SMC Corporation of America
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Pressure Control Equipment D B K P C C C K U P O S A A H L C to U S O H L to B D !0 o D-D C-C B-B A-A !0 o !1 !1 Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters y y q IN OUT IN OUT u r t u r t i i The numbers are the same as the "Construction" of the Best Pneumatics No.5 Series AWG.

D 1 F MHKL 2 20 S D 1 F M9N Long stroke type Number of auto switches Number of fingers Nil S 2 pcs. 1 pc.

D 1 F MHKL 2 20 S D 1 F M9N Long stroke type Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of auto switches Number of fingers Nil S 2 pcs. 1 pc.

Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Pressure Control Equipment D B K P C C C K U P O S A A H L C to U S O H L to B D !0 o D-D C-C B-B A-A !0 o !1 !1 Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters y y q IN OUT IN OUT u r t u r t i i The numbers are the same as the "Construction" of the Best Pneumatics No.5 Series AWG.

M26 x 1.5 Rc(PT) 1/4 70 43 16 11 29 50 16 92 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 150 60 40 182 10 19 REA 50, 63 14 2 -Rc(PT) 1/4 L 0 0.2 NA 33 14 E(h8) E(h8) X PD I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 23 25 K W 23 25 4 -M8 x 1.25 Effective thread depth 12 C 0.1 14.5 B 2 S + Stroke 2

Max 1.25 9 80 92 108 8 M1 OX 1.S 15 18 M1 Oxl .5 9 63 103.5 MIOx l .S 11 99 116 13' 10 M1 6X2.0 21 22 M12xl .7S 11 123 Ml 2x 1.75 80 Clevis Mount: C0020P 0 -0 OM-DO Special cap bolt (mm) eo.. _ N CD CL ew ev A 0 R CU ex cz RR Ll H H Thread e I (mm) C Depth M8xl .2S M8x l .25 14 117 I .

4 o i q !3 e r !2 !1 u t w y CHK CHN CHM CHM CHS CH2 o !

(page 72) Y U16 0x0064 5 R/W (100) Setting of OUT1 delay time at ON. 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment dtH1 (OUT1 delay time at ON) Y U16 0x0 6 R/W (0) dtL1 (OUT1 delay time at OFF) Setting of OUT1 delay time at OFF. 0x0 ~ 0x1770 (0 ~ 6000) 0.01 s increment Y U16 0x0 7 R/W (0) OUT1 Accumulated threshold value setting (L) Consider the accumulated inclination when reading or writing

Used as switch output device 225o [ dtH2] Delay time setting at ON [ 0.00] 0.00 s No.

Relief time from 0.5 MPa to 0.1 MPa Port 1 (P) pressure (MPa) VEX130 Set point Relief time (S) Pressure (MPa) Port 1 (P) pressure (MPa) VEX150 Tank size (l) Set point 2. Relief time from 1000 l tank Port 1 (P) pressure (MPa) VEX170 Set point Relief time (S) 3.

Orange mark Maintenance Inspection Warning q Replace the filter element within 2 years of operation or before the pressure drop reaches 0.1MPa.

Welded Connection Series Back Pressure Regulator for Ultra High Purity Series BP1000 For UHP gas delivery Operating pressure: 0.5 to 300 psig (0.0034 to 2.1 MPa) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e BP10 01 2PW FV4 FV4 S Bonnet option Operating pressure Bonnet Standard Panel Installation 3) Code Pressure

Ordering example) ZX1051-K15LOZ-EC(-Q) 1 pc. VJ10-20-4A-6 2 pcs. 6 4A 20 VJ10 6 10 15 20 25 30 0.6 m 5A 20 ZS ZF For ZSE3 1 m (For 100 VAC) 1.5 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire with connector part numbers. Ordering example) ZX1051-K15LOECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.

Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) Note 3) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: 20C, r Circulating uid ow rate: Rated ow, t Power supply: 200 VAC Note 4) q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200 VAC Note 5)

Gauge port 2) (Inlete, Outletr) Porting Configuration Pressure gauge Code r psig/bar unit MPa unit r e No pressure gauge 0 6 10 20 40 60 Q w q w q 600 psig/bar 3) 4.1 MPa 7 MPa 14 MPa 28 MPa 41 MPa 70 MPa qIN wOUT eGauge port (Inlet) rGauge port (Outlet) Connections (Inletq, Outletw) 1000 psig/bar 3) Ports Code 2000 psig/bar 3) Connections 4P V 4PN e 4P 4PN 4000 psig/bar 3) 4 4B NPT 1/4 inch

1 Multistage Ejector ZL112A Series 1 DC type only RoHS How to Order ZL112A Without valve M Z D A M L ZL112A K1 5 With valve q t o u i w e r y !0 !1 !

Positioning hole Positioning hole Caution e One-touch fitting Tightening torque: 0.12 Nm q Unit Assembly Part No. r Bracket Assembly Part No. 00 VV061 08 5 H Description Part no.