Rotary Actuator

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N V V V v v IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V M9NWV M9NW

MY1

12 12 11.5 11.5 Operating range Note) Operating range Note) Perpendicular electrical entry is not available for 50 and 63.

Rotary Table/

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 100h9 101 102 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 116h9 118h9 119 120 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

Pin Clamp Cylinders

(2-color indicator) Grommet Yes 24 V 3-wire (NPN) 5 V,12 V M9NWV V V V v v IC circuit 3-wire (PNP) M9PWV V V V v v 2-wire 12 V M9BWV V V V v v Grommet Yes 2-wire 24 V 12 V 100 V A73 V V V Relay, PLC Diagnostic indication (2-color indicator) A79W V V Reed auto switch * Solid state auto switches marked with v are produced upon receipt of order. * The D-A9l and A9lV cannot be

MIW/MIS

of auto switches 12mm 20mm 12 2 pcs. 1 pc.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

insulation type 1 W DC (42 mA), 0.5 W DC (21 mA) (4) 24 VDC Power consumption (Current) 1 W DC (83 mA), 0.5 W DC (42 mA) (4) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 12 VDC Metal seal Rubber seal Note 1) Use dry air to prevent condensation when operating at low temperatures.

MY1

IC circuit 3-wire (PNP) 2-wire 12 V Diagnostic indication (2-color indicator) Water resistant (2-color indicator) 100 V 3-wire (NPN) 5 V, 12 V IC circuit Relay, PLC Yes Grommet 24 V 3-wire (PNP) 2-wire 12 V 3-wire (NPN) 5 V, 12 V IC circuit M9PA1 M9PAV1 3-wire (PNP) 2-wire M9BA1 M9BAV1 12 V 5 V 12 V Relay, PLC Z76 Z732 A96 A93 A90 IC circuit 3-wire (NPN equivalent) Yes Grommet 24 V

IDX-OM-W017

T 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-3 13 V 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 14-1 . 14-1 IDFA Series 2 IDX-OM-W017 i i i 1 () OFF 3 ON OFF i-1 IDFA Series i 1 IDX-OM-W017 i i-1-1 3 IDFA Series i-1-1 i 2 IDX-OM-W017 i i 2 5 i-2-1 IDFA Series IDX-OM-W017 i i-2 i-2-2 3 i-2-3 50 i-2-4 i-2-5 0 IDFA Series i-2-2 4 IDX-OM-W017 i i-2-6

Escapements Series MIW/MIS

Point of application L (mm) Therefore select MIW (MIS) 12.

17

9 M5 x 0.8 30 MY3A MY3B 140 11 6.6 19 M8 x 1.25 2 28.5 68 M5 x 0.8 16 10 6.8 22 50.2 49 64 140 70 52 50 12 M6 x 1 37 170 14 8.5 23 M10 x 1.5 2 35 84 M6 x 1 15 13 170 8.6 85 26.5 62.7 62 61.5 75 64 12 M6 x 1 45 MY3M Centralized piping YW P PA PB Q PP RR QW T TT WW XXX YH Z ZZ Model Model Rc1/8 PC 55 PD 6 PG 7 VV QQ 16 SS 6 XX UU 18 MY1B25 MY1B32 MY1B40 60 30 12 206 42 15 10 14.5 23.3 11 15.5

MHS

12 50D M61 7.3 12 63D M61 7.3 12 MHS3 Nm mm MHS3-16D M30.5 0.66 4.5 20D M30.5 0.88 6 25D M40.7 1.6 6 32D M40.7 1.6 6 40D M50.8 3.2 7.5 50D M50.8 4.3 10 63D M61 5.4 9 80D M61 7.3 12 100D M81.25 18 16 125D M101.5 36 20 MHS4 Nm mm MHS4-16D M40.7 2.1 8 20D M40.7 2.1 8 25D M40.7 2.1 8 32D M50.8 4.3 10 40D M61 7.3 12 50D M61 7.3 12 63D M61 7.3 12 9 MHSJ3MHSH(J)3 Nm (mm MHSJ3-16D MHSH3-16D

Series VQ Metal Seal/Rubber Seal Body Ported

Ambient and fluid temperature Effective area (Cv) Max. operating frequency (1) Note 1) As per JISB83751981 (Supply pressure: 0.5MPa) Dimensions Single unit Manifold Dimensions Equation L1=11n+20 n: Station (Max. 24 stations) n L 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 L1 L2 L3 31 50 60.5 86 112.5 123 108 125 135.5 119 137.5 148 141 162.5 173 97 125 135.5 130 150 160.5 152 175 185.5 53 75 85.5

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

ML2B

For details, refer to 3 point preset counter/CEU1 on page 10-12-30, and Multi counter/CEU5 on page 10-12-27 respectively.

ML2B

For details, refer to 3 point preset counter/CEU1 on page 10-12-30, and Multi counter/CEU5 on page 10-12-27 respectively.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Yes A96V A96 Reed switch 5 V Grommet Relay, PLC 24 V 2-wire A93V A93 100 V 12 V 3-wire (NPN) M9NV M9N IC circuit 5 V 12 V M9PV M9P 3-wire (PNP) M9BV M9B 2-wire 12 V Relay, PLC Yes Grommet 24 V Diagnostic indication 2-color indication F9NWV F9NW 3-wire (NPN) IC circuit 5 V 12 V 3-wire (PNP) F9PWV F9PW F9BWV F9BW 2-wire 12 V Notes) Solid state switches marked with a symbol are produced upon

Sine Cylinder Series REC

17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Sine Cylinder Series REC

17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

CNS

For details, refer to page 9-15-42. 9-8-22

XL

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve