Series: 5 (VFA5000), Manifold: 21 (P.R Port Size 1/2), Stations: 03, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Series: 5 (VFA5000), Manifold: 21 (P.R Port Size 1/2), Stations: 02, Type: 1 (Common Exhaust), Thread: 00N (NPT)

Clean Series: 21 (Copper, Fluorine and Silicon-free + Low Particle Generation), Stations: 04, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FU1 (w/1.5 m Cable, Top Entry), Option: N (w/Name Plate)

Clean Series: 21 (Copper, Fluorine and Silicon-free + Low Particle Generation), Stations: 03, Cylinder Port: C6 (w/One-touch Fitting for ø6), Kit: FS0 (w/o Cable, Side Entry), Option: D (DIN Rail Mount Style)

Special Applications: 21-AR (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 40, Reverse Flow: No, Thread: Rc, Port Size: 03 [3/8 (Size 25, 30, 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: None

Special Applications: 21-AR (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 40, Reverse Flow: No, Thread: Rc, Port Size: 04 [1/2 (Size 40)], Accessory, Not Attached: G [Round Pressure Gauge w/o Limit Indicator (Size 20 to 60)], Option: None

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Accessory: BG (B+G), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 30, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Accessory: BG (B+G), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 40, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 03 (3/8), Accessory: BG (B+G), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 40, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 02 (1/4), Accessory: BG (B+G), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: BG (B+G), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: None, Thread: N (NPT), Port Size: 02 (1/4), Accessory: BG (B+G), Specifications: 3R (3+R), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: None, Thread: N (NPT), Port Size: 01 (1/8), Accessory: G [Round Pressure Gauge ("20-" Type Includes Limit Indicator)], Specifications: 0.005 to 0.4MPa Setting, Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 02 (1/4), Accessory: BG (B+G), Specifications: 1R (1+R)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 02 (1/4), Accessory: GH (G+H), Specifications: 1R (1+R)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 02 (1/4), Accessory: G [Round Pressure Gauge ("20-" Type Includes Limit Indicator)], Specifications: Y (Upward Facing Knob)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 40, Backflow Function: K (Backflow Function), Thread: N (NPT), Port Size: 04 (1/2), Accessory: H (Set Nut for Panel Mount), Specifications: 1 (0.005 to 0.2 MPa Setting), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 40, Backflow Function: None, Thread: N (NPT), Port Size: 04 (1/2), Accessory: H (Set Nut for Panel Mount), Specifications: 1R (1+R), Pressure Unit: Z (Name plate & Pressure Gauge in Imperial Units: psi)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: B (Bracket), Specifications: 1R (1+R)

Special Applications: 21- (Clean-room, Copper-free, Fluorine-free, Silicon-free), Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 02 (1/4), Accessory: H (Set Nut for Panel Mount), Specifications: 3 (0.008 to 0.6 MPa Setting)