Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient & fluid temperature: -10 to 50°C, 3000 SERIES 5 PORT VALVE, 4/5 PORT SOLENOID VALVE, VVD, 121

Single acting, spring return, pin cylinder, Compact design-minimizes mounting space, Three bore sizes available, Strokes from 5mm to 15mm available, Two mounting styles available, Pin Cylinder, Double Acting, Sgl Rod, ROUND BODY CYLINDER, 371, 121 lb

3000 SERIES 5 PORT VALVE, 4/5 PORT SOLENOID VALVE, VVD, 121 lb

3000 SERIES 5 PORT VALVE, 4/5 PORT SOLENOID VALVE, VVD, 121 lb

internally (except size 10) to further improve reliability.Rotary actuator, free-mounting type, CRBU2, Sizes: 10, 15, 20, 30, 40, Possible direct mounting from 3 directions, Three styles of units available: switch, angle adjusting, switch and angle adjusting, Available in single or double vane, Single vane type can rotate up to 270°, Actuator, Free Mount Rotary, ROTARY ACTUATOR, 517, 121

High Vacuum L Type Valve

equivalent) Nut (Material: SUS304 or equivalent) Shaft (Material: SUS304) 7 Working principle Port 1(P) is normally pressurized, and the valve opens when the solenoid valve is turned ON and closes when it is turned OFF. 10 XL-OMV0019 5-2.Dimensions C (KF flange) (K flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121

High Vacuum L Type Valve

Valve (Material: SUS304) 6 3 Valve seal 2 (Maintenance part) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 (Valve seal 2) Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMV0003 5-2.Dimensions Size 16, 25, 40 E C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121

SI unit for DeviceNet TM

The specification of the terminating resistor is 121 1%, 1/4 W. Figure 2 (3)How to connect. Tighten the connector fixing screws (M2.5 slotted head screws) firmly with a tightening torque of 0.2 to 0.3 Nm. Figure 3 -10No.EX-OMO0004-D 2. Wiring of the power supply Connect the power supply to the power supply connector (1 pc.).

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Stopper pin Stainless steel 18 Motor pulley Aluminum alloy 38 Magnet 19 Spacer Aluminum alloy 39 Seal band stopper Stainless steel 20 Pulley shaft A Stainless steel 721 LEJB Series AC Servo Motor Dimensions: Belt Drive LEJB40 Body mounting reference plane Motor cable (7) +0.030 0 5H9 ( ) depth 6 (160) 4 x M6 x 1 depth 10 84 110 M4 x 0.7 depth 8 (F.G. terminal) 18 (3.1) (3.1) 105 26 56 44 3.5 121

Electric Actuator/Slider Type

Aluminum alloy 35 Bearing 17 Speed reduction pulley Aluminum alloy 36 Bearing 18 Motor pulley Aluminum alloy 37 Stopper pin Stainless steel 19 Spacer Aluminum alloy 38 Magnet 58 Series LEJB Dimensions: Belt Drive LEJB40 Body mounting reference plane Motor cable (7) +0.030 0 5H9 ( ) depth 6 (160) 4 x M6 x 1 depth 10 84 110 M4 x 0.7 depth 8 (F.G. terminal) 18 (3.1) (3.1) 105 26 56 44 3.5 121

01-mxw-e

Applied part GR-S-010 (10 g) GR-S-020 (20 g) GR-L-005 (5 g) GR-L-010 (10 g) Guide Cylinder 121

0.5

Fine particles are generated due to wear of emitters and motor sliding during operation. 26 IZF10/IZF10R Series Dimensions 96 82 80 79 39 37 110 121 96.5 94 103 Holding bolt Bracket 60.3 6.5 46 1 Power supply switch LED indicators Balance adjustment trimmer IZF10R 98.9 Air flow adjustment switch 64.1 Without bracket (39) 30 3 x 5.5 through 33.5 1.5 4 23 25 24.5 (46) 50 12.5 66.8 5.5 5.5 30

Series KV2 Fittings

30.00 30.00 30.00 21.7 21.7 19.2 22.2 22.7 21.7 26.0 30.7 33.2 28.7 26.2 34.2 32.7 29.7 38.6 37.9 47.5 50.5 52.5 17.6 17.6 13.4 18.1 16.9 15.6 17.8 26.6 27.4 22.6 18.1 28.4 26.6 21.6 32.5 29.8 41.4 42.4 43.9 16 16 16 17 17 17 17 21 21 21 21 22 22 22 25 25 33 33 33 1.6 1.6 1.6 3.5 3.5 3.5 3.5 5.4 5.4 5.4 5.4 8.5 8.5 8.5 9.8 9.8 12.8 12.8 12.8 8 9 14 8 14 24 54 23 27 25 42 40 40 41 68 57 111 121

Thermo-chiller/Rack Mount Type

switch Operation display Serial communication connector Power supply connector Cover panel Contact input/output communication connector Circulating fluid fill port 10 Fluid level gauge Circulating fluid return port Rc1/2 Facility water outlet Rc3/8 361.4 7 Handle Product label 259.8 399 210 396 Facility water inlet Rc3/8 139.1 226 38 0 73 37.5 0 91 Handle Circulating fluid outlet Rc1/2 0 121

HRS100/150

Secure with bolts, anchor bolts, etc. 121 HRS100/150 Series Specific Product Precautions 3 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions. Mounting/Installation Caution Caution 3.

53

(including 4 M10 bolts) Note 10) Weight (dry state) kg Approx. 121 Note 1) Use a 15% ethylene glycol aqueous solution if operating in a place where the ambient temperature and/or circulating fluid temperature is 10C or less. Note 2) Use fluid in condition below as the circulating fluid.

Exhaust Cleaner Series AMC

equipartions of circumference) Bracket Port size R, NPT, G Cylinder speed (mm/s) Dimensions Element Drain piping type Drain guide Drain cock Oil bowl B' C C Drain cock Drain guide (A) (B) Rc , NPT, G Mounting bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

AMR3000 to 6000

Regulator with Mist Separator AMR3000 to 6000 Dimensions AMR3000 AMR4000, 5000, 6000 N Bracket mounting dimension With auto drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) P 50 35 45 46.5 R 78 97 98 115 S 8 7 10 15 T 9 9 11 11 B 260 298 366 432 L 178 211 277 321 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 436 10 10 70 70 103 121