Vacuum System Peripherals:

Port size P, A port R port Model Effective area (mm2) (Cv) Flow characteristics C (dm 3/(sbar)) to VEX3 20 1 3 1 8 1 2 160 to 670 160 to 670 160 to 670 2.4 to 9.8 Air operated 1 2 24 VEX3 00 5 7 9 3 4 to 2 VEX3 21 1 3 to 1 8 1 2 2.4 to 9.8 Body ported External pilot solenoid valve 24 1 2 to 2 3 4 VEX3 01 5 7 9 VEX3 22 1 3 to 1 8 1 2 2.4 to 9.8 Internal pilot solenoid valve 24 1 2 to 2 3

Fieldbus system DeviceNet TM compatible SI unit

) 0 1 EX600-DYE (16 outputs) 0 2 Digital output unit EX600-DYE1 (24 outputs) 0 3 EX600-DYF (16 outputs) 0 2 EX600-DME (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DMF (8 inputs/8 outputs) 1 1 Analogue input unit EX600-AXA 4 (2 byte/1 channel) 0 (2 channels) (2 channels) 0 4 Analogue output unit EX600-AYA (2 byte/1 channel) Analogue I/O unit EX600-AMB 4 4 (2 channels/2 channels) (2 byte

IDX-OM-W011

2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-4 6-5 . 6-7 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2

DOC1003626

. 2-2 2.2 Communication specification . 2-2 2.3 Contact input signal . 2-5 2.3.1 Setting of contact input signal type and form . 2-5 2.3.2 Run/stopRunStopExternal switch signal . 2-7 2.3.3 External switch signal . 2-8 2.4 Contact output signal . 2-10 2.4.1 Contact output signal 1 to 3 .2-10 2.4.2 Contact output signal 4 to 6 . 2-11 2.5 Analog output signal . 2-14 Serial communication . 3

modular-press-e

-8J Note 1) Assembly of a bracket and 2 mounting screws Note 2) Minimum operating pressure: N.O. type0.1 MPa; N.C. type0.1 MPa (AD17/27) and 0.15 MPa (AD37/47).

Modular F.R.L. Pressure Control Equipment

-8J Note 1) Assembly of a bracket and 2 mounting screws Note 2) Minimum operating pressure: N.O. type0.1 MPa; N.C. type0.1 MPa (AD17/27) and 0.15 MPa (AD37/47).

Rotary Actuator

If the load is divided into the 2 cylinders: The center of gravity of load 1 matches the shaft. The center of gravity of load 2 differs from the shaft. Obtain the moment of inertia of load 1: 2 r12 )1 = m1 Load 1: )1 Load 2: )2 2. Obtain the moment of inertia of load 2. 2 r22 )2 = m2 + m2L 2 3.

IDX-OM-W014

: Pneumatic fluid power General rules and safety requirements for systems and their components *2) JIS B8370 URLhttps://www.smcworld.com/ i i-1 . i-1 i-1-1 . i-1 i-2 . i-2 i-2-1 . i-2 i-2-2 . i-3 i-2-3 . i-3 i-2-4 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

IDX-OM-W010

. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 4 2 3 Cautions about Reinstallation . 2 6 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .

Vacuum Unit

White OUT 2 Main circuit Main circuit White OUT 2 OUT2 OUT1 White OUT 2 Main circuit Main circuit Black OUT 1 Black OUT 1 Load 12 VDC to 24 VDC Load 12 VDC to 24 VDC 12 VDC to 24 VDC ack OUT + Load Load Coil alog output) Load Load + + Load 12 VDC to 24 VDC OUT2 White OUT 2 Load White OUT 2 Red Load COM (+, ) 12 VDC to 24 VDC FUNC Blue DC() Blue DC() Load Red U U Load 24 VDC 24 VDC FUNC

Stopper Cylinder

7.5 43.5 61 17.5 E W 4 x M4 x 0.7 effective depth 7 Y Q F 2 x M4 x 0.7 effective depth 7 15.5 0.5 Mounting bolt for rod cover 2 parts 15.5 2 x N through 4 x O counterbore 2 x P (Rc, NPT, M thread) Stroke 25 Y E W Q F T 0 0.1 D 2 x N through 4 x O counterbore E 2 x P (Rc, NPT, M thread) Stroke RSQB -DZ (Double acting) Bore size: 16, 20 16 20 Y Q F A + 2 stroke B + Stroke V H + Stroke Width

Fieldbus system CC-Link compatible SI unit

AI9 AO9 1 1 AI6 AO9 2 AI10 AO10 2 AI7 AO10 2nd division 3 AI11 AO11 3 AI8 AO11 Station I79..I64 O79..O64 0 AI12 AO12 Station I79..I64 O79..O64 0 AI9 AO12 2 I95..I80 O95..O80 1 AI13 AO13 2 I95..I80 O95..O80 1 AI10 AO13 2 AI14 AO14 2 AI11 AO14 3 AI15 AO15 3 AI12 AO15 . .

Fieldbus system EtherNet/IP TM compatible SI Unit

) 0 2 Digital output unit EX600-DYF (16 outputs) 0 2 EX600-DME (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DMF (8 inputs/8 outputs) 1 1 Analogue input Unit EX600-AXA (2 channels) 4 (2 bytes per channel) 0 Analogue output Unit EX600-AYA (2 channels) 0 4 (2 bytes per channel) Analogue I/O Unit EX600-AMB (2/2 channels) 4 (2 bytes per channel) 4 (2 bytes per channel) -58No.EX-OMS0027 When

VZ3000

2 to 20 stations D side: 2 to 10 stations U side: 2 to 10 stations M Mixed Nil Standard length (Specify a longer rail than the standard length.)

4-channel Flow Monitor ( compatible)

Screw shall be tightened 1/4 to 1/2 turns more after touched correctly.

EXxx-OMU0020EN

Diagnostics type 2 Table. 5-6 Overview of Diagnostics type 2 Byte Description 0 General diagnostics 1 1 Valve diagnostics 1 2 General diagnostics 2 3 Valve diagnostics 2 5.1.2.1.

PEEK

N.C. 3 2 1 19 2 x 3.5 Mounting hole (16) 11 24.5 21 12 Plug IN port 5 (Lead wire length) 27 LVM10R4 36 300 16 13 UL1007 AWG22 1 2 3 N.C. N.O. (16) (16) 11 OUT port IN port 10 Push type Manual override 73.5 LVM10R6 N.O. N.C. 3 2 1 25.5 (16) N.O.

EXxx-OMN0029CN

-DXE (16 ) 2 0 EX600-DXF (16 ) 2 0 EX600-DYB (8 ) 0 1 EX600-DYE (16 ) 0 2 EX600-DYE1 (24 ) 0 3 EX600-DYF (16 ) 0 2 EX600-DME (8/8 ) 1 1 EX600-DMF (8/8 ) 1 1 EX600-AXA 4 (2 byte/1 ) 0 (2 ) EX600-AYA (2 ) 0 4 (2 byte/1 ) EX600-AMB 4 4 (2/2 ) (2 byte/1 ) (2 byte/1 ) -59No.EX-OMN0029CN-D SI ([ ](20 )) 0 0 byte 1 4 byte 2 (10 ) 6 byte (64 ) 12 byte 3 3 -60No.EX-OMN0029CN-D EX600

EXxx-OMN0027CN

(1)[Hardware Catalogue ]EX600SPR1/2 [PROFIBUSDP master system] (2)[Properties PROFIBUS DP interface EX600-SPR1/2] (3)SI (1) (2) (3) (4)[OK][PROFIBUS DP master system]EX600-SPR1/2 (4) -65No.EX-OMN0027CN-D (1)[Station]EX600-SPR1/2 (2)[Configuration table]EX600-SPR1/2 (3)[Hardware Catalogue]0 I/O [Configuration table]1 (4) 0=1 1=2 8=9 9=10 (5)SI 32 24 16 8 SI V_SEL (1) (3) (2) -66No.EX-OMN0027CN-D