Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

11.5 12 17 9 9 9 9 13 13 11.5 12 17 17.5 18 23 15 7 9.5 10 15 15 7 19 11 18 18.5 23.5 15.5 9.5 12 12.5 17.5 17 11 21 15 22.5 23 28 20 9.5 12 12.5 17.5 21.5 11 25.5 15 30.5 31 36 28 3 5.5 6 11 29.5 4.5 33.5 8.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

0.4

Station 9 SQ SOL.B SOL.A 23 10 Station 10 SOL.A VFS SOL.B 24 11 Station 11 SOL.B SOL.A 25 12 Station 12 VFR VV5Q21 COM. () Orange Red (+) 13 VQ7 Positive COM spec. Negative COM spec. The total number of stations is tabulated starting from station one on the D-side. Note) When using the negative common specifications, use valves for negative common. (Refer to page 419.)

VZ3000

(L) DIN terminal (D) M plug connector (M) Built-in speed controllers (Lead wire length) MAX. 11 300 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 MAX. 10 : With light/surge voltage suppressor 3-3-46 5 Port Solenoid Valve Base Mounted Series VZ3000 Type 42 Manifold: Side Ported VV5Z3-42Station 1-C6 Manual override (Non-locking) Grommet (G), (H) M5 x 0.8 (PE port) MAX. 5.5 (One-touch

CNG

7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l ZZ H e f h ZZ 20 25 32 40 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 (149) 11 11 M5 x 0.8 3 12 35 178 (186) 30 16 55 198 (206) 0.25 x Stroke M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 151 (159) 11 11 M6 x 0.75 3 12 40 193 (201)

CEx-OMG0106

Solenoid Valve Wiring 36 Chapter 10: Timing Chart 3744 Chapter 11: Data Setting 11-1. Data Presetting 11-1-1. Data Classification & Content 45 11-1-2. Input Method 4548 11-1-3. Confirmation of Set Data 48 11-2. Program Setting 11-2-1. Input Method 4952 11-2-2. Confirmation of Input Data 52 11-3. Selection of Dip Switch 53 Chapter 12: Driving 12-1.

Compact Cylinder with Air Cushion Series RQ

18 43.5 60 30 to 100 73 55 M FV 80 11 11 99 116 134 20 53.5 77 40 to 100 83.5 63.5 100 11 11 117 136 154 22 53.5 94 40 to 100 98 76 L FT B + Stroke A + Stroke FX FZ 4 x LD Flange bracket material: Carbon steel Surface treatment: Nickel plated Rod end male thread CUJ CU Rod end nut L1 CQS Head Side Flange Style mm Head side flange style: RQG/RDQG CQ2 Stroke range (mm) Bore size (mm) L1 L

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

After assembly is completed, perform an operation test and check that there is no air leakage. 17 15 10 3 14 11 5 12 19 9 14 12 1 4 11 6 34 35 37 40 41 15 Direction of the shaft(key) 39 Fig. (19) Direction of assembly of the shaft 46 - Troubleshooting Refere nce Problem Possible cause Solution page 16 Supply pressure isnt applied correctly.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

-102 to 103 13-11-104 to 105 13-11-106 to 110 13-11-106 to 110 13-11-111 to 112 13-11-113 to 116 Buffer stroke Adsorption is possible even on a slanted surface.

45

to 20 stations: W = 22n + 140 2 to 10 stations: W = 47n + 156 11 to 20 stations: W = 47n + 190 Manifold base weight W (g) n: Stations Note) For more than 11 stations, supply pressure to P port on both sides and exhaust from R port on both sides.

45

to 20 stations: W = 22n + 140 2 to 10 stations: W = 47n + 156 11 to 20 stations: W = 47n + 190 Manifold base weight W (g) n: Stations Note) For more than 11 stations, supply pressure to P port on both sides and exhaust from R port on both sides.

RQ

Double clevis bracket material: carbon steel 7-7-11 11 Series RQ Dimensions: 63 to 100 For the auto switch mounting position and its mounting height, refer to page 7-7-16.

IDX-OM-V024

Option T .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 OPERATION / ERROR SIGNAL OUTPUT . 11-1 11.3 REMOTE OPERATION . 11-2 11.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 11-3 11.5 ELECTRIC CIRCUIT . 11-4 Chapter 12 Option V . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 SPECIFICATIONS . 12-1 12.3 MAINTENANCE . 12-2 Chapter 13 Inspection record . 13-1 13.1 INSPECTION RECORD . 13

Manifold Specifications

(L) DIN terminal (D) M plug connector (M) Built-in speed controllers (Lead wire length) MAX. 11 300 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 MAX. 10 : With light/surge voltage suppressor 3-3-46 5 Port Solenoid Valve Base Mounted Series VZ3000 Type 42 Manifold: Side Ported VV5Z3-42Station 1-C6 Manual override (Non-locking) Grommet (G), (H) M5 x 0.8 (PE port) MAX. 5.5 (One-touch

4-channel Flow Monitor ( compatible)

5th letter Y U8 0x00 Refer to Figure "Line name communication data (7 seg)". 0x0974 (2420) 0x0975 (2421) 0x0976 (2422) 0x0977 (2423) (0) 6 R/W Line name 6th letter (11 SEG) Y U8 0x00 Refer to Figure "Line name communication data (11 seg)". (0) 7 R/W Line name 7th letter (11 SEG) Y U8 0x00 Refer to Figure "Line name communication data (11 seg)". (0) 8 R/W Line name 8th letter Y U8 0x00 Refer

Plug-in/Plug Lead: Single Unit

VQ0 Flow Characteristics at the Number of Manifold Stations (Operated individually) VQ4 Model Passage/Stations Station 5 Station 1 Station 10 VQ5 C [dm3/(sbar)] 11 11 11 1 4/2 (P A/B) 0.24 b 0.24 0.24 VQZ 2 position metal seal VQ5 00 2.7 Cv 2.7 2.7 1 2 C [dm3/(sbar)] 12 12 12 VQD 4/2 5/3 (A/B EA/EB) b 0.14 0.14 0.14 Cv 2.9 2.9 2.9 C [dm3/(sbar)] 12 12 12 1 4/2 (P A/B) b 0.33 0.33 0.33

One-touch Fittings

16.5 10 13.9 11 4.5 19.5 3/8 KQ2LU06-03GS 17 10.4 9.7 16.5 29.8 35 29.9 13.3 10.4 6 4.2 16.5 10 13.9 11 4.5 31.5 N Q1 O 8 1/8 KQ2LU08-01GS 14 13.2 13 18.2 25.7 32.3 29.2 14.2 13.2 8 4.2 18.2 13.1 26.3 18.2 6 16.4 1/4 KQ2LU08-02GS 14 13.2 13 18.2 30.1 36.7 32 14.2 13.2 8 4.2 18.2 13.1 26.3 18.2 6 21.5 3/8 KQ2LU08-03GS 17 13.2 13 18.2 31.5 38.1 33 14.2 13.2 8 4.2 18.2 13.1 26.3 18.2 6 33.3

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

AS-FG/ASD-FG

13.2 20.9 12 1/4" 17 22 19.8 34.1 43.6 39.1 51.1 AS4001FG-10 AS3001FG-09 46 36 64.4 8.2 15.2 18.5 10 5/16" 18 21 26.5 82 11.3 35.3 44.6 40.3 52.1 AS4001FG-12 AS3001FG-11 53 40 70.8 9.5 17.9 20.9 12 3/8" 21 22 43.5 51 AS4001FG-11 97 76.9 10.3 17.9 3/8" 21 26.5 44.9 52.4 AS4001FG-13 106 83.1 11.6 21.7 1/2" 22 9 Dual Speed Controller with One-touch Fitting Stainless Steel Series Series ASD-FG

VQ5000

How to Calculate the Flow Rate SOL.A VQZ100-47-A For obtaining the flow rate, refer to pages 2-1-8 to 2-1-11.

0.

Formula: L5 = 16n + 11 L3 = 16n + 22 n: Stations (Max. 20 stations) Dimensions L n 2 3 110.5 100 70 20.5 59 4 123 112.5 86 18.5 75 5 135.5 125 102 17 91 6 148 137.5 118 15 107 7 173 162.5 134 19.5 123 8 185.5 175 150 18 139 9 198 187.5 166 16 155 10 223 212.5 182 20.5 171 11 235.5 225 198 19 187 12 248 237.5 214 17 203 13 260.5 250 230 15.5 219 14 285.5 275 246 20 235 15 298 287.5 262 18