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to 50mm/s) i2 to 100 Heal resislant aulo swilch 16 to 63 Hea\./ duty sctaper 20 to 100 Stalnless steelpiston rod and rod nut 12 10 100 AdjuslaLle stroke exlend 12 to 100 Adjustable slroke retract 1 2 l o 1 0 0 DualsLroke, dual rod 1 2 b 1 m DLralstroke s ngle rod 12 to 100 NPI Porr (1) 32 10 160 32 lo 100 Wilh lrcnr gulde boss (1) 12 to lO0 20 to 10O lnch-sizewrcnch flab 12 to 100 (1) Not

Process Valve Series VNA

JIS Symbol Valve type Operation 3 Port 2 Port 12 (P1) 12 (P1) Air operated 1 2 3 1 2 VNA 7.0 MPa 2Port 3Port VNB SGC 12 (P1) 12 (P1) VNC External pilot Solenoid VNH 1 2 3 1 2 VND VCC 411 Series VNH Dimensions !2 i 12(P1): External pilot port 10(P2) : Pilot EXH port !0 e e u u r i !1 r t !1 !

DOC1001322

Circulating fluid flow rate Circulating fluid flow rate . 5-12 Circulating fluid discharge pressure Press PV . 5-12 Compressor circuit High pressure side High Press. . 5-12 Compressor circuit Low pressure side Low Press. 5-13 Circulating fluid electrical conductivity DI PV . 5-13 Key lock condition display KEYLOCK . 5-13 Startup operation status display START UP . 5-14 Anti-freezing status

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

Speed Controller with One-touch Fittings

57.2 59 65 70.8 76 76.9 81.3 3.4 4.4 5.1 6.1 5.2 6.3 6.7 8 7.4 8.2 9.8 10.9 10.3 11.3 7.9 11.1 11.8 12.8 12.3 13.4 16.3 17.6 19.3 20.1 21.7 22.8 22.7 23.7 20.9 23.8 24.5 25.5 28.9 30 33.2 34.5 38.6 39.4 41 42.1 51.6 52.6 11 9.8 5 6.7 9.8 10.1 12.3 11.5 12.3 15.7 16.1 8.8 2 3.2 4 6 4 6 6 8 6 8 10 12 10 12 6 8.4 9.3 11.6 9.3 11.6 12.8 15.2 13.2 15.2 18.5 20.9 18.5 21.7 12.7 3.3 5.5 9.1 11

Miniature Regulator Series ARJ210

Miniature Regulator Series ARJ210 Lightweight body made of aluminum (60 g) Standard Specifications ARJ210-M5 Model 1/8 (Male thread), M5 x 0.8 (Female thread) IN side Two styles of piping connections provided for the IN side: 1/8 (male thread) and M5 (female thread) Port size M5 x 0.8 (Female thread 2 pcs.)

2/3 Port Valve

55 63 74 1 4 1 2 1 1 2 VND50D-32A VND60D-40A VND70D-50A Flange/32F, 40F, 50F Port size VX VN VQ Model Pilot port Rc(PT) Applicable flange A B C D E F G H J 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36 42 54 12 12 14 VND50D-32F VND60D-40F VND70D-50F 4.2-41 VND Precautions Be sure to read before handling.

ML1C

Note Auto switch model Switch mounting screw M2.5 x 10 L D-E7A.80A BMY1-025 25 32 40 Switch mounting nut D-M5 D-M5W D-M5T Switch mounting screw M2.5 x 12 L BMY2-025 Switch mounting nut 1116 ML1C Series Specific Product Precautions Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 3 to 12 for Actuator and Auto Switch Precautions.

MRQ

MSUB 1=m 12 a 2 1=m 5 2r 2 eThin rectangle board (Parallelogram) iDisc Position of rotation axis: Disc centered about axis of rotation.

Rotary Table

Additionally, note that the 12 VDC relay does not apply to the auto switch. -12- 11. Pay attention to leakage current. <2-wire type> Current (leakage current) flows to the load to operate the internal circuit even when in the OFF state.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

1263.5 906 960 12 4 800 180 11-LEJS40S-10001323.5 1363.5 1006 1060 14 5 1000 80 11-LEJS40S-12001523.5 1563.5 1206 1260 16 6 1200 80 535 11-LEJS Series AC Servo Motor Clean Room Specication Dimensions: Ball Screw Drive 11-LEJS63 Body mounting reference plane Note 2) 4 x M8 x 1.25 depth 12 6H9 ( ) depth 7 +0.030 0 (172) 122 M4 x 0.7 depth 8 (F.G. terminal) 25 (3.1) 90 129 Motor cable (6) 68

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

Reed switch Solid state switch 5 V IC circuit Z76 Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Y es Relay, PLC 24 V 2-wire 100 V, 200 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V 100 V, 200 V 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication

45

M3 Terminal screw Stations n 10 stations 11 12 13 14 15 16 17 stations A: Orange B: Green 248 248 248 260.5 273 285.5 298 310.5 L1 L2 L3 L4 237.5 237.5 237.5 250 262.5 27.5 287.5 300 213 223.5 223.5 234 244.5 255 265.5 286.5 (Rail mounting hole pitch 12.5) 17.5 12 12 13 14 15 16 12 1-6-102 Base Mounted Series SX3000/5000 SS5X3-45T1DStations U(18 pins) C4 C6 2n-One-touch fittings Note) The

45

16.5 14.5 13 17.5 15.5 12 13 14 15 16 stations Stations n 11 stations 335.5 348 373 385.5 398 410.5 L1 L2 L3 L4 325 337.5 362.5 375 387.5 400 267 283 299 315 331 347 14 12 16.5 15 13 11.5 Note) Width of SI unit applicable to E: Matsushita Electric Works, Ltd. and G: Rockwell Automation, Inc. widens to 24.3 mm .

Speed Controller: Standard Type In-line Type AS Series

Valve Spring Seal NBR, Stainless steel 9 10 11 14143 14144 14147 Stainless steel NBR 652 AS Series Speed Controller: Standard Type In-line Type Dimensions: AS1000-M3 Dimensions: AS1000-M5 2 x 3.1 35 (Max. 41) 19 (Max. 21) AS-F 2 x 2.1 TMH ASD 27.5 Note 1) Male M5 x 0.8 Female M5 x 0.8 M3 x 0.5 M3 x 0.5 AS AS Reference dimensions Reference dimensions Note 1) Dimension for AS1000-M5-N AS-FE

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

12 18.5 29.7 40 34.5 17 50 (51) AS32l1FSl-U03-06 6 1/4 19 16.6 AK 10.4 21.8 32.1 28.7 13.3 24.5 28.5 9.3 19.2 36 (37) AS32l1FSl-U03-08 8 13.2 22.7 33 28 14.2 AS32l1FSl-U03-10 10 15.9 26.7 37 15.6 39 (40) AS32l1FSl-U03-12 12 18.5 29.7 40 26.8 17 41 (42) AS42l1FSl-U04-10 10 1/2 24 (23.8) VCHC 3/8 19 16.6 55.4 54 50.2 48.8 ASR ASQ 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

AWM20 to AWM40

) Note 12) Note 12) i ZA Note 11) Pressure unit Name plate, caution plate for bowl, and pressure gauge in imperial units (PSI, F) Digital pressure switch: With unit switching function Note 13) Note 13) Note 13) Note 10) For thread type: NPT.

AWM20 to AWM40

) Note 12) Note 12) i ZA Note 11) Pressure unit Name plate, caution plate for bowl, and pressure gauge in imperial units (PSI, F) Digital pressure switch: With unit switching function Note 13) Note 13) Note 13) Note 10) For thread type: NPT.

E-MY2_E_D

Front view Mounting holes on the top Bottom view T slots on the bottom T slots on the bottom Mounting holes on the top Model Nominal of actuator Thread size Model Nominal of actuator Thread size Effective length 16 M3 16 M3 4 to 5mm E-MY2C E-MY2H E-MY2C E-MY2H 25 M5 25 M5 6 to 8mm 16 M5 16 M4 6 to 7mm E-MY2HT E-MY2HT 25 M8 25 M6 8 to 10mm If T slots on the bottom is used for installation,