ZSM1-115/121

Example: Analog output = 1 to 5 [V] F .S. = 5 [V] 1 [V] = 4 [V] 3 [% F .S.] = 4 x 0.03 = 0.12 [V] The output error induced by the temperature change can be as much as 120 [mV].

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 RB1412 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

PSxx-OMM0002CN

-2.312.31MPa 10.0-111.0kPa -121.0121.0kPa -29No.PS-OMM0002CN-F [F 5] <> [F 5] 1000 100 [F 5] MPa(ISE)kPa(ZSE)barpsi barpsi 23 [F 0] -30No.PS-OMM0002CN-F [F 7] 5R.D. <> [F 7] [F 7] -31No.PS-OMM0002CN-F [F 8] <> [F 8] [F 8] -32No.PS-OMM0002CN-F OUT1 AP1 (OUT1 AP1 1 AP2) OUT1 OUT1 OUT1 A1L A1H (A1L 1 AP2) OUT2 P_1H_1(n_1H_1)AP2 (OUT2 AP2 1 ) OUT2 OUT2 OUT1 OUT2

Series KP/KPQ/KPG

16 18.5 M L 8 12 KPQL12-00 KPGL12-00 31.4 7.5 25 50 40 20 20.9 Note 1) D indicates the maximum diameter.

Series KP/KPQ/KPG

16 18.5 M L 8 12 KPQL12-00 KPGL12-00 31.4 7.5 25 50 40 20 20.9 Note 1) D indicates the maximum diameter.

MXH

F Mp My MXH6 MXH6 0.2 0.18 0.16 0.14 0.12 0.1 0.08 0.06 0.04 0.02 0 0.14 60 50 60 50 40 0.12 Displacement (mm) Displacement (mm) 40 0.1 25, 30 25, 30 Stroke Stroke Stroke Stroke Stroke 0.08 15, 20 5, 10 15, 20 0.06 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5

ML1

Cylinder EA Absorber model EB EC ED EF EY S T EH EI h i TT REA ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 4.5 3 MAX. 16.5 RB1412 120 107 30 25 16 93 73.2 15 38 49 5.5 6 MAX. 20 REC RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 5.5 6 MAX. 25 RHC Side Support MTS CC Side support A Side support B (mm) H G F J E Cylinder D Part No.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

0.022 (50% reduction) 0.044 25 200 32 0.036 (50% reduction) 0.072 30 450 40 0.027 (50% reduction) 0.053 37 500 MZero table clearance Table Clearance 300 mm Size Displacement due to table clearance [mm] High rigidity guide LEKFS LEFS 25 0 0.079 Amount of displacement from the 300 mm position 32 0 0.068 40 0 0.052 1 Electric Actuator High Rigidity and High Precision Slider Type LEKFS Series

HRX-OM-W058

Model number: HRS0-F-0 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

25 6 x M5 x 0.8 thread depth 10 (A, B, C common view) 50 +0.02 0 (A, B, C common view) 3 x 5 depth 10 16h9 0 0.043 2 10 38.5 22 (76) 70 11 25 2 12 0 0.05 5 0 0.03 5 0 0.03 4 Open: 37 Closed: 19 2 x M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 7 7 10 10 502 Series MHR2/MDHR2 Rotary Actuated Air Gripper 2-Finger Type With auto switch (Built-in magnet) : MDHR2-30R 76

HRX-OM-W060

(This wiring is an example.) 13 25 14 1 D sub 25 female pin (socket) type Note: Prepare a cable tie. Fasten the signal cable to the mount on the base with the cable tie.

Compact Slide Series MXH

depth 8 Guide rail width 12 2 x M5 x 0.8 9.5 34 6 24.5 63.5 64.5 34 32 7 34 32 7 6 20 20 11 6 15 NS 15.5 52.5 + Stroke 68 + Stroke 32 4 x M5 x 0.8 depth 8 10 + Stroke 15 20 Stroke (mm) LB LT NS LA J 5 64 20 4 10 10 20 64 4 10 15 25 20 74 4 20 74 25 20 4 25 84 40 4 30 30 40 84 4 30 40 50 20 20 94 6 50 25 104 70 25 6 60 114 70 30 6 30 28 Compact Slide Series MXH Minimum Stroke for Auto

Lubricator

AL-OMX0056-A PRODUCT NAME Lubricator MODEL / Series / Product Number AL20-(F,N)01(F,N)02(B)(-2,3,6,C,R,Z)-D AL30-(F,N)02(F,N)03(B)(-2,3,6,8,R,W,Z)-D AL40-(F,N)02(F,N)04(B)(-2,3,6,8,R,W,Z)-D AL40-(F,N)06(B)(-2,3,6,8,R,W,Z)-D AL50-(F,N)06(F,N)10(B)(-2,3,6,8,R,W,Z)-D AL60-(F,N)10(B)(-2,3,6,8,R,W,Z)-D Contents Page 1. Safety Instructions 2-6 2. Application 7 3. Standard Specifications 7 4.

ChemicalThermo-con

Circulating fluid: Clear water, Circulating fluid flow rate: 3.96 gpm (15 L/min), Facility water flow rate: 1.32 (5 L/min) HED003 HED005 60 80 100 120 140 F 40 60 80 100 120 140 F 40 1600 800 Facility water: 95F (35C) Heating capacity (W) Heating capacity (W) 1200 Facility water: 95F (35C) Facility water: 77F (25C) Facility water: 77F (25C) 600 800 400 400 200 Facility water:

Water-cooledThermo-chiller

Continue F .Water Low Temp.WRN 29 Temperature of facility water has exceeded the set temperature. Continue F .Water High Temp.WRN 30 117 Series HRW Options Note) Options have to be selected when ordering the Thermo-chiller. It is not possible to add them after purchasing the unit.

Compact Manifold Regulator

ARJ AR425 to 935 L 1.25 P=12.5 5.25 7.5 ARX AMR 35 25 ARM ARM 5.5 ARP L Dimension L=12.5 x n+10.5 IR-A 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 Symbol L IR 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 Symbol L IRV 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 Symbol L VEX 31 398 32 410.5 33 423 34

HRX-OM-Y098

(This is a wiring example.) 14 1 13 25 D sub 25 female pin (socket) type Note: Prepare a cable tie. Fasten the signal cable to the mount on the base with the cable tie.

Smooth Cylinder Series CQSY

) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Standard Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 (mm) Without auto switch With auto switch C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5