Dedicated Controller

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

VCW

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (N.C

IDX-OM-Z004

3.7 . 3-4 4 4.1 . 4-1 4.2 . 4-1 4.2.1 . 4-1 4.2.2 . 4-4 4.2.3 V) . 4-7 4.2.4 . 4-7 5 5.1 . 5-1 5.2 . 5-3 5.3 ( (R)) . 5-4 6 6.1 . 6-1 6.2 GWP . 6-2 6.3 .6-3 6.4 .6-6 6.5 . 6-7 6.6 . 6-8 7 7.1 . 7-1 2 IDX-OM-Z004 i i i.1 () 5.2 OFF i.1.1 3 IDF100150F-W i.1 i-1 IDX-OM-Z004 i i.2 IDF100150F-W i.2 i-2 IDX-OM-Z004 i i.2.1 i.2.2 i.2.3 50 i.2.4 IDF100150F-W i

Sine Cylinder Series REC

7 !9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Sine Cylinder Series REC

7 !9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

ZX

20 1 11.5 7 7 8 8 Manual override (Push and turn the locking type override.)

CLK1

Caution 1. Drain flushing. Remove condensate from air filters regularly. (Refer to specifications.) This will cause damage to the seals. 25 Series CLK1 Auto Switch Precautions 1 Be sure to read before handling. Design and Selection Warning 7. Do not use a load that generates surge voltage. 1. Confirm the specifications.

IDX-OM-W095

5-1 5.2 . 5-2 5.2.1 . 5-2 5.2.2 . 5-2 6 . 6-1 6.1 . 6-1 6.2 . 6-4 IDFC60/70/80/90 Series IDX-OM-W095 7 . 7-1 7.1 . 7-1 7.2 GWP . 7-2 7.3 . 7-3 7.4 . 7-4 7.5 . 7-5 8 C . 8-1 8.1 . 8-1 8.2 . 8-1 9 L . 9-1 9.1 . 9-1 9.2 . 9-1 9.3 . 9-2 9.4 . 9-2 10 R . 10-1 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 11 T . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 11.4 . 11-3 11.5

70pvpump

Panel mounting possible Selectable pressure unit Panel mounting possible Selectable pressure unit Auto shift function Compound pressure Selectable pressure unit R thread Panel mounting possible Selectable pressure unit Auto shift function URJ TSJ Panel mounting possible Selectable pressure unit Auto shift function Note Page 16-6-1 16-6-7 16-5-1 16-7-1 16-8-1 16-4-5 16-2-1 16-2-15 16-2-41

10

-16DmZ M5 x 0.8 4.3 10 MHL2-20DmZ M6 x 1 7.3 12 MHL2-25DmZ M8 x 1.25 17.7 16 MHL2-10DmZ M4 x 0.7 1.4 5 MHL2-16DmZ M5 x 0.8 2.8 7 MHL2-20DmZ M6 x 1 4.8 7 MHL2-25DmZ M8 x 1.25 12.0 7 How to Mount the Attachment to the Finger 1.

Industrial Filters

(with cover anti-scattering mechanism) 32 B Industrial Filter FGG Series Specifications FGGLD Note 1) FGGLC Note 1) FGGLB Note 1) FGGSD Note 1) FGGSC Note 1) FGGSB Note 1) Model Port size (Rc) 2 Max. operating pressure (MPa) 0.7 FGD Operating temperature (C) 0 to 80 (60 with pressure gauge) Number of elements 21 7 Note 2) 28 7 Note 2) 14 7 Note 2) 21 7 Note 2) 28 7 Note 2) 14 7 Note 2) FGE

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

0) 1(0) 2(0) 7 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGF 2.5(0.5) 7.5

LECA6_C

A 10m GND A-1 13 A B-2 7 B 15m A A-2 6 C 20m B B-3 9 B A-3 8 Z B-4 11 Z A-4 10 3 4 B-1 5 A-1 1 B-3 2 A-3 5.6 23.7 10.5 A1 2 (7.0) 14.2 1 3 2 1 B1 12.7 3 4 A4 B4 B1 (6.7) A1 10.2 2 1 18 A3 B3 (5.7) 15 16 11 30.7 45 - 11.3 I/O No.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

mm/s 10 10 ISO Class 8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 ISO Class 5 10 10 1000 1000 20 L/min (ANR) ISO Class 4 ISO Class 4 100 100 70 L/min (ANR) 30 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Bellows seal, Manual operation: XMH, XYH Features 1 Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal Series XMA, XYA How to Order XMA XYA M9N 16 A A M9N 25 Angle type In-line type 1 2 3 4 5 6 7 2. Flange type 1.

KP/KPQ/KPG

-02 KPGT06-M5 KPGT06-01 KPGT06-02 KPGT08-01 KPGT08-02 KPGT10-02 KPGT10-03 KPGT12-03 KPGT12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 38 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 D1 4 4 4 18 10.4 20.7 10 D1 8 A L2 6 10 10 19.5 12.8 22.8 D2 H Connection threads 10 (R) 8 26 18 15.2 21.5 26.3 12

Series KP/KPQ/KPG

8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 18 26 21.5 14 10 29 41 24 17 19 22 M 46 58 25 L A 12 H Connection threads Reference dimension for R threads after installation Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area mm

Series KP/KPQ/KPG

8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 18 26 21.5 14 10 29 41 24 17 19 22 M 46 58 25 L A 12 H Connection threads Reference dimension for R threads after installation Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area mm

Sine Rodless Cylinder Series REBR Direct Mount Type

7 @7 #1 @9 !0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

RSH/RS1H

#7 to $1.