Air Pilot Operated Series NVSA

1&4 I Spdng-spooltuln xTmtl0 4 Orlng -Slv ARRt6A{14 sltw a3lambt-congEt3 ot spoot end st.v (metchd s6t) end (4) detjt4 6 XT@4 7 Q!!e, axT01&5 I P[ot cotr asrmDty with oprator.

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

(Not a\ailabl on NCRBI BWl0) x ( ) : When porl A is pressunzed. x x Optional M3 fiiing available S ho/r lo ofder page NCDRBIOWIQoI$ol[r$Q Rotation Time Setting Bodg To k Used As A Flange ltcRElB\ltfto Actual Torque Even a small torque generated by the rotary actuator, due to inertia, can cause damage. Therefore.

Compact Cylinder with Air Cushion Series RQ

Standard type (through hole, double end tapped common)/RQB, RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H effective thread depth C E1 E2 Q F 4-5.4 through D M E 1 Flat washer 4 pcs.

Sine Rodless Cylinder Series REBR Direct Mount Type

0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !4 REBR15 Parts list Parts list No. Description Material Note No.

2 Phase Stepper Motor/Without Motor Brake Series LXS

Home position switch (optional) De-energized operating type 0.1Nm 24VDC 5% 5W (at 75C) Model Static torque Rated voltage Power consumption Brake specifications Applicable driver Positioning repeatability LC6D-220AD-Q (Refer to page 306 for details.) LC6D-507AD-Q (Refer to page 306 for details.) 0.05mm Holding plate: MB1 (1 pc.), Phillips countersunk head screw: M3 x 6l (1 pc.)

Rotary Cylinder Series MRQ

CRB2 CRBU2 CRB1 MSU CRJ CRA1 CRQ2 MSQ MSZ CRQ2X MSQX Component Parts Component Parts MRQ Note Anodized Anodized Chromated No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description Note Note Material Aluminum alloy Material Zinc alloy Clear anodized Plate q !2 MK(2) Refer to the note below. Clear anodized Aluminum alloy Head cover Solenoid valve w !3 Stainless steel Cylinder tube Aluminum alloy Clear anodized Pipe e !4 RS Q G Stainless steel Piston rod NBR Piston seal r !5 Brass Piston NBR Rod seal t !

IC

No. q !0 q CONTROLLER PRESSURE OUT w Position Detection Switch Flow Sensor Pressure Control Pressure Sensor e w r RUN 4 3 2 1 CH kPa 4 3 2 1 SW t e y D-IN RUN UP SET P-ON DOWN STOP READ r u i o t y u i o !

IZx-OMT0049

Angle K 5 Z 10 M 10 P 0.5 DIN rail bracket Q 1 2 3 5 Symbol Type R Angle Nil None S T W Include Z 10 1-2-2.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

LEKFS Series Workpiece mounting pitch: Same dimensions Table width Height q LEFS Series Height w Body mounting pitch: Same dimensions Body width The body bottom positioning pin holes have been standardized.

Clean Air Module

IDH Component Parts ID Threaded type Threaded type IDG Manual operation valve (with lever lock) IDK AMG Lead wire with L-type connector AFF With flow adjuster With differential pressure indicator AM PB AMD One-touch fitting One-touch fitting PA AMH AME u t q w e r y AMF No. Description Individual part no.

Precision Regulator

0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Differential pressure indication switch r O-ring Applicable Applicable q O-ring w O-ring e O-ring Port size order no. hydraulic hydraulic order no. order no. order no.

Refrigerated Air Dryer

Port size Model AFF IDFA22E IDFA37E R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AM AMD IDFA55E, IDFA75E AMH A R B AME AMF Q E ZFC D SF G SFD F LLB C AD GD M N L P K 4 x 13 Dimensions (mm) A B C D E F G K L M N P Q R Model Port size IDFA55E IDFA75E 800 (868) R 2 470 855 (128) (273) (110) 13 500 75 700 526 (110) 519 900 (968) 97 Refrigerant R407C (HFC) IDFA100F/125F/150F

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

AP100 (13) Working principle When the MR units OUT side pressure is applied to piston q , piston q moves until it balances with the force of pressure adjustment spring w . The movement of piston q is detected by switch assembly e and outputs ON and OFF signals.

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.