Piping: Base Mounted Common SUP Common EXH, Stations: 5 Stations, A B Port Size: NPTF 1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 6 Stations, A B Port Size: NPTF 1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 7 Stations, A B Port Size: NPTF 1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 8 Stations, A B Port Size: NPTF 1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 10 Stations, A B Port Size: NPTF 1/8

Series LQ3 High Purity Fluororesin Fitting

F (E) L H G F E B M L 28.5 34.5 47.5 52.5 64 78 11 16 21 24 32 41 9.5 12 18 20 28 36 4.8 6 9 10 14 18 10 17 22.5 24.5 27 30 3.5 4 5 6 7 8 14 20 25 29 37 49 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3T1A LQ3T2A LQ3T3A LQ3T4A LQ3T5A LQ3T6A M 1/4 (E) (E) G H L L Panel Union : LQ3P J Panel Thickness (Max. t) (mm) Inch Size H W2 W1 Model Tubing O.D.

Cylinder with lock

Troubleshooting P. 41 6. Maintenance P. 43 6-1. Construction -2- 1. Product Specifications 1-1.

REGULATOR

Cross pointed driver Torque driver Tightening torque 0.60.05 Nm See Check item for tightening torque of two screws. 12 8.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y l28 l27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 l28 l27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 l28 l27.8 42.5 35 45 74 50

S Couplers

Port size IDK Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 R, Rc 1 R, Rc 1 1/4 R, Rc 1 1/2 Symbol 01 02 03 04 06 10 12 14 Connection type Type Male thread (with sealant) Female thread Symbol M F Plug Yes No No Yes Socket Yes Yes No No Availability Built-in check valve Note) A plug with check valve should be used in combination with a socket with check valve.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y l28 l27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 l28 l27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 l28 l27.8 42.5 35 45 74 50

Proposals for Energy Saving

/Rc 3/8 12/Rc 3/8 8/Rc 1/8 10/Rc 1/4 12/Rc 3/8 12/Rc 3/8 16/Rc 1/2 16/Rc 1/2 Refer to page 3.4-1 of No. 3 for details.

C85

12 16 20 d7 11 11 13 13 16 19 l3 10 10 10 10 12 14 Bore Model Thread e M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 b d 16 16 24 24 32 40 0 8 10 12 16 20 25 8 10 12 16 20 25 KJ4D KJ4D KJ6D KJ6D KJ8D KJ10D GKM4-8 GKM4-8 GKM6-12 GKM6-12 GKM8-16 GKM10-20 8 8 12 12 16 20 6 6 8 8 10 12 8 8 12 12 16 20 8 8 10 10 12 18 5 5 6 6 8 10 4 4 6 6 8 10 6.0 8 8 9 9 12 14 7.5 7.5 6.5 6.5 13 13 4

One-touch Fittings

KQ2W06-03GS1 17 10.4 9.7 12 10 15.5 35.7 35.8 13.3 10.9 8.6 4.5 47.4 D2 A L2 1/8 KQ2W08-01GS 10 13.2 13 10 16.4 32.4 35.9 14.2 10.9 10.9 4.5 12.2 1/8 *3 KQ2W08-01GQS 12 13.2 13 12 17.2 42.4 45.9 14.2 20.5 14.2 6 23.7 V H 8 1/4 KQ2W08-02GS 14 13.2 13 12 17.2 39.1 41 14.2 20.5 14.2 6 40 V 3/8 KQ2W08-03GS 17 13.2 13 12 17.2 39.2 40.7 14.2 20.5 14.2 6 47 V 10 1/4 KQ2W10-02GS 17 15.9 15.6

Base Mounted Metal Seal/Rubber Seal Series VQ

1.2 VA (12 mA), Holding 1.2 VA (12 mA) 100 VAC Inrush 1.3 VA (12 mA), Holding 1.3 VA (12 mA) 110 VAC VQD Inrush 2.4 VA (12 mA), Holding 2.4 VA (12 mA) 200 VAC Inrush 2.6 VA (12 mA), Holding 2.6 VA (12 mA) 220 VAC Note 1) Note 2) Use dry air to prevent condensation when operating at low temperatures.

VQ4000

44 62 9 9 91 44 62 Station number 50.5 59 2-Rc 1/8 (External pilot port) R4.5 R4.5 50.5 9 9 U side entry (LU) U side D side D side U side n 15 X X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A A A 215 15

17

A0.2 D (mm) MGPM MGPL/A Hexagon socket head cap screw 50 56 72 82 98 106 130 142 180 210 Bore size (mm) A (mm) B (mm) C (mm) M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 8 10 12 15 18 18 22 22 28 33 12 16 20 25 32 40 50 63 80 100 10 12 14 18 22 22 27 27 33 39 41 46 54 64 78 86 110 124 156 188 18 22 24 30 34 40 46 58 54 62 5.

Process Valve Series VNA

JIS Symbol Valve type Operation 3 Port 2 Port 12 (P1) 12 (P1) Air operated 1 2 3 1 2 VNA 7.0 MPa 2Port 3Port VNB SGC 12 (P1) 12 (P1) VNC External pilot Solenoid VNH 1 2 3 1 2 VND VCC 411 Series VNH Dimensions !2 i 12(P1): External pilot port 10(P2) : Pilot EXH port !0 e e u u r i !1 r t !1 !

Secondary Batteries

and up) SUS304 (6 and 8) Aluminum (12 and up) SUS304 (6 and 8) Aluminum (12 and up) Material Piston Anodized (12 and up) Chromate (12 and up) Electroless Ni-plated (6 and 8) Chromate (12 and up) Treatment SUS304 SUS303, SUS304 Iron SUS304 SUS303 Iron Brass Electroless Ni-plated Brass Electroless Ni-plated Iron Material Air slide table MXQ Piston spacer Treatment Material Packing support

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Nil M5 x 0.8 Rc1/8 Rc1/8 Rc1/8 Rc1/4 TN NPT1/8 NPT1/8 NPT1/8 NPT1/4 TF G1/8 G1/8 G1/8 G1/4 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 d b C H B H 4 8 8 10 d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 B 14 26 32 41 C 16.2 30 37 47.3 Part number SNJ-016B SN-020B SN-032B SN-040B Applicable bore size (mm) 15 20 25, 32 40 161 Specific Product Precautions Be sure to read before handling.