MLGC

RLQ MLU View A-A' ML1C DStandard Stroke B AF AP E A AA AB AC AD AE BP BZ C D F G GC Bore size (mm) 20 25 32 40 Stroke range (mm) -X 11 depth 8 26.5 73.5 6.8 75, 100, 125, 150, 200 M6 x 1 depth 12 13 94 16.5 70 32 35 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 50 28 135 118 12 14 depth 10 31.5 86.5 8.6 M8 x 1.25 depth 16 16 19 104 75 37 40 50 29 160 140 16 2075, 100, 125, 150, 200, 250, 300 14 depth 10 31.5

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

1263.5 906 960 12 4 800 180 11-LEJS40S-10001323.5 1363.5 1006 1060 14 5 1000 80 11-LEJS40S-12001523.5 1563.5 1206 1260 16 6 1200 80 535 11-LEJS Series AC Servo Motor Clean Room Specication Dimensions: Ball Screw Drive 11-LEJS63 Body mounting reference plane Note 2) 4 x M8 x 1.25 depth 12 6H9 ( ) depth 7 +0.030 0 (172) 122 M4 x 0.7 depth 8 (F.G. terminal) 25 (3.1) 90 129 Motor cable (6) 68

MLGC

RLQ MLU View A-A' ML1C DStandard Stroke BP BZ C D E F G GC A AA AB AC AD AE AF AP B Bore size (mm) 20 25 32 40 Stroke range (mm) -X 11 depth 8 26.5 73.5 6.8 75, 100, 125, 150, 200 M6 x 1 depth 12 13 94 16.5 70 135 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 50 118 28 35 32 12 14 depth 10 31.5 86.5 8.6 M8 x 1.25 depth 16 16 104 19 75 160 50 140 29 40 37 16 2075, 100, 125, 150, 200, 250, 300 14 depth 10 31.5

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

V MDSUA3 S9PV S9P 3-wire (PNP) T99V T99 12 V 2-wire Grommet R73 Reed switch 100 V 2-wire Connector R73C MDSUA7 Relay, S79 3-wire (NPN) IC circuit Heavy-duty cord MDSUA20 24 V 5 V, 12 V PLC Solid state switch Grommet S7P 3-wire (PNP) T79 2-wire 12 V Connector T79C Auto switches marked with are made-to-order specifications.

Suction Filter with Case FH99 Series

W C D FH FH V (Element removal dimension) HOW L M 4 x J A (mm) A B C D E F G H I J K L M N O P Q R Model FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1/2B M10 x 1.5 Thread depth 22 M10 x 1.5 Thread depth 22 1B 150 75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95

Title not found

Straights and Straight Manifolds . . . . . 11 Elbows and L-Tees. . . . . . . . . . . . . . . . 11 Reducing L-Tees . . . . . . . . . . . . . . . . . 11 Tees . . . . . . . . . . . . . . . . . . . . . . . . . . 12 Combo Tees (3 branches) . . . . . . . . . . 12 V-Tees . . . . . . . . . . . . . . . . . . . . . . . . . 12 3/8 Male pipe thread-to-tube . . . . . . . . . . 13 Straights . . . . .

PSE530/200

Cable length: 3 m Connector + Sensor cable ZS-26-G The connector is not connected to the cable at the time of shipment.

Vacuum Equipment

(Sequence in selection graph (4), ) T2: 12 seconds.

VVXA21/22

size (mm) Model Max system pressure (MPa) Proof pressure (MPa) Pilot port Weight (g) 0.32 0.25 0.40 0.20 0.25 0.20 0.29 0.60 0.64 0.82 1.10 1.66 0.08 0.16 0.19 0.24 0.33 0.60 1.0 1.9 3.8 4.6 8.0 9.0 12 1.5 VXA3115-00 VXA3125-00 VXA3225-00 1.0 1.5 0.3 0.6 0.3 0.08 0.15 0.17 0.20 0.27 0.38 150 0.5 1.0 2.2 230 150 VXA3135-00 VXA3235-00 VXA3245-00 3 230 4 Note) Add the V type (VXA31) 80 g,

33

12 0.10 0.10 Pump head [m] Pump head [m] 10 10 0.08 0.08 8 8 Outlet: 50 Hz Outlet: 50 Hz 0.06 0.06 6 6 0.04 0.04 4 4 Allowable operating range Allowable operating range Return port Return port 0.02 0.02 2 2 0.00 0.00 0 2 4 6 8 10 12 14 16 0 2 4 6 8 10 12 14 16 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] Option (-T): High Pressure Pump Mounted HRSE -A-10-T 012

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

310.5 300 283 13.5 13 14 15 16 360.5 350 331 14.5 373 362.5 347 13 323 312.5 299 12 348 337.5 315 16.5 50

AMF

198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1 8 1 4 3 8 , , 7.5 4 4 5 5 AMF150 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 63 76 76 90 90 10 10 10 10 10 1 4 3 8 , AMF250 1 2 3 8 1 2 , AMF350 3 4 14-20-46 6 Odor Removal Filter Series

AMF

NBR JIS B2401G35 1 pc. u 4.6-30 Series AMF Dimensions: AMF150 to AMF350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4,3/8 1/4, 3/8 5.5 6 6 7 7 139 152 158 184

PSE57  Series Pressure Sensor for General Fluids

lead wire and M12 connector 175 g 182 g 191 g 3 A

VXA21/22

0.17 0.27 0.38 0.32 0.25 0.20 0.32 0.25 0.40 0.20 0.25 0.20 0.40 0.25 0.20 0.29 0.60 0.82 0.29 0.60 0.64 0.82 1.1 1.6 0.64 1.1 1.6 0.08 0.16 0.24 0.08 0.16 0.19 0.24 0.33 0.50 0.19 0.33 0.50 1.9 3.8 8.0 1.9 3.8 4.6 8.0 9.0 12 4.6 9.0 12 1.5 2.2 3 1.5 1.0 0.5 0.3 1.0 0.5 1.0 0.3 0.6 0.3 1.0 0.6 0.3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

MXU

3-wire (NPN) 2-wire Relay, PLC IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Solid state switches marked with are produced upon receipt of order.

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

198 187.5 169 14.5 248 237.5 217 15.5 Stations SS5X5-45PDBC4 C6 C8 Stations L1 L2 L3 L4 2 148 137.5 123 12.5 3 4 5 6 7 8 9 10 185.5 175 155 15 210.5 200 187 11.5 235.5 225 203 16 260.5 250 235 12.5 285.5 275 251 17 198 187.5 171 13.5 248 237.5 219 14.5 173 162.5 139 17 Stations L1 L2 L3 L4 11 298 287.5 267 15.5 13 14 15 16 12 310.5 300 283 13.5 323 312.5 299 12 348 337.5 315 16.5 360.5 350

MXU

3-wire (NPN) 2-wire Relay, PLC IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Solid state switches marked with are produced upon receipt of order.

Hydraulic Filters

After washing the element, make sure the base seal is properly mounted. 500 A Vertical Suction Filter FHIA Series Dimensions Differential pressure indicator 16 B (34) F OUT Removal dimension K H F OUT D E C H Differential pressure indication switch FH FH 62 HOW (65) F IN 4 x I OUT A J G (mm) A B C D E F G H I J K Model Weight (kg) FHIA-04 FHIA-06 FHIA-08 FHIA-10 FHIA-12 FHIA-16 FHIA-20 FHIA

RS2H-OM0045P

A GR-S-010(10g) -7 5. -8-9 -8 -9 12 - , 3 6. 6-1. 1) 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13 - / 6-2. (M4),90 , -9 M4 1.5Nm -10 14 - 6-3. 5080 O 6-3-1. 4 50 : 12.5Nm 63 : 24.5Nm 80 : 42.0Nm -11 6-3-2. 1) -12 -12 2) 15 - 6-3-3. GR-S-010(10g),GR-S-020(20g) 1) 2) 3)O 4) -13 -13 6-3-4. 1)() -14 2)() -14 16 - 6-4. 6-4-1. B , 1 6-4-2. 7. 7-1.