2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

F9PSDPC CXT Direct Body Mount 12, 16, 20, 25, 32 & 40 Bore sizes MHK, MHKL Direct Body Mount 12, 16, 20 & 25 Gripper Bore sizes MHS2/3/4 Direct Body Mount 16, 20 & 25 Gripper Bore sizes MHQ2-6 Direct Body Mount 6 mm Gripper Bore size MHR2/3 Direct Body Mount 10, 15, 20 & 30 Gripper Bore sizes (bore sizes depend on series) MHY2 Direct Body Mount 10, 16, 20 & 25 Gripper Bore sizes MHZ2 Direct

ZX

1 20 1 11.5 7 7 8 8 Manual override (Push and turn the locking type override.)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(Conforming to DIN) Clip Without indicator light AXT100-20-1 Rated voltage With indicator light 16.8 Voltage symbol Part no. AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 13.8 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC 24V 12V 100V 200V 110V 220V 1. It is able to change the cylinder port between side ported and top ported.

One-touch Fittings Series KQ2

D1 L1 D2 L2 A M Nylon 3 Urethane 2.5 3.2 KQ2L23-04 KQ2L04-06 KQ2L04-08 4 6 8 8 10 KQ2L06-10 38.5 19 2 3 11 9.6 7 17 25 26 35 13.5 15.5 10 8 14.5 22 4 10.4 18 4.2 4.2 16 6 KQ2L06-08 12.8 10 20 36.5 11.4 11.4 12 24.5 24 17 8 10 KQ2L08-10 15.2 12 23 39.5 21.6 14.9 20 26 18.5 12 KQ2L08-12 40.5 27 26 10 12 KQ2L10-12 18.5 17 26.5 42 35.2 25.0 29 30 21 12 16 KQ2L12-16 20.9 17 28.5 49.5 50.2 39.7

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

26P Side 420 20 P kit: Flat ribbon cable C8 (For 8) Option Built-in silencer, direct exhaust 20P 1 to 9 stations VQC J kit: Flat ribbon cable SS5Q13SQ130 SQ131 420 20 1 to 8 stations PC Wiring System compatible L3 (For 3.2) L4 (For 4) L6 (For 6) L5 (M5 thread) SQ (2) 460 35 1 to 12 stations L kit: Lead wire Top VQ0 1 to 8 stations 475 20 S kit: Serial transmission Note 1) One-touch fittings

70pvpump

SUP = 0.2 MPa 20 SUP = 0.2 MPa VX2 10 10 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 10 30 40 50 20 60 VX3 10 20 Discharge rate (l/min) Discharge rate (l /min) VXA Selection from Flow Characteristic Graph (PA3000) VN Required specifications example: Find

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Clip Circuit with light PR plate qChanging the piping direction from in-line to perpendicular (port on the valve) is possible on the VQZ100 series. Follow the steps below to change piping direction: Remove the fitting clips that hold the fitting and port plug in place.

E-P HYREG

mA 120 3 0 to 20 mA 5 1 to 5 V 67 k 10 k 6 0 to 10 V 12 V 7 4 to 20 mA 120 8 0 to 20 mA Symbol Symbol B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Body size Port size Rc Option Applicable pilot valve (4) Mounting Port 1(P), 2(A) Port 3(R) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate

Piping: Common SUP/Common EXH, Stations: 20 Stations, Bracket: Bracket

Stations: 20, Thread: NPTF

VQC

19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM (Based on IEC529) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram.)

PA3000/5000/PAX1000

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Process Pump Series PA3000/5000/PAX1000 Series PB1000

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

99

{Rc3/4} FGH200-06 {Rc3/4} FGH300-06 {Rc3/4} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-10 {Rc1} FGH200-10 {Rc1} FGH300-10 {Rc1} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (

Series KC Self-seal Fittings

Component module KBC1 KBC2 KBC3 KBC4 KBP1 KBP2 KBP3 KBP4 KBV2-06 2 KBE2-06 2 KBN2 1 KBN2 KBV1-06 KBE2-06 KBV2-06 5 Bracket: KBX(Page 87) Component module KB X 6 KBV2-06 1 KBV1-06 1 KBR2-1 1 KBH2-R2S 1 KBP1 1 KBP1 KBR2-1 Applicable thread size KBH2-R2R KBV2-06 KBP1 Type Bracket: KBX KBV1-06 Part No.

Booster Regulator Series VBA1110 to 4200 1

AM550-06, 10 P. 14-20-16 Mist separator 35 dB or more of noise reduction AMC310-03 AMC510-06 AMC610-10 Exhaust cleaner VBA2200-03 Air operated type VBAT05 (5 l, Directly connected to booster regulator) VBAT20 (20 l, Directly connected to booster regulator) VBAT38 (38 l, Directly connected to booster regulator) JIS Symbol Air tank VBAT10 (10 l, Directly connected to booster regulator) Handle

IIIIIIIIII

PSI -8 to 5 PSI -8 to 20 PSI -13 to 20 PSI 0 to 10 PSI 0 to 20 PSI, 3:1 RATIO 0 to 20 PSI, 5:1 RATIO XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX BARB OPTIONS ADJUSTING OPTION W/K = WITH ADJUSTING KNOB W/S = WITH 1/4" SHAFT W/0S = FLUSH SHAFT P80 = 1/16" ID BARBS P85 = 1/8" ID BARBS NOTE: UNITS COME STANDARD WITH STRAIGHT CONNECTIONS FOR 1/16" ID TUBING Back to Top .

VXF

Series VXF How to Order VXF 2150 06 1 G Solenoid type Normally closed VXFA 2150 06 Air operated type Option Nil S Standard With silencer Refer to the table (2) below for availability.