PSxx-OMP0001E

A Dimensions COM 16 KQ2 06-M5 HLT SY Operator Setting 16 KQ2H/L07-M5 This operation manual is intended for those who have knowledge of machinery using pneumatic equipment, and have sufficient knowledge of assembly, operation and maintenance of such equipment. Only those persons are allowed to perform assembly, operation and maintenance.

Valve; w/Stop Valve), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: LT [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate: None; Temp.: None; Temperature Sensor: Yes], Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/

Valve: None; Stop Valve: None, Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: BT (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: PNP; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated

Valve; w/Stop Valve), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display

Series: 25A-PF3W7, Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 06 (3/4), Output Specification/Temperature Sensor: E (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 06 (3/4), Output Specification/Temperature Sensor: L2T (Out 1: IO-Link/Switch Output, N/P; Out 2: Switch Output, N/P; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature

Rated Flow Range: 202 (20 to 2000 L/min), Thread Type: N (NPT), Port Size: 06 (3/4), Output Specifications: L4 [Out: IO-Link, Switch Output (N/P); Func: Analog Current Output <-> External Input; Monitor Unit Model: PFG310 Series], Option 1: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (SI Unit Only)

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: TW4 (1/4 Inch Tube Weld), Connections, Outlet: TW4 (1/4 Inch Tube Weld), Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet: No Gauge Port

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 3PW [3 Ports (1-In; 2-Out; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: L [-30 in.Hg

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: TW4 (1/4 Inch Tube Weld), Connections, Outlet: TW4 (1/4 Inch Tube Weld), Gauge Port, Inlet: No Gauge Port, Gauge

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: No Gauge Port, Gauge Port, Outlet

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 3PW [3 Ports (1-In; 2-Out; 4-Gauge Port Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: 0 (No Pressure

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: FV8 (1/2 Inch Face Seal, Female), Connections, Outlet: FV8 (1/2 Inch Face

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: FV4 (1/4 Inch Face Seal

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: 316L SS; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: 0 (No Pressure Gauge, Connections