Size: Body Ported, Operation: Air Operated Style, Port Size: 1+1/2, Thread: G(PF), Voltage: -, Lead Wire: -, Surge Suppressor: -, Option: -

Size: Body Ported, Operation: Air Operated Style, Port Size: 1+1/2, Thread: NPTF, Voltage: -, Lead Wire: -, Surge Suppressor: -, Option: -

Size: Body Ported, Operation: Air Operated Style, Port Size: 2, Thread: G(PF), Voltage: -, Lead Wire: -, Surge Suppressor: -, Option: -

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

Model (Hexagon width across flats) ASR ASQ (Hexagon width across flats) AS23 1FE-01-04SK 12.7 17.5 9.3 13.1 24.9 4 9.3 26 30.9 AS23 1FE-01-06SK 13.5 22.9 R 1/8 10.9 12 12 14 44.9 26.9 49.9 48 6 11.6 27 36.3 14.2 53 AS23 1FE-01-08SK 18.5 28.2 12.9 16.2 30.9 8 15.2 29 40.8 AS23 1FE-02-04SK 16 21.9 10.9 16.2 30.6 4 10.4 36 39.6 AS23 1FE-02-06SK 17 25.2 18.4 34 6 12.8 37 42.1 R 1/4 14 14 41.2

Series GS40 Digital Pressure Sensor 1

Accessory None Bracket (Available M5 type only) Nil B 14-11-17 2 Series GS40 Precautions Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Wiring Mounting and Piping Warning Caution 1.

HEC-OM-S008

HECR 5-14 MODBUS communication function 5.10.3 Control operation mode The control operation mode is assigned as follows.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

-06SK 17 25.2 18.4 34 6 12.8 37 42.6 14 R 1/4 14 41.2 46.2 47.2 52.2 18.5 AS231FE-02-08SK 12.9 18.5 28.2 18.3 35.2 8 15.2 39 45.6 AS231FE-02-10SK 21 31 20.2 38.7 10 18.5 42 48.4 AS331FE-03-06SK 17 25.2 38.5 6 12.8 57 46.1 20.6 12.9 AS331FE-03-08SK 18.5 28.2 39.7 8 15.2 60 49.1 14 R 3/8 19 46.5 51.5 52.8 57.8 23 AS331FE-03-10SK 21 32.6 43.7 10 18.5 62 53.5 23 16.2 AS331FE-03-12SK 22 34.4 44.9

Series GS40 Digital Pressure Sensor 1

Accessory None Bracket (Available M5 type only) Nil B 14-11-17 2 Series GS40 Precautions Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions.

IC

VBA VE VY1 SW round head Phillips screws G M3 x 8 Panel PPA Gasket A AL Display protective cover Tighten screws by 1/4 to 1/2 turn after the heads are flush with the panel. 14-8-41

3 Port Air Operated Valve VPA3145/3165/3185 Series

VPA3 2 x Mounting hole Port size Rc (EXH port) Port size 2 x Rc (IN, OUT port) Port size Rc Model Mounting hole IN, OUT EXH A B C D E F G H J K L 3 8 1 2 3 4 VPA3145 71 3 4 8.5 85 14 52 55 93 32 87.4 36 71 80 3 4 VPA3165 82.6 1 4 8.5 1 110 17 68 75 118 45 113 36 71 95 1 1 4 1 1 1 1 4 1 2 VPA3185 118 13 2 132 14 80 95 140 52 140 41 81 105 2 1575

For post-stoppage positioning and locking

W R3 S B Type 3 Proximity Switch B With mounting bracket (Without proximity switch) SC With proximity switch * For details, refer to the table below.

90

B and H cannot be selected at the same time. The current bracket cannot be used for this product. Note 2) Assembly of a bracket and set nuts. Note 3) See pressure unit table below.

Ionizer Nozzle type IZN10 Series IZS

Note 1) 20 16 17 Elbow for piping port/IZN10D B C 180 10 (mm) B Model C 16 D 11.5 IZN10-16 (mm) IZN10-17 (inch) 22 24.5 18.5 12 Female threads for piping (Rc1/8)/IZN10-11 16 Rc1/8 13 Width across flats 14 456 Ionizer IZN10 Series Dimensions L-bracket/IZN10-B1 IZS (Mounting angle adjustable range) 40 7.5 17 IZN IZN 2 x R10 3.4 2 x M3 2 x 3.4 IZF 25 40 5 ZVB 50 Internal mounting IZD IZE 20.5

Exhaust Cleaner for Vacuum Pump AMV Series

AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E

SI unit for EtherNet/IP TM

If a single-solenoid valve is mounted on the standard wiring manifold, the output number for the B side valve is skipped. : Custom wiring for mixed mounting single-solenoid valves and double-solenoid-valves can be specified with a Wiring Specification Sheet.

LFE-OMZ0012

The proof pressure is double the operating pressure range. -28No.LFE*-OMZ0012 Analogue output Flow/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow [L/min] Model B Minimum Maximum A LFE1 0.5 20 LFE2 2.5 100 Flow rate 0 Minimum Maximum rated flow LFE3 5 200 rated flow Out of range -29No.LFE*-OMZ0012 Dimensions 2XPort size Note) The electrical

Air cylinder

Description Note 1 Rod cover 2A Head cover A For Basic type 2B Head cover B For Boss-cut type 2C Head cover C For Integral clevis type 3 Cylinder tube 4 Piston 5 Piston rod 6 Bushing 7 Seal retainer 8 Retaining ring 9 Bumper A 10 Bumper B 25 or largerThe same as bumper A 11 Rod seal 12 Piston seal 13 Wear ring 14 Bushing for clevis 15 Mounting nut 16 Rod end nut 17 Plastic magnet For CDM2

PA3145/3165/3185

J 3 8 1 2 3 4 VPA3145 71 3 4 85 14 52 55 93 32 87.4 36 71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

switches 32 40 B Through hole/ Double end tap common (standard) 32mm 40mm Number of auto switches Bore size 12 16 20 25 Port thread type 2 pcs. 1 pc.

Series LX Construction and Mounting

Description Material Aluminum alloy Stopper B Motor 1 10 Sensor plate Direct acting guide 2 11 Chromated Mild steel Coupling 3 Resin/Alloy steel Aluminum alloy 12 Nut Alloy steel Magnet Rolled screw 4 13 Bumper Body Rubber Anodized 5 14 Aluminum alloy Resin Motor cover Anodized Aluminum alloy Table 6 15 Anodized Aluminum alloy End plate Photo micro sensor 7 16 Anodized Aluminum alloy