Compact Electric Actuator Series LG1

Refer to page 41 for further details.

Uniaxial Electric Actuator Series LJ1

0 2 4 6 8 10 0 5 10 20 15 Work load (W) kg Work load (W) kg Work load (W) kg 600 600 600 a=1000 a=3000 a=1000 400 400 L3 mm L3 mm L3 mm a=2000 a=2000 a=2000 400 a=3000 a=3000 a=1000 a 200 200 200 L1 M1 0 2 4 6 8 10 0 5 10 20 15 0 5 10 15 Work load (W) kg Work load (W) kg Work load (W) kg Mounting position Model LJ1S10 LJ1S20 LJ1S30 Direction of load movement 30 150 300 a=500 a=500 a=500

LMU100/200 Series Mist Spray Unit

15 1 (24) Air adjusting needle for mist 4.3 8 2 4.3 Oil adjusting needle 21.8 8.5 (37) 4 AIR Mixing valve (LMV10-) OIL B B 12 SMC Double pipe nozzle A A Cross section BB 3 (Max.)54 37 22 BLOW AIR 29 15 12 OIL AIR 35 26.5 16.5 8.5 Cross section AA L Dimension (mm) 20 200 25 250 30 300 35 350 LMV20/Without air blow circuit T0806 (8 x 6) Applicable tubing Symbol Length T0425 (4 x 2.5) Applicable

IDX-OM-W038

(17) (17) IDH4,IDHA4 Rc3/8 1.25 6.5 N.C N.O M3 (N.C:) (N.O:) 2 Rc3/8 6.5 :1.25m m :M3 24 2 (N.O) (N O 244 80 2 184 35 320 56 2 1 15 275 1 80 207 284 455 70 389 498 ( ?10) ( 10) 15 240 2 1 297 270 62 IDH Series 6.2.

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5) 3 . 1 5 tBo\ 5.43 '135) 7 9 9 t203) E t 1 1 6 1 3.62 1 . 1 8 2.05 152\ o55 0.83 121\ Ml2x1 75 0.43 1 1 1 ) M26x1 5 1.57 (40) 4.S6 {126) 1.97 6.38 i162) 5.35 t136) 8.74 t222) 2.83 <72) 5.31 1135) 4 . 1 1 1206) 2.55 (65) 0.55 N4.0) 1 . 1 9 (41) 5 6 7 1215t 'Min.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y l28 l27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 l28 l27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 l28 l27.8 42.5 35 45 74 50

PS-OMH0005CN

FSC() FSt FSt FStFSt 1 digit 15 2CH1 CH2CH3CH4 CH1 OUT1 CH2CH3CH4 CH1 CH2CH3CH4 OUT1 CH1 OUT1 CPy CPy CPy CPy 1 digit -24No.PS-OMH0005CN-D 26 SH1 CH1onoF SH1 ON OFF CH2 CH3 CH4 12 -25No.PS-OMH0005CN-D 10 ms oooC_5C_3 CH1 OUT1OUT2 P_1 P_4n_1 n_4C_5 CH2CH4 OUT1 P_1 P_2n_1 n_2C_3 15 ms oF oFLo() ooo () EEPROM Aon ((PSE530 ) (PSE530 ) (PSE530 ) -26No.PS-OMH0005CN-D

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kits Theoretical Output Table OUT IN Unit: N Bore size (mm) Contents Kit No.

Air Cylinder CLA Series Fine Lock Model

fl 110+559120+559 Differenl 1 5 90 100 1 1 0 Same 90 100 1 1 0 Ditterent 15+5d!

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

Rotation Speed Range Model: 10, 15, 20O.O3 0.3 sec,/90' Model 300.04-0.3 sc,/90' lf a rotation soeed is used slower than 0.3sec/90", sticking may occur.

Pneumatic Positioner IP300/IP3100

OPEBATION ACTUATOR 315 DSi used pruggeo 1/2 Solit D c pruggeo used 1/2 Solit B 3-15 osi c USEO plugged '1l2 Solit B 3-15 nsi pruggeo used '112 Solit D Fig. Reverse = ) Y INSTALLATION STYLE (REF. FrG. 1) QW tP3100 METHOD OF OPERATION Signal pressure trom a controlled pressure source enters the lP3l00 positioner through the signal port.

ISA2

Removal of cover Hook the finger on the front cover ridge and rotate it in the direction of the OPEN arrow until it stops (15). Then pull out and remove the cover. Throttle setting for blowing to prevent water and cutting oil from entering the nozzle. (Clockwise: Close throttle; Counterclockwise: Open throttle) IF Data The setting is not applicable to valves without throttle. 1.

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Title not found

fl 110+559120+559 Differenl 1 5 90 100 1 1 0 Same 90 100 1 1 0 Ditterent 15+5d!

NCRBIBwserbs

Rotation Speed Range Model: 10, 15, 20O.O3 0.3 sec,/90' Model 300.04-0.3 sc,/90' lf a rotation soeed is used slower than 0.3sec/90", sticking may occur.

Model: 41 (AC), Bar Length: 232 (2320mm), Emmiter Cartridge, Material: S (Energy Saving High-efficiency Cartridge, Silicon), High-voltage Cable Length: 3 (3m), One-touch Fitting: BH (ø3/8" Straight), Plug Position: w/o Plug, Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 15 (15m), Bar Bracket: F (w/Bracket 2), DIN Rail Bracket for Controller &
High-voltage

Model: 41 (AC), Bar Length: 58 (580mm), Emmiter Cartridge, Material: L (High Energy Saving De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: BH (ø3/8" Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 15 (15m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket

Model: 41 (AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 15 (15m), Bar Bracket: B (w/Bracket 1)

Model: 41 (AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 15 (15m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller

Model: 41 (AC), Bar Length: 34 (340mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: R (Opposite Side of High-voltage Cable), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 15 (15m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller