SMC Corporation of America
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(P1+0.1013) l/min(ANR) Calculation by effective area Q=109.6.S.(P1+0.1013) l/min(ANR) Water How to Read the Graph In case of a flow of 2 l/min.

Steel) IP300 . 1P3100 DIMENS'ONS MODEL 1P300 (Lever Type) tu O O r o r n N ^ " n o r7a <6,69) (LEVER TYPE) MODEL 1P3100 (Rotary Type) O N / (2) t/4 t,tPt J o o iJ5 [8 so]]NVOLUTE SPL]NE 5HA:T 4 9 2 1 [ 1 2 s 0 0 ] r r81 lJ oool oo zzo fr ool r 1 3 T H P U H O I E S \ \ o o L O O N 0 945 I 24 001 2 7ss [7r oo] N O World Wide Ag{C Support...

Steel) IP300 . 1P3100 DIMENS'ONS MODEL 1P300 (Lever Type) tu O O r o r n N ^ " n o r7a <6,69) (LEVER TYPE) MODEL 1P3100 (Rotary Type) O N / (2) t/4 t,tPt J o o iJ5 [8 so]]NVOLUTE SPL]NE 5HA:T 4 9 2 1 [ 1 2 s 0 0 ] r r81 lJ oool oo zzo fr ool r 1 3 T H P U H O I E S \ \ o o L O O N 0 945 I 24 001 2 7ss [7r oo] N O World Wide Ag{C Support...

0.5 s 1 s 1.5 s 2 s 2.5 s 50 50 100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 3) Supply pressure: 0.2 MPa Flow rate consumption: 188 L/min (ANR) 4) Supply pressure: 0.3 MPa Flow rate consumption: 253 L/min (ANR) 200 200 150 150 2.5 s 2 s 100 100 50 50 0.5 s 1 s 1.5 s 2 s 0.5 s 1 s 1.5 s 50 50

100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 CEP1 Max. 500 mm/s of high speed transfer is possible.

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

() N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I 1 W Z (2 m) (2 m) + () 2 R S () () T V () () A A B B -11No.PF-OMJ0005CN-I IN OUT X693 IN OUT 73 IN OUT

\ i n r t l l i r r ' t t l o n l qsilrrc NEW PRODUCT GUIDE Sil"Tivrc ,rt{ ll,( '!\'orlJ \ l.tf!

PRODUCT FEATURES S E R I E S I P 6 0 0 0 / I P 6 1 0 0 I HIGH PERFORMANCE POSITIONER Cross section of the exhaust system. I RESISTANT TO HOSTILE ENVIRONMENTS Employs the combination of the check valve and the labyrinth effect. I EXCEPTIONAL SHOCK AND VIBRATION PERFORMANCE EXH.

\ i n r t l l i r r ' t t l o n l qsilrrc NEW PRODUCT GUIDE Sil"Tivrc ,rt{ ll,( '!\'orlJ \ l.tf!

. *2 With ejector 63, 80 Application Examples Robot handling Palletizing Automobile Case packer 254 Vacuum Pad with Ejector ZHP Series 63, 80 RoHS ZK2 How to Order ZQ ZHP 80 BM N B 00 Without ejector ZR ZB ZHP 80 BM N B 10 C6 S With ejector ZA Pad diameter Exhaust release ZX 63 63 80 80 S Silencer exhaust ZM Supply (P) port Pad form Symbol Type Port size C4 Metric 4 One-touch fitting C6 6

Lubrication failure Apply the specified grease after cleaning of parts ( Grease pack: GR-R-010 ( 10g ) ) 2. Deformation of Replace the cylinder with a new one. piston rod When reinstalling the product, adjust the load and mounting position. 3. Insufficient Supply appropriate pressure. pressure 4. Operation at a low Use at 50 mm/s or faster. speed outside of the limit.

1.0A AC DC500V 50M 690g 13 3-3 7.6 R03-R8M 205m 50cm 14.5mT DC10.826.4V1 50mAMAX. 0.1mm/ 02mm 1 MAX.DC30V50mA) A /B 500mm/s AC500V1 (12E ) DC500V50M (12E ) 33.3Hz6.8G XY 2 Z 4 JIS D1061 30G XYZ 3 IP65 () 5m10m15m20m R03-R8F 1CEU2 14 4. 4-1 () CE2 B 40 100 J 2 B 1 L n F G C D () T J 50 50mm K 63 63mm 80 80mm N 100 100mm R H Z mm mm mm

Stainless steel 9 With switch only Magnet plate Aluminum alloy 10 With switch only Switch mounting bracket 11 Scraper 12 With back-up ring Rod seal NBR 13 Piston seal 14 Tube gasket 15 Piston gasket 18 Series CHKGB Dimensions 2-Rc P F with effective thread depth G Q S Width across flats f c R D R a b g e H E C B + Stroke h + Stroke 4-K through J 8-L counter bore A + Stroke M Rod end male

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -19No.PS-OMU0002CN-D Z/ISE20A(F)-S/-R () DC(+) NPN 2 Max.28 V80 mA 1 V R15 V OUT1 1 k OUT2 S420 mA DC(-) 12 V 300 24 V 600 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -20No.PS-OMU0002CN-D -V/-T () DC(+) PNP 2 Max.80 mA 1 V T15 V OUT1 1 k OUT2 V420 mA DC(

-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -X () -S/-R () NPN 2 Max.28 V80 mA 1 V -21No.PS-OMU0005CN-C -V/-T () PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 -V/-T () PNP 2 Max.80 mA 1 V -Y () -V/-T () PNP 2 Max.28 V80 mA 1 V -22No.PS-OMU0005CN-C [] 3 0.2 [] / OUT2 OUT2 OUT1 OUT1 [F10]30 () 13

-LL-02 L (Lead wire length) 104 Insulator: Red (+) Insulator: Black () 0.3 mm2 4.1 34.5 37.2 Terminal type (TT) 53-SY5140(R)-TT-02 Max. 10 L (Lead wire length) 120.8 Lead wire marking No. 1 (+), No. 2 () 0.75 mm2 5.9 23 Base Mounted Series 53-SY5000/7000/9000 Dimensions: 53-SY5000 2-position double, 4-position dual 3 port L-type plug connector (L) 19 18 9.5 2 A B C 53-SY5 40(R)-L-02 37.2

The smoothness of the surface and closeness of the oxidize layer can effect (increase/decrease) this. 7 Ultimate pressure Ultimate pressure is P=Q/S, where the sum of mass flow rates for outgassing (Qg) and leakage (Ql) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, QlS shown as above, and the ultimate pressure of the pump itself.