Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Do not perform the operation or setting of the product 17. When a surge generating load such as a relay or solewith wet hands. It may cause an electric shock. noid valve is directly driven, use a product that incorporates a surge absorption element. 3. Product with damage or the one lacking of any components should not be used. It may cause an electric shock, fire, or injury.

Sensor Monitor

When the output specification of the copy destination display setting device is not 6, the output specification should be set to copy input in accordance with the [F 5]FUNC terminal setting (page 42) beforehand. Press the UP or DOWN button of the copy source sensor monitor in function selection mode to display [F97]. Press the SET button.

Digital Flow Switch (Remote type sensor unit)

No.PF-OMN0010-J PRODUCT NAME Digital Flow Switch (Remote type sensor unit) MODEL / Series / Product Number PF3W5## Table of Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product parts 14 Definition and terminology 15 Mounting and Installation 16 Installation 17 Piping 19 Wiring 22 Flow Measurement 23 Maintenance 24 Troubleshooting 25 Specification 28 Specifications

180

. 709 MHY2 Series Dimensions MHY2-25D 2 x M6 x 1 thread depth 10 Pin hole positioning (Mounting thread) 16 5 23 50 4H9 + 0.030 depth4 0 4 x M5 x 0.8 through (Thread for mounting attachment) 10 4 x M6 x 1 thread depth 12 12 0.005 0.025 (Mounting thread) 6 12 2 x 6.6 through 2 x M6 x 1 thread depth 12 22.5 (Mounting hole) (Mounting thread) (Limted area for mounting attachment) 46 58 45 45 42

A

3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5

Series VS

U T X Y Z V W PITCH NOTE #2 177.5 A 119 B 9 C 50.5 D 48.5 E 58.5 F 87 G 105 H 20.5 I 26.5 J 20.5 K 30.5 L 58.5 M 22 N 45.5 O 52 P 81 Q 49 R 18 S 5.5 T SIZE 1 SIZE 2 SIZE 3 189.5 125 9 52 52.5 64.5 96.5 112 26 34 26 37 64.5 31.5 58.5 67.5 97.5 58.5 20.5 3 41 52 41 52 92 36 69 82.5 121 74 28 4 234.5 142.5 13 77.5 79.5 92 108 123.5 CC 188.5 199 244 SIZE 3 SIZE 2 57.5 1.5 U V 14 25 43 W X 2 42

CKZ2N

ACA100M ACA101M ACA102M ACA103M ACA104M ACA105M ACA106M ACA107M ACA108M CKZ-80A001 CKZ-80A002 CKZ-80A003 CKZ-80A004 CKZ-80A005 CKZ-80A006 CKZ-80A007 CKZ-80A008 CKZ-80A009 2.3 (5.07) 2.7 (5.96) 3.0 (6.62) 3.4 (7.50) 3.8 (8.38) 4.2 (9.27) 4.5 (9.93) 4.9 (10.81) 5.3 (11.69) 20 mm Offset-Plain 32 0.03 A M10 x 1.5 R40 62 0.05 42 R37 10.5 30 16 30 26 R9 Part no.

Pilot Operated

20 3.5 4.5 4.5 28 35 42 63 80 90 44.5 51.5 60 104 (110.5) 24 29 33 71.5 78 92 115.5 (122) 133 (140.5) ( ) denotes the value for N.O.

SFOD-OMT0012

(1) Parallel I/O forced output . 42 4.8.

SFOD-OMT0011CN

No.SFOD-OMT0011CN-A (4 ) // JXC-W1 (JXC3 Series) 1. . 3 2. . 5 2.1 . 5 2.2 . 5 2.3 . 5 3. . 6 3.1 . 6 (1) . 6 (2) . 6 3.2 . 6 (1) . 6 (2) . 6 (3) . 8 4. . 9 4.1 . 9 (1) . 9 (2) . 16 (3) . 19 (4) . 22 (5) . 23 (6) . 24 (7) . 26 4.2 . 28 (1) . 28 (2) . 31 (3) . 32 4.3 . 33 (1) . 33 (2) . 35 4.4 . 36 4.5 . 36 4.6 . 39 (1) . 39 (2) JOG . 40 (3) 1 . 40 4.7 . 42

Soft Start-up Valve AV2000/3000/4000/5000

3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5

33

5.7 4.3/5.4 For option -T: 4.7/5.8 Rated power consumption (50/60 Hz) Note 3) kVA 0.58/0.74 For option -T: 0.66/0.82 0.73/0.86 For option -T: 0.81/0.94 0.85/1.02 For option -T: 0.93/1.10 Dimensions Note 8) mm W377 x D435 x H615 For option -T: W377 x D500 x H615 Accessories Fitting (for drain outlet) 1 pc., Operation Manual (for installation/operation) 1 Weight Note 9) kg 35 For option -T: 42

PFxx-OMO0004CN

[cm] -70No.PF-OMO0004CN-E PFMB7201-02 PFMB7201-N02 17 2x Rc1/4 NPT1/4 -71No.PF-OMO0004CN-E PFMB7201-02L PFMB7201-N02L 2x Rc1/4 NPT1/4 17 -72No.PF-OMO0004CN-E PFMB7201S-02 PFMB7201S-N02 2x Rc1/4 NPT1/4 -73No.PF-OMO0004CN-E PFMB7201S-02L PFMB7201S-N02L 2x Rc1/4 NPT1/4 17 -74No.PF-OMO0004CN-E PFMB7201-F02 21 2x G1/4 -75No.PF-OMO0004CN-E PFMB7201-F02L 2x G1/4 21 -76No.PF-OMO0004CN-E PFMB7201S-F02

Compact Rotary Actuator

Table 3 Specification-3 Size Weightg Internal capacitycm 90 180 360 90 180 360 10 120 150 200 1.2 2.2 4.3 15 220 270 380 2.9 5.5 10.7 20 600 700 1000 7.1 13.5 26.3 30 900 1100 1510 12.1 22.9 44.7 40 1400 1600 2280 20.5 39 76 -17- 1-2 Effective output Fig.1 Effective output 1-3 Rotation range When pressurized from the Port A, the shaft will rotate clockwise.

Low-Speed Rotary Actuator

Fig.16 Adjust bolt assembly Seal washer Size 10,15 Hexagon nut Size 20,30,40 Small hexagon nut Hexagon socket head set screw (Adjust bolt) Fig.17 -34- End cover assembly Gasket End cover gasket End cover Adjust bolt assembly Size 1015 Size 203040 Fig.18 (2) Insert the piston Assembly to the body.

Parallel Type Air Gripper

External gripping 11 34 42 65 158 254 force D I.D. Internal 17 45 66 104 193 318 Note 1) Gripping force per finger Effective value (N) gripping force O.D. External gripping S 7.1 27 33 45 131 217 force I.D.

MHx-OMU0057

65 158 254 1 N 17 45 66 104 193 318 S 7.1 27 33 45 131 217 C 13 38 57 83 161 267 mm 4 6 10 14 22 30 2 g D 55 115 230 420 715 1,275 SC 235 425 760 1,370 2) 4 - 2. 2-1. 1. () 2. 3. 4. 2-2. . 2 L H L H (1) (2) (3) 3. 5 - 4. 5. 6. <> (1) (2) 2 7. 2-3. 1. 2. 3. 4. 5.

LEC-OM005xx

Load file check Old:LES11-1-17 The setting content of Basic / Unit name in the file that is loaded (the file that was saved in the teaching box). New:LES11-1-28 Type:Step+2Pr The setting content of Basic / Para protect in the file that is loaded (the file that was saved in the teaching box). Refer to the table below.

LEC-OM038xx

Initial Setting.16 4. 1 Gateway unit Communication speed switch (STATION NO.,B RATE) 16 4. 2 Setting the switch to change the communication CN2SW.17 4. Setting of controller (LEC) .18 5. External connection .21 5. 1 CN4: Power supply connector .21 5. 2 CN3: Bus connector .21 5. 3 CN1: CONT connector.21 5. 4 CN2: PC/TB connector.22 6.

LEC-OM036xx

Setting the switch to change the communication (CN2SW).17 4. 3. Setting of controller (LEC).18 5. External connection .21 5. 1 CN4: Power supply connector .21 5. 2 CN3: Bus connector .21 5. 3 CN1: CONT connector.21 5. 4 CN2: PC/TB connector.22 6.