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① When there is no piping rotation stopper, the part numbers are as follows: IRV10-01/02□-X3 and IRV20-02/03/04□-X3.
② When there is a piping rotation stopper, the part numbers are as follows: IRV10-01/02□-X28 and IRV20-02/03/04□-X28.
The IRV10 series catalog can be found here.

Poloneza 89, 02-826 Warszawa, Poland Red LED is ON. Non-restorable error is detected. (e.g. Hardware failure) (1) Set the number of occupied I/O points for the module and each parameter of the "remote". PORTUGAL (351) 21 472 45 00 OFF No remote connected. Refer to the LED Display.

Poloneza 89, 02-826 Warszawa, Poland Troubleshooting Green LED is ON. Remote is normal. (1) Set the number of occupied I/O points for the module and each parameter of the "remote". Restorable error is detected. (LED flashes when more than one diagnostic information item is detected.)

The following shows an example of a switching count set point with 50.000.000 cycles according to the transmission method of the upper communication. 50.000.000(dec) = 80 F0 FA 02 (hex) (little endian) 50.000.000(dec) = 02 FA F0 80 (hex) (big endian) -22No.EX-OMY0021 Output number layout / Process data The process data of this product is designed with byte array base data type, so the byte

. -70No.PF-OMO0005-F Dimensions (in mm) PFMB7201-02 PFMB7201-N02 -71No.PF-OMO0005-F PFMB7201-02L PFMB7201-N02L -72No.PF-OMO0005-F PFMB7201S-02 PFMB7201S-N02 -73No.PF-OMO0005-F PFMB7201S-02L PFMB7201S-N02L -74No.PF-OMO0005-F PFMB7201-F02 -75No.PF-OMO0005-F PFMB7201-F02L -76No.PF-OMO0005-F PFMB7201S-F02 -77No.PF-OMO0005-F PFMB7201S-F02L -78No.PF-OMO0005-F PFMB7201-C8 -79No.PF-OMO0005-F PFM7B7201

Product Warranty HRS Series 9-2 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

Product Warranty HRL Series 9-2 Revision history Revision B : Dec. 2019 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

Product Warranty HRL Series 9-2 Revision Rev.C JAN 2023 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2023 SMC Corporation All Rights Reserved

(Coil)(Lead wire) 3 positions, closed center B port used VS4424-02(Coil)(Lead wire) Port size Rc1/4 Voltage AC100,110,200,220,24V(50/60Hz) DC12,24,32,48,100,110V Leads entry Grommet , DIN type terminal Manual override Provided Insulation Equivalent to class B Allowable voltage variation -15% to +10% of rating. 1-2.

The following shows an example of a switching count set point with 50.000.000 cycles according to the transmission method of the upper communication. 50.000.000(dec) = 80 F0 FA 02 (hex) (little endian) 50.000.000(dec) = 02 FA F0 80 (hex) (big endian) Structure of Output Switching Counts State (index 77) The output state for switching counts threshold exceeded of each output (output 0 to output

Polyurethane tube: +0.15mm or -0.2 at max. disconnects. 7 - 6 Construction AS1002F, AS2002F, AS2052F AS1002F-02 AS3002F, AS4002F 8 - S Revision history A : Added the Safety Instructions sentences and Recommended Piping Conditions Table. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject

Description Materials Bonnet Aluminum die-cast Nozzle diaphragm assembly Aluminum, Weather resistant NBR Seal HNBR Seal NBR Diaphragm spacer Polyacetal Supply diaphragm Weather resistant NBR Exhaust diaphragm assembly Aluminum, Weather resistant NBR Valve assembly Aluminum, stainless steel, HNBR Body Aluminum die-cast Grease: lithium grease -8- How to order IR 0 0 02 0 2 BG A

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice

Fluid Standard specifications Option Note) Air (Standard, Dry) Vacuum (up to 1.3 x 102 Pa) Turbine oil Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x 101 Pa)(V) Non-leak (106 Pam3/s or less) (V) Other Note) Refer to page 17-3-14 Applicable Fluids Check List for details of special fluids outside of the standard options and specifications.

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

IN 84.8 59 42 25 CQSY16-PS 12 6 OUT 113 79 57 34 CQSY20-PS IN 151 106 75 45 CQSY25-PS 16 8 OUT 201 141 101 60 When only grease for maintenance is necessary, please order by the following part numbers.

How to order HF2BFB 30 02 (1) (2) (3) (4) (5) (2) Symbol Details Body size 30 40 BFA Antibacterial Filter (5m) BFB Antibacterial Filter (0.1m) (1) Filter type BFC Odor Removal Filter BFD Bacteria Removal Filter Nil Rc N NPT (3) Thread type F G 02 1/4 (4) Port size 03 3/8 04 1/2 Nil Flow direction: left to right (5) Semi-standard R Flow direction: right to left 10 5.

Diagnostic URL https://www.smcworld.com Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Refer to the SMC website (URL https://www.smcworld.com) to obtain more detailed information about diagnostic.