Air Filter

Bowl assembly / auto drain for AF40, 50, 60-D Option symbol Semi-standard symbol 6 J 6J Semi-standard: (Standard) Semi-standard: J Piping port Piping port thread ty pe (5) Part No. thread ty pe (5) Part No. Rc Rc C4SF-J-D C4SF-D G G C4SFF-J-D NPT C4SF(-Z)-D NPT C4SFN-J(Z)-D Appearance and part No.

VY511, VYU5

When load ratio is 0% (no load), maximum driving speed is 1.2 times and when 75%, it is 0.7 times of these figures. P 500 150 144 400 104 100 300 P 66 43 26 16 90 200 50 56 34 22 14 8 5 100 0 0 20 30 40 50 60 70 80 90 100 10 20 30 40 50 60 70 80 90 100 10 Bore size (mm) Bore size (mm) 1.15-33 Series VY511/VYU5 Precautions Be sure to read before handling.

E,R.L.

PSI Fanqe Suffix Adder A B NPTF Kt0 0-160 G (STDI 1 . 5 1.375 t6 K12 0-160 G (STD) 1.750 Kr3 0-30 2 1.750 th Kl8 o-60 1.750 U. K19 0-100 1.75 U1 K2e 0-30 1.5 1.375 \b Jet o-60 '1.5 1.375 ls All SMC gaug6 ars scal6d in PsyKgt/cml Precautions N4C5000, 5500, 6000 NAL Series (lnstallation) (Auto Drain) (lnstallation) OFlush piping before installation.

Process Pump

Reference service life (days) = A (reference number of cycles in service life) Operating frequency of solenoid valve (Hz) x Operating time per day (hour) x 60 (min) x 60 (sec) 3. Compressed air with low dew point Using super dry air as the fluid may affect the reliability (service life) of the equipment, because the lubrication characteristics inside the equipment will deteriorate.

EX500

1 End plate 66 2 x M4 (mounting hole) EX9 EA03 12.5 10 60 13.2 75 6 18 1694

Vacuum gripper

Lifting force = Theoretical lifting force / t Theoretical lifting force (Theoretical lifting force = P x S x 0.1) Cup diameter (8 to 32) [N] Cup diameter [mm] 8 10 13 16 20 25 32 S: Cup area [cm2] 0.50 0.79 1.33 2.01 3.14 4.91 8.04 -85 4.2 6.6 11 17 26 41 68 -80 4.0 6.2 10 16 25 39 64 -75 3.7 5.8 10 15 23 36 60 -70 3.5 5.5 9.3 14 22 34 56 Vacuum pressure [kPa] -65 3.2 5.1 8.6 13 20 31 52

Compact Slide ø 6, ø 10, ø 16, ø 20 MXH Series

201 6 16 121 86 IN 51 172 220 157 OUT 94 314 8 20 185 132 IN 79 264 Weight (g) Stroke (mm) Model 5 10 15 20 25 30 40 50 60 134 216 343 610 120 195 316 562 107 174 288 514 93 153 260 466 88 146 250 448 80 133 232 417 75 125 222 400 66 112 204 369 61 104 194 352 MXH6 MXH10 MXH16 MXH20 20

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

N Nil Rc 3 1 0 14 to 60 l/min 20 to 1500 l/min 36 to 2600 l/min NPT Specifications Water/Non corrosive liquid Copper alloy Fluid Stainless steel 304 Liquid, which do not corrode stainless steel 304. Max. pressure 1 MPa 1.75 MPa Water resistance Insulation resistance 100 M (500 DC by megameter) 1500 VAC for one min.

Nozzle Type Ionizer

L1 L2 Number of spacers IZN10E-ES2 37.8 45 4 IZN10E-ES3 55.2 60 6 IZN10E-ES4 72.6 76 8 13 Nozzle Type Ionizer IZN10E Series Functions 1. Maintenance warning Constantly monitors lowered static neutralization performance due to contamination or wear of the emitter. The maintenance LED lights up and maintenance signal is generated. 2.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

17 27.8 39.3 6 12.8 5/16" 15.2 18.5 36 AS321FG-02-08 AS221FG-N02-11 18.8 35.3 44.5 63 18.5 29.5 41 8 15.2 3/8" 17.9 21 23 37.8 43.3 48.3 19 42.8 21.3 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 10 18.5 1/4" 13.2 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 21.3 29.5 19 41 69 22 48.3 32.8 44.3 43.3 42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3

Digital Flow Switch (Integrated display type) ( compatible)

setting 50 F10 Sub screen setting 51 F30 Accumulated flow value hold setting 57 F80 Display OFF mode setting 58 F81 Setting of security code 59 F90 Setting of all functions 61 F98 Output check 62 F99 Reset to default settings 65 Other Settings 66 Maintenance 70 IO-Link Specifications 70 Outline of IO-Link functions 70 Communication specifications 70 Process data 71 IO-Link parameter setting 75

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XL-OMY0001

systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0001 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0001 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0001 2.2 A6063 SUS316L SUS304 5 P11 FKM 3 3[]P8 60

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XLA Series

Vale specifications Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for

XL-OMV0002

General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 2 XL-OMV0002 1. 2. 3. 4., / 1 1.5 *3) *3)1 1 () 3 XL-OMV0002 1.1 A6063SUS316LSUS304 FKM XLC-80,XLC-100,XLC-160 :Y-VAC2 60

XL-OMY0002

to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0002 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0002 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0002 2.2 A6063SUS316LSUS304 5 P11 FKM 3 3[]P8 60

XLDV Series

Note2) Refer to the Construction of each series for the construction numbers. 6 XL-OMM0005-A Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 Note1) Due to the different materials used

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

Therefore, SMC products cannot be used for business or certification ordained by the metrology (measurement) laws of each country. 3 - 1Specification LEKFS*G Model LEKFS25 LEKFS32 LEKFS40 Stroke [mm] 50 to 800 50 to 1000 150 to 1200 Horizontal 15 28 40 40 50 68 26 60 75 Work load [kg] Note2) Vertical 3 7.5 15 4 10 18 4.5 4.5 25 Up to 400 20 to 1500 12 to 750 6 to 500 24 to 1300 16 to 1000