101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

Thomas Liquid Peristaltic Pump Flow Rate: 430 ml / min , 430 ml / min, Max Pressure: 10 m H20 , 10 m H20, Max Suction: 8 m H20 , 8 m H20, Voltage (DC): 24, DC Motor Type: Standard, Item Dimensions: Length: 3.98 in / 101 mm Width: 3.15 in / 80 mm Height: 3.78 in / 96 mm , Length: 3.98 in / 101 mm, Width: 3.15 in / 80 mm, Height: 3.78 in / 96 mm

Thomas Liquid Peristaltic Pump Flow Rate: 430 ml / min , 430 ml / min, Max Pressure: 10 m H20 , 10 m H20, Max Suction: 8 m H20 , 8 m H20, Voltage (DC): 24, DC Motor Type: Standard, Item Dimensions: Length: 3.98 in / 101 mm Width: 3.15 in / 80 mm Height: 3.78 in / 96 mm , Length: 3.98 in / 101 mm, Width: 3.15 in / 80 mm, Height: 3.78 in / 96 mm

Clean Gas Filter

The element replacement procedure for SFA can be downloaded via the SMC website. -9- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved -10-

Series VFR consists of 5 port pilot solenoid valves with rubber seals and base mounted type manifolds, available in plug-in and non plug-in styles. Port sizes range from 1/8 to 1/2 with Rc(PT), NPTF & G(PF) thread types available. Various options also available. VFR3000 series manifold, metric, Plug-in & non plug-in styles, Wiring types (non plug-in): grommet, grommet terminal, Conduit terminal

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 2 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 02 (Rc1/4)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 3 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 02 (Rc1/4)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 8 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 02 (Rc1/4)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 6 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 02 (Rc1/4)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 7 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 02 (Rc1/4)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 4 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 02 (Rc1/4)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 5 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 02 (Rc1/4)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 3 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (Rc3/8), Thread: F (G)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 5 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (Rc3/8), Thread: T (NPTF)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 8 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (Rc3/8), Thread: T (NPTF)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 2 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 02 (Rc1/4), Thread: T (NPTF)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 4 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (Rc3/8), Thread: T (NPTF)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 3 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 02 (Rc1/4), Thread: T (NPTF)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 2 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (Rc3/8), Thread: T (NPTF)