Vacuum Unit Ejector / Vacuum Pump System

Installation 17 3.1. Installation 17 3.2. Air Supply 19 3.3. Piping 20 4. Solenoid Valve 23 5. Pressure Sensor/Pressure Switch 29 6. Construction/Replacement Parts 30 6.1. Construction for Single Unit 30 6.2. Component Parts 30 6.3. Replacement Parts 31 6.4. Replacement Parts for Single Unit/How to Order 31 7. Exploded View of Manifold/Replacement Parts 35 7.1.

CRQ2

38 47.5 Reed switches A 6.5 9.5 9.5 13.5 22 28 29 37 34 43.5 Rotation angle Size Operation range m Operation range m Switch actuation range Switch actuation range B 13 22.5 18 30.5 34.5 53.5 45 68 53 81.5 B 17 26.5 22 34.5 38.5 57.5 49 72 57 85.5 90 63 12 75 3 10 180 90 52 9 69 3 15 180 A 90 B 41 9 56 4 20 180 90 32 7 43 3 30 180 90 Operating range at proper mounting position (Lm/2) 24 5

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

84 2.5 25 146 1/4 up to 600 35 32 70 27 52 20 13 40 12 17 58 11 47.3 61 M8 x 1.25 7 18 11 M18 x 1.5 19 30 17 90 2.5 25 159 3/8 up to 600 35 32 85 27 64 20 15.5 40 10 17 58 11 54.8 68.5 M10 x 1.25 7 18 14 M18 x 1.5 19 31 17 98 4 25 170 3/8 up to 750 40 37 32 78 25 52 14 21 71 13 65.8 M12 x 1.75 11 22 17 M22 x 1.5 23 37 21 4 40 204 102 18.5 80.5 116 1/2 up to 750 40 37 116 41 92 30 20 52 14

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

38 47.5 Reed switches A 6.5 9.5 9.5 13.5 22 28 29 37 34 43.5 Rotation angle Size Operation range m Operation range m Switch actuation range Switch actuation range B 13 22.5 18 30.5 34.5 53.5 45 68 53 81.5 B 17 26.5 22 34.5 38.5 57.5 49 72 57 85.5 90 63 12 75 3 10 180 90 52 9 69 3 15 180 A 90 B 41 9 56 4 20 180 90 32 7 43 3 30 180 90 Operating range at proper mounting position (Lm/2) 24 5

Sine Rodless Cylinder Series REBR Direct Mount Type

8 5 33 31.5 32 30 17 31 30 8.5 REBR25 12.5 9.5 5.2 3 1 27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8 REBR32 13 76 7 7 8.5

SMC Pneumatic Clean Series

41 0 0 1.5 2 2 5.5 4 4.5 8 31.5 35.5 43 31.5 35.5 43 Note) The above values should be used as a guide for detection at stroke end.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

CDH10 U L CX CZ ZZ + Stroke Z + Stroke RR (mm) Stroke range Bore size (mm) U RR +0.3 +0.1 L CDH10 CX CZ Z ZZ 20 25 32 40 50 63 80 Up to 250 Up to 350 Up to 600 Up to 600 Up to 700 Up to 900 Up to 900 14 14 17 17 26 26 30 10 10 14 14 22 22 25 14 14 20 20 30 30 32 28 28 40 40 60 60 64 8.5 11 12 15 18 23 28 23 23 30 30 42 42 50 129 151 185 208 237 263 298 137.5 162 197 223 255 286 326 8-25-24

Digital Flow Switch (Integrated display type)

Input of set values P2AH n2AH P2AL n2AL P2dH Setting of Setting of Setting of Setting of n2dH P2dL n2dL P2L/n2L P2H/n2H tnL/tPL P_2/n_2 tn/tP tnH/tPH H_2 H_t H2 Ht (Page 41) (Page 43) (Page 41) (Page 43) (Page 42) 4. Completed [F 2] Setting of OUT2 is completed. -39No.PF-OMM0005-N 1.

ZPT/ZPX

63 103 154 3.5 Model ZPX63HJ25-B01-A18 ZPX63HJ50-B01-A18 ZPX63HJ75-B01-A18 ZPX80HJ25-B01-A18 ZPX80HJ50-B01-A18 ZPX80HJ75-B01-A18 63 65 14.5 26 41 63 136 189 3.5 40 ZPX40HJ75-B01-A18 42 171 222 63 65 14.5 26 41 63 172 225 3.5 50 ZPX50HJ25-B01-A18 52 100 151 80 82 16.5 28 43 65 105 156 4.5 50 ZPX50HJ50-B01-A18 52 135 186 80 82 16.5 28 43 65 138 191 4.5 50 ZPX50HJ75-B01-A18 52 171 222 80 82

Heavy Duty Stopper Cylinder Series RSH/RS1H

Double acting spring type Single acting RSH20T-PS RSH32T-PS RSH50T-PS RSH63T-PS RSH80T-PS Double acting RSH20D-PS RSH32D-PS RSH50D-PS RSH63D-PS RSH80D-PS RSH-R20 RSH-R32 RS1H-R50 RS1H-R63 RS1H-R80 Set of items 37 to 41 in above table Set of items 37 to 41 in above table (not including 39) The seal kits for 20 to 32 consist of items 37 to 41 and those for 50 to 80 consist of items 37 to 41

LZ-OM003xx

F G H J Trunnion m ounting torque L[]ZB[]3L:13 15Nm /L[]ZB[]5L:20 22Nm tube as in drawing below. 0. 025 0. 061 0. 025 0. 061 Caution Trunnion pin Auto switch mount range 45 Mounting trunnion 44 Mounting foot D o Do not install the cylinder only by mounting it to 17 12.5 15 17.5 11 14 L[]ZB[]3 50 34 41 20 44.5 Model no. A C D E L[]ZB[]5 82 52 66 36 47 Model no.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Conduit terminal: VP3185-T A B DIN terminal: VP3185-D A B [110] 81 35 Light (For TL, TZ) Max.12 31.3 G1/2 Applicable cable 6 to 12 Light position (For DL, DZ) G1/2 NO NO PE PE [243] 237.6 239 228.5 213 31 31 130 130 52 52 41 41 105 105 [ ]: With indicator light (TL, TZ) 1312 Note) CE-compliant: D/DO only (Electrical entry) VP3145/3165/3185 Series Made to Order [Option] Please contact SMC

CXWM/CXWL

Refer to page 8-26-18 for the dimensions of the 25 stroke. 438 402 225 177 414 90 188 67.5 488 452 250 202 464 90 213 80 8-26-17 16 Series CXWM 16 Basic Type: CXWM1625 stroke 2 x 2-4.3 through 2 x 2-8 counterbore depth 4.5 (5H7 hole pitch) 5H7 depth 3 +0.012 0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

1.63

Selection conditions Mounting: Horizontal Bearing type: Slide bearing Distance between plate and load center of gravity: 50 mm Maximum speed: 200 mm/s Load mass: 2 kg Stroke: 30 stroke Find the point of intersection for the load mass of 2 kg and 30 stroke on graph (17), based on horizontal mounting, slide bearing, the distance of 50 mm between the plate and load center of gravity, and the

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

19 17 19 19 21 19 21 19 21 21 22 21 22 21 22 19 21 19 21 21 23 21 23 21 23 23 24 23 24 23 24 22 23 30 31 39 41 47 49 61 63 69 74 73 78 95 100 6 8 6 8 8 10 8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5

Line Filter

How to Replace the Components](P16 and 17) and [11. Disassembly Drawing](P18). Problem Countermeasure Possible causes Page for reference Category Failure 1. Clog of the element. Replace the element. As pressure drop is large, fluid does not flow. Flow rate P16 and 17 1. Breakage of bowl seal. Replace the bowl seal.

Mist Separator

How to Replace the Components](P16 and 17) and [11. Disassembly Drawing](P18). Problem Countermeasure Possible causes Page for reference Category Failure 1. Clog of the element. Replace the element. As pressure drop is large, fluid does not flow. Flow rate P16 and 17 1. Breakage of bowl seal. Replace the bowl seal.

Micro Mist Separator

How to Replace the Components 16 to 17 10-1. Bowl assembly Replacement 16 10-2. Element Replacement 17 11. Disassembly Drawing 18 12. Dimensions 19 -1- Micro Mist Separator Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

MY1

Blue [Black] Lead wire length: 0.5m 7 7 6 7 8 8 D-A96(V) Lead wire length: 3m 35 35 30 35 41 41 DC(+) Brown [Red] LED (+) Resistor Reed switch Load OUT Black [White] Reverse current prevention diode DC power () DC() Blue [Black] Dimensions D-A90, D-A93, D-A96 D-A90V, D-A93V, D-A96V The dimension inside ( ) is for D-A93. 13 Reed Switches: Direct Mounting Type D-Z73, D-Z76, D-Z80 Specifications

Digital Flow Switch (Integrated display type) ( compatible)

40 39 38 37 36 35 34 33 32 Item Flow measurement value (PD) Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Temperature measurement value (PD) : The area is not used when the product without temperature sensor is selected.