtO -Flange Mount : CO JPF z H s p A' F GA 2-M3 GB ~-IJ~J I A ~ u: > !

Fieldbus system Ethernet POWERLINK compatible SI unit

[Example 1] Slot 0 Slot 1 Slot 2 Slot 3 Slot 4 DXB AXA DXD DYB SPL1-X26 Digital Analog Digital Digital SI unit End plate Valve input input input output Input data Index Sub Index Bit 15 8 Bit 7 0 Access 2001h 00h System diagnostic data RO1 2002h 00h Unit diagnostic data RO 2003h 00h DXB, IN 0 7 (Slot 0) RO 2004h 00h AXA, analog IN Ch 0 (Slot 1) RO 2005h 00h AXA, analog IN Ch 1 (Slot 1) RO

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM