Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) A B C D G E(g6) F(h9) H K L M N R S1 S2 T U V W X Y Model CRBU2WU15-D 5 0.004 0.012 0 0.043 1.5 18 21.2 25 3.2 34 48 36 29 3 15.5 10 0.5 10.5 10.5 M5 x 0.8 3.5 M3 x 0.5 21 12 CRBU2WU20-D 0.004 0.012 0 0.043 1.5 20 25 34.5 4 42 59 44 36 4 17 10 0.5 11.5 11 M5 x 0.8 4.5 M4 x 0.7 26 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 2 22 29 47.5 4.5 50 69 52 42 4.5 17.5 12 1 12 13 M5 x 0.8 5.5 M5 x 0.8

AC

VE Description 0 1 M5 01 0 1 VY110 01 02 0 1 VY120 01 02 0 1 VY130 02 03 04 0 1 02 03 04 0 1 04 06 10 0 1 VY140 VY170 10 12 0 1 VY190 14 20 0 1 VY1D00-M5 VY1A0 -M5 VY150 VY1B0 VY VEX1-18-1 VEXA-18-2 VEX3-32 VEX5-32 VEX7-32 VEX9-32 B Braket (with bolt, washer) G VEX1-18-2 VEXA-18-3 F G36-10-01 G46-10-01 G G27-10-01 Pressure gauge G27-10-R1-X207 AL Pilot EXH. port silencer N AN120-M5 AN101-

MK

Refer to the following table for the tightening torque for mounting. 10 Allen wrench 9 Wrench 10.5 Nm Arm Standard tightening torque 0.4 to 0.6 2 to 2.4 4 to 6 8 to 10 14 to 16 Bore size (mm) 12 16 20, 25 32, 40 50, 63 7 6.5 11.5 10.5 4.1-7 Series MK 12, 16, 20, 25 Through hole (Basic)/MKB 12 16 A B C D Model 0 0.043 0 0.043 E F G H 8 MKB12 MKB16 5 15.5 M3 X 0.5 5.5 11h9 6 25 32 20 7 M5 X

Electric Slide Tables

32.3 C 16 16.1 32.2 24 D x M3 x 0.5 Note 6) 12 B B 29.4 31 0.3 Table operating range Note 1) [1] 1 (1.3) Note 5) Origin Note 2) Stroke end [Origin] Note 3) E [Stroke end] (1.5) 65 K Cable length 280 80.5 10 (L) Stroke A-A 1 section (30 st) 2 sections (50, 75 st) 4H9 (+0.030 0 ) depth 4 17 32 4H9 (+0.030 0 ) depth 4 5 G x M5 x 0.8 x 10 G x 4.3 19 A A G x 8 4.6 18.2 2 x M5 x 0.8 x 10 Top

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

AS121FG-M5-23 AS121FG-U10/32-01 9.6 25.8 28.6 12.3 8 7 12.7 17.3 22.1 8.4 8.4 3.2 M5 0.8 25 1/8" 22.2 12.3 17.3 22.1 12.7 AS221FG-01-23 AS121FG-U10/32-03 14.2 31.1 36.1 14.3 12 16 12.7 20.4 27.5 9.3 9.3 3.2 32.1 5/32" 27.1 R 1/8 8 10-32 UNF 28.6 25.8 25 22.2 7 9.6 AS121FG-M5-04 AS121FG-U10/32-05 21.3 26.1 12.3 12.7 17.3 22.1 9.3 11.4 4 3/16" 16.5 M5 0.8 11.7 9.6 25.8 28.6 8 7 25 22.2 AS121FG-M5

5 Port Solenoid Valve

PROFINET SD0 Serial kit without SI Unit VQC 4/5 VQC 4/5 32 M12 1 to 12 stations SNB 16 1 to 8 stations (12 stations, 16 points) SNC 32 D-sub Note 3) 1 to 12 stations SND 16 1 to 8 stations (12 stations, 16 points) SVA CC-Link 32 M12 1 to 12 stations SVB 16 1 to 8 stations (12 stations, 16 points) SDA EtherCAT 32 M12 1 to 12 stations SDB 16 1 to 8 stations (12 stations, 16 points) SFA PROFINET

LX

bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12 With brake 274 CE Marking _ Page 282 Made to Order AC servomotor specification _ 288 Low particulate generation specification _ 294 Construction

MXS Series Air Slide Table

With end lock (12) MXS12R With buffer (12) MXS12F 2-M5 X 0.8 thread 8 deep Operating port 2-M5 X 0.8 J 10.5 9.5 38 14.5 16 37 3 29 30 0.5 Other dimensions not indicated are same as basic type.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L A L D Applicable fitting size d Model 10-KQP-04 16 32 6 4 10-KQP-06 18 35 8 6 10-KQP-08 20.5 39 10 8 10-KQP-10 22 43 12 10 10-KQP-12 24 44.5 14 12 10-KQP-01 16 31.5 5 1/8" 10-KQP-03 16 32 6 5/32" 10-KQP-07 18 35 8.5 1/4" 10-KQP-09 20.5 39 10 5/16" 10-KQP-11 22 43 11.5 3/8" Type 16, Cassette base Type 10, Tie-rod base Series Manifold type SUP block disk EXH block disk 10 SV1000-59-1A SV1000

CRB2/CRBU2/CRB1

42 6 14 CRBU2WU30-S 0 0.043 0.005 0.014 4.5 69 52 42 4.5 29 M5 x 0.8 5.5 M5 x 0.8 13 12 1 12 17.5 2 22 29 47.5 50 8 16 Double vane type CRBU2WU10-D CRBU2WU15, 20, 30-D Illustrations below show size 20 actuators.

CLQ

Joint 7 9 YB-03 32, 40 11.5 depth 7.5 34 25 12 K ( across flats) H (With locking) 9 11 YB-05 50, 63 42 32 12 14.5 depth 8.5 11 13 YB-08 80 52 38 16 18 depth 12 d2 d1 14 17 YB-10 100 62 50 19 21 depth 14 L UT C UA Bore size (mm) T1 RS Weight (g) T2 V W Part no. Part no.

LX

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

One-touch Fittings

KQ2 Series Model Applicable tubing Connection thread Part number 3.2 M3 x 0.5 KQ2H23-M3G1 3.2 M5 x 0.8 KQ2H23-M51 4 M3 x 0.5 KQ2H04-M3G1 4 M5 x 0.8 KQ2H04-M51 4 M6 x 1.0 KQ2H04-M61 6 M5 x 0.8 KQ2H06-M51 6 M6 x 1.0 KQ2H06-M61 6 R1/8 KQ2H06-01S1 1/8 10-32UNF KQ2H01-321 5/32 10-32UNF KQ2H03-321 3/16 10-32UNF KQ2H05-321 5/32 NPT1/16 KQ2H03-33S1 1/8 M5 x 0.8 KQ2H01-M51 3/16 M5 x 0.8 KQ2H05-M51

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

12.7 AS121F-M5-04T AS121F-U10/32-03T 8 M5 x 0.8 9.6 4.5 31 0.7 27.4 4 9.3 31 0.7 27.4 10-32 UNF 8 9.6 4.5 AS121F-M5-06T AS121F-U10/32-05T 3/16" 11.4 21.3 26.1 16.5 18.1 22.9 11.7 13.5 6 11.6 18.3 23.1 11.7 AS121F-U10/32-07T AS221F-01-23ST 13.5 12 1/4" 3.2 8.4 12.7 AS221F-N01-01ST AS221F-01-04ST 1/8" 8.4 4 20.4 27.5 9.3 5/32" 9.3 20.4 27.5 12.7 14.3 AS221F-N01-03ST AS221F-01-06ST 13.5 12

17

12 12 12 12 12 1.1 (0.5) 10 20 30 31 50 100 101 300 200 1.1 (0.5) 10 20 30 31 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL32 to 63, MGPA32 to 63 MGPL32 to 63, MGPA32 to 63 110 (50) 110 (50) Load mass m lbs (kg) Load mass m lbs (kg) 63 63 50,63 50 50 50,63 50,63 22 (10) 22 (10) 40 40 40 50,63 40 40 40 32 32 32 32 32 32 11 (5) 10 20 30 50 40 51 100 101 300 200 11 (5) 10 20 30 50 40 51 100

SMC

x 0.8 thread depth 5.5 Operating port 2-M5 x 0.8 11 3 Vacuum sunction port M5 x 0.8 J 10 Maximum 13.5 (With stroke adjuster at retraction end) I 5.5 12 6 12 12 9.5 10 5.5 10 5.5 21 K 5.5 KA 21 NA-M5 x 0.8 thread depth 5.5 Stroke adjuster at extension end 37.5 (With stroke adjuster at extension end) Stroke adjuster at retraction end 12 6 N-M5 x 0.8 thread depth 6 (Insert) 6 4-M5 x 0.8 thread

Vacuum Module Series ZX

Note 2) M5: Suffix -4, M6: Suffix -1 Note 3) M5: Suffix -1, M6: Suffix -2 Adapter D P3200152-12 (M2.5 x 28) Philips screw ZF M2.5 x 12 Philips screw How to order (1) Valve unit (Supply valve: Air operated) (For replacement) Adapter D (2) Individual spacer R1 ZP M2.5 x 12 Philips screw Adapter D individual spacer R1 assembly Assembly no.

reduces flow setting time

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 0 2 06 AS 1F S E M5 Body size 1 S Body size 2/3/4 AS 01 2 0 2 1F S 06 With indicator Made to Order Refer to page 598 for details. Body size 2 1/8, 1/4 3 3/8 4 1/2 Seal method Nil Without sealant S With sealant Type 2 Elbow 3 Universal Note) Face seal type is used for the G thread type. Select Nil/Without sealant.

Fieldbus System

B 12 B 12 B 12 B 12 B 8 7 15.4 4.7 (5.9) (8.3) 36.7 4 x M5 mounting hole FE terminal 5.4 Power connector (Fitting for the type with P/E ports on the U and/or D sides) End Plate Digital Input Unit Valve Plate One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 5/32" : 6, 1/4" : 8, 5/16" Input connector SI Unit Output connector Connector for Handheld Terminal Digital Output Unit (

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

6 M5 type U10/32 type M5 type U10/32 type e !0 i t NBR, Stainless steel !1 !6 w y Gasket M5 type only !7 r Note 1) M5 and U10/32 types are black zinc chromate plated. Note 2) AS231FM type is made of steel. Note 3) Meter-in type is black zinc chromate plated. Note 4) AS131FM(3.2, 4, 6, 1/8", 5/32", 1/4") AS231FM-01(3.2, 4, 6, 1/8", 5/32") is POM.