Speed Controller with One-touch Fittings

L5 L6 L7 L8 M1 1/8" 5/32" 1/4" 5/32" 1/4" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" 8.4 9.3 12 9.3 12 13.2 15.2 13.2 15.2 18.5 18.5 21.7 36 37 39.5 40.7 42.6 53.4 57.2 59 65 69.8 76.9 81.3 4.5 5.2 6.1 5.2 6.5 6.9 8 7.4 8.2 9.8 10.3 11.3 11.2 11.9 12.8 12.3 13.6 16.5 17.6 19.3 20.1 21.7 22.7 23.7 23.8 24.5 25.5 28.9 30.2 33.4 34.5 38.6 39.4 41 51.6 52.6 21 21.7 22.7 25.4 26.7 28.4 29.5 33.6 34.4

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

VM

Roller Plunger/VM122-M5-06, VM132-M5-06 VM122-M5-06S, VM132-M5-06S Panel mounted hole JIS Symbol 2 port 3 port 23N F.O.F. 0.5MPa supply 2mm P.T. 1.5mm O.T. 3.5mm T.T. 3.5-16 VM100 Series VM100/Bottom Piping Cross Roller Plunger/VM122-M5-07, VM132-M5-07 VM122-M5-07S, VM132-M5-07S JIS Symbol 2 port Panel mounted hole 3 port 23N F.O.F. 0.5MPa supply 2mm P.T. 1.5mm O.T. 3.5mm T.T.

CYP

-06-X214 Caution 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 1.

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

Clean Regulator

Relief port M5 thread The body material has been changed to aluminum. ITVH X234 SRH Standard model no.

IR1000/2000/3000

For IRV2000, IRV3000 Zero position Heaven Zero position Ground Fig. (2) Fig. (1) 14-5-16 16 Vacuum Regulator Series IRV1000/2000/3000 Standard Specifications F.R.L.

AR Series Modular Type Regulator

Note 7) v: For pipe thread type: M5, NPT only 450 Regulator AR10-A to AR40-A Series Standard Specifications Model AR10-A AR20-A AR25-A AR30-A AR40-A AR40-06-A Port size M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 Pressure gauge port size 1/16 Note) 1/8 Fluid Air Ambient and fluid temperature 5 to 60C (with no freezing) Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Set

Platform Cylinder Series CXT

Q + Stroke (NA) Cylinder form 12 16 (mm) d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 x 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 x 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 x 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90

CXT

Q + Stroke (NA) Cylinder form 12 16 d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 x 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 x 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 x 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90 54 9

Digital Gap Checker ( compatible)

-2 3 ISA-16-3 4 ISA-16-4 5 ISA-16-5 6 ISA-16-6 With connector lead wire ZS-31-B With connector lead wire ZS-31-C : Spacers are included for 4 and 6 stations.

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

Rotary Table

Allowable load a b Allowable thrust loadN Allowable momentNm Size Allowable radial load a b Basic type High precision N type 1 31 41 41 0.56 0.84 2 32 45 45 0.82 1.2 3 33 48 48 1.1 1.6 7 54 71 71 1.5 2.2 Unit used as flange mount Rotary table can be mounted from three directions-Two side of axial direction and one side of lateral face.

MRQ

to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 12.5 3 15 20 32 15 17.5 20 4 25 30 30 12.5 15 3 (mm) L Max. 32 Max. 31.5 20 Size 32 40 15 40 17.5 20 4 Possible to change the specification from standard to"-X5" 25 Specify the part number for hexagon socket

3-Position Rotary Table

x 0.8 M4 x 0.5 M10 x 1 34 132.5 46 50 27.3 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M5 x 0.5 M12 x 1.25 37 168.5 58.5 63.5 39 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M5 x 0.5 M12 x 1.25 40 184 63.5 69 36.4 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M6 x 0.75 M14 x 1.5 46 214.5 76 78 42.4 66 26.5 5H9

Floating Joint/Stainless Steel Type Series JS

23 41 7 14 14.3 27 49.2 14.3 1 11000 3

High Vacuum L Type Valve

Step 7 Reassembly of bonnet assembly (No.2) 3 Bolt 1 2 4 Bonnet assembly Pilot port Bolt size, Tool, Tightening torque of bolt (Nm) valve Bolt size Hex Tightening size wrench torque XLF-16 M3 3 0.7 -25 M5 4 1.5 -40 M6 5 2.5 -50 M8 6 6.1 -63 M10 8 15 -80 Body Supply air pressure of 0.4MPa (G) to the pilot port.

Mist Separator Series AFM20/30/40

10.5 G 27 40 54 54 H 22 23 26 25 J 5.4 6.5 8.5 8.5 F 30 41 50 50 D 40 53 70 70 P 57 73 73 E 18 16 17 14 C 10 14 18 20 A 40 53 70 75 B 97 129 165 169 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 AFM20 AFM30 AFM40 AFM40-06 Optional specifications Model With drain guide With barb fitting Metal bowl Metal bowl with level gauge B B 97 142 178 182 B B AFM20 AFM30 AFM40 AFM40-06 162 198 202 137 173 177

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 Q S SD SF SU UU WA WB WC WD M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 WE WF XA XB XC YA YB YC Size 3.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 4.8 20 22.5 2H9 2 11 2H9 2 1 3.5 18 56 13.4 26.2 11.3 28 10 2H9 2 5.3 21 24.5 2H9 2 11.5 2H9 2 2 3.5 20.5 60 15.2 31 11.8 30.5 12 2H9 2 5.3 25 27 2H9 2 13.5 2H9 2 3 4.5 23 73.5 15.4 37.4 14.9 34.5 14 3H9 3

ML1

C-6 AS568-048 NLP-32A RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 NLP-40A RCS-12 GMY40 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR C-7 SO-015-22 SO-015-16 8.3 X 4.5 X 1.9 SO-010-16 SO-010-16 C-100 NLP-25-19A RCS-8 GMY25 $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 %9 Hard anodized Hard anodized Hard anodized M1L025-17A82076 M1L032-17A82077 M1L040-17A82078 Anodized