HRX-OM-W060

Date and time, Operation time and Alarm history are not reset. (1) Data reset setting screen Table 5.4-21 Data reset setting No.

7ND9071en

19 70mm 6 7.5 70mm 12 14 180mm 25 21 20mm 3 4 20mm ND9203 ND9206 VD_48 NDX VD_48 20mm 9 11 VC_70 140mm ND9206 20 19 40mm 4 7 40mm 12 15 180mm 24 22 50mm 5 8 50mm 14 17 240mm 28 27 60mm 6 9 60mm 16 19 VC_80 180mm ND9206 31 30 70mm 7 10 70mm 18 21 240mm 35 31 80mm 8 11 80mm 20 23 280mm 39 34 3 6 20mm VD_55 NDX VD_55 ND9206 Note: Mounted with ND9 / NDX smart positioners and B72G-2AS-980 AFR

AC Servo Motor Driver (Pulse input type/Positioning type)

Parameter Configuration using Setup software (MR Configurator2TM) .19 5.1 PC Setup software (MR Configurator2TM ) . 19 5.1.1 Installation Method . 19 5.2 Basic driver set-up for Initial Test Drive . 19 5.2.1 Start up the Setup software (MR Configurator2TM). 20 5.2.2 System Settings . 21 5.2.3 Model Selection . 21 5.2.4 Driver ON LINE Check . 22 5.2.5 Help Function . 22 5.3 Parameter setting

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Table (16) Basic style replacement parts For with Air cushion refer to page 21 for detailed Product structure. Product no.

JXCx-OMT0030CN

JXC-OMT0030CN GWProfibus / LEC-GPR1 1 . 4 2 . 6 21 . 6 22 . 6 23 . 7 24 () . 8 1 . 8 2 . 8 3LEC . 8 4 . 8 5 . 8 6 . 9 7 . 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23

Electric Actuator with Integrated Guide

Step designation BIT 5 8 Stp-no. bit4 20 BIT 6 21 Stp-no. bit5 8 BIT 7 9 Stp-no. bit6 21 22 Stp-no. bit7 9 35V DC max. + SET-ON 10 Temporarily stops the program run by means of the ON input. 3 Temporary stop READY HOLD 23 BUSY 11 Performs an emergency stop when ON input stops. 16 Emergency stop (nonlogical input) ALARM STOP 24 COM 12 ALARM RESET 4 Alarm release Releases the alarm being generated

Electric Actuators

This may lead to damage and malfunction. 21 Series LEPY/LEPS Specific Product Precautions 3 Be sure to read before handling. Refer to back cover for Safety Instructions and the Operation Manual for Electric Actuator Precautions.

Stainless Steel 316

Model T (M) Weight (g) H T 2 x Applicable tubing (mm) 4 6 8 10 12 KQGE04-00 KQGE06-00 KQGE08-00 KQGE10-00 KQGE12-00 M12X1 14 37 13 18 21 5.6 M14X1 17 38 15 18.5 29 10.4 M16X1 19 42.8 17 20.9 40 26.1 M M M20X1 24 47 21 23 71 41.5 L M22X1 27 50.6 23 24.8 95 58.3 Note) Figures shown when using FEP tubing 3 Applicable tubing: Inch size/Connection thread: UNF, NPT Union Elbow Male Connector Union

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Nil S n Rc NPT Nil TN TF 21 22 Relief type Vacuum suction type G Cylinder stroke (mm) Rubber bumper only Model Cushion Auto switch mounting Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 Relief type Vacuum suction type 1/8 25,

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 6 10 16 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 5, 10, 15, 20, 25, 30

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Nil S n Rc NPT Nil TN TF 21 22 Relief type Vacuum suction type G Cylinder stroke (mm) Rubber bumper only Model Cushion Auto switch mounting Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 Relief type Vacuum suction type 1/8 25,

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Copper, fluorine and silicone-free + Low particulate generation Action 21 22 Relief type Vacuum suction type D Double acting Rod end thread Nil M Standard (Rod end female thread) Rod end male thread Model Model Bore size (mm) Port size Relief port Action Standard stroke (mm) 10-/21-CQSB12 10-/21-CQSB16 10-/21-CQSB20 10-/21-CQSB25 11-/22-CQSB12 11-/22-CQSB16 11-/22-CQSB20 11-/22-CQSB25 12

Cylinder with Lock Series CLS

15 31 27 M30 x 1.5 Up to 1000 3 30 14 35 50 47 161 78 18 110 146 1/4 128 36 90 59 43 16 114 64 110 M14 x 1.5 15 31 27 M30 x 1.5 Up to 1000 5 46 56 53 182 95 23 132 169 1/4 144 40 90 59 43 14 18.5 130 74 120 M16 x 1.5 17 36 30.5 M36 x 1.5 39 Up to 1200 16 30 60 106 118 48 17 135 41 25 39 63 204 36 167 195 3/8 162 45 115 70 18.5 149 86 20 35 M18 x 1.5 M40 x 1.5 5 M12 x 1.75 Up to 1200 21

Modular Type Regulators Series AR

Body Size 21 31, 41 Description Metal Bowl Metal Bowl With Sight Glass Residual Pressure Relief Valve Symbol Nil V NPT Threads Applicable Model Combo All All Description Without Valve With Downstream Valve Port Size Symbol 02 03 04 Applicable Body Size 21 31 41 Port Size 1/4 3/8 1/2 Accessories Symbol Nil C D Applicable Body Size All 31, 41 31, 41 Description None Float Auto Drain (N.C.)

AW

Body Size 21 31, 41 Description Metal Bowl Metal Bowl With Sight Glass Residual Pressure Relief Valve Symbol Nil V NPT Threads Applicable Model Combo All All Description Without Valve With Downstream Valve Port Size Symbol 02 03 04 Applicable Body Size 21 31 41 Port Size 1/4 3/8 1/2 Accessories Symbol Nil C D Applicable Body Size All 31, 41 31, 41 Description None Float Auto Drain (N.C.)

Modular/F.R.L. Units Series AC

Body Size 21 31, 41 Description Metal Bowl Metal Bowl With Sight Glass Residual Pressure Relief Valve Symbol Nil V NPT Threads Applicable Model Combo All All Description Without Valve With Downstream Valve Port Size Symbol 02 03 04 Applicable Body Size 21 31 41 Port Size 1/4 3/8 1/2 Accessories Symbol Nil C D Applicable Body Size All 31, 41 31, 41 Description None Float Auto Drain (N.C.)

High-Precision Digital Pressure Switch

Compact: Max. 17.5 mm shorter Lightweight: Max. 21 g lighter (When an M5 female thread is used.) (When an M5 female thread is used.)

Line filter

P A B C D E G J M N Q R S T U V W AFF20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AFF30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AFF40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl drain Auto Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with

Mist Separator

P A B C D E G J M N Q R S T U V W AM20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AM30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AM40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl Auto drain Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with level

Micro Mist Separator

Standard specifications Bracket mount Indicator mount P A B C D E G J M N Q R S T U V W AMD20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AMD30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AMD40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl Auto drain Semi-standard