T

(mm) Fitting size D 3.2 4 Weight g A B C E F Model M-32R-2 M-04R-2 36 36.5 31 .5 32 0.9 0.7 0.8 2 x 1 .2 20.5 4 Component Parts Note Electroless nickel plated Electroless nickel plated Material Brass Brass PP No. 1 2 3 Description Sleeve Studded body Stem Applicable fitting size D Applicable tubing 3 2 1 C F D E B A 15-6-29 6 Miniature Tubing and Miniature Fittings Specific Product Precautions

Digital Flow Switch Series PFA For Air Series PFW For Water

DC (+) 1 NC 2 DC () 3 4 OUT 4 43 2-3.4 Flow direction PFA511/521/551 62 116 23 1.6 76.2 54 44 34 44.5 2-Port size 30 40 50 (43.5) 42 6 Flow direction 9 Series PFA Dimensions/Remote Type Display Unit for Air PFA3-A Panel mount type Internal circuit and wiring examples to are terminal numbers. 41.8 40.3 Sensor 4.3 40 Blue Brown Black N.C. 1 2 3 4 SMC FLOW SWITCH 5 6 7 8 OUT1 OUT2 35.8 A 40

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS10-10 S SS ZZ Z 10 70 87 30 20 80 97 30 30 90 107 40 40 100 117 40 21-/2210-/11-/12CXS10-20 CXS10-30 CXS10-40 CXS10-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 110 127 40 21-/2210-/11-/12855 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS15, CXSL15 10-/11221221Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

Note 2) The material for seals and bumpers of CJ5SV is FKM. 836 Stainless Steel Cylinder Series CJ5-S Dimensions Basic style (B): CJ5BS R V NDh8 GA "# # "# # GB MM NN CA CB BA BB F NA NB A With head cover port in axial location (R) S $ % & BB H BA Z $ % & A BA BB CA CB D F GA GB H MM NN NA NB NDh8 S Z 10 16 Axial foot style (L): CJ5LS R V CA BA BB ,+( GB GA F NN MM '( )*+ "# # BA "

AWM20 to AWM40

Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 4) H Mounting Without mounting option With bracket With set nut a + Without auto drain Float type auto drain (N.C.)

AWM20 to AWM40

Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 4) H Mounting Without mounting option With bracket With set nut a + Without auto drain Float type auto drain (N.C.)

HRX-OM-O021

40 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32 40 40 500 500 0 0 5 10 15 20 25 30 35 40

Step Motor Controller

Operating humidity range (%) Storage temperature range (F) Storage humidity range (%) Insulation resistance (M) Between the housing (radiation fin) and SG terminal 50 (500 VDC) 0.3 (Screw mounting) 0.4 (DIN rail mounting) Weight (lb) Note 1) Do not use the power supply of inrush current prevention type for the controller power supply.

PFxx-OMP0001CN

OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -35No.PF-OMP0001CN-F [F 2] OUT2 OUT2 (28 )(29 ) OUT2()[---] <>OUT2 [F 2] [F 2][oU2] OUT2 [---] [oU2][] [2ot][] 37 38 39 40 -36No.PF-OMP0001CN-F a.

PSxx-OMM0002CN

[000] <> (40)~(40) [UnL] 5 [000] / 1 / ( ) 1 (/30 ) -41No.PS-OMM0002CN-F , (1015 ) <> 5 UnLLoC 5 5 (30 ) 5 000 (30 ) 41 / 1 -42No.PS-OMM0002CN-F ZSE80(F)/ISE80(H) ,, (), No.1 ON ON OFF Yes No.2 No ON OFF No.1 OFF No.3 No.4 No.5 No.6 No.7 -43No.PS-OMM0002CN-F No.8 Yes No No.9 No.9 No.10 No.11 No.12 No.13 No.14 No.15 No.16 No.17 -44No.PS-OMM0002CN-F No.

HRX-OM-W038

40 2000 2000 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz *The cooling capacity will be reduced by 300W when option: T and MT are selected.

ML1C

DPiston speed V (mm/s) -X 1107 Mechanically Jointed Hy-rodless Cylinder with Brake ML1C Series 25, 32, 40 How to Order Hy-rodless cylinder (With brake) ML1C G 25 300 H M5BW Made to Order Refer to page 1109 for details. Number of auto switches Bore size (mm) 25 32 40 25 mm 32 mm 40 mm Nil S n 2 pcs. 1 pc. n pcs.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

Lubricator

AL-OMX0056-A PRODUCT NAME Lubricator MODEL / Series / Product Number AL20-(F,N)01(F,N)02(B)(-2,3,6,C,R,Z)-D AL30-(F,N)02(F,N)03(B)(-2,3,6,8,R,W,Z)-D AL40-(F,N)02(F,N)04(B)(-2,3,6,8,R,W,Z)-D AL40-(F,N)06(B)(-2,3,6,8,R,W,Z)-D AL50-(F,N)06(F,N)10(B)(-2,3,6,8,R,W,Z)-D AL60-(F,N)10(B)(-2,3,6,8,R,W,Z)-D Contents Page 1. Safety Instructions 2-6 2. Application 7 3. Standard Specifications 7 4.

VCB

OR-1860-120F F: FKM E: EPDM For VCB30 OR-2380-130F F: FKM E: EPDM For VCB40 OR-2600-180F F: FKM E: EPDM e When external leakage occurs after disassembling a valve, replace the above seals.

VCB

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 52 42 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 65 56 Two mounting screws (for mounting

Vacuum gripper

-45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -12No.

LEF-OM006xx

LEFS 25 B 6N 1 20 0 1 DIN 1 6 16 25 25 I/O 32 32 40 40 1.5 m 1 1 3m 3 3m 3 5m 5 5 5m 40 16 25 32 40 16 25 32 ( ( DC24V NPN NPN A A LECP6/LECA6 6N 6N PNP PNP DC24V 6P 6P NPN NPN LECP1 1N * 1N * LECP1 PNP PNP 40 32 25 16 1P * 1P * 40 32 25 16 NPN NPN A A 10 mm 12 mm 16 mm 20mm AN * LECA6 AN * LECA6 PNP PNP B B 5 mm 6 mm 8 mm 10mm AP * AP * 100 mm 100 8m 8m 100 8 8 10m

Rotary Actuator/Vane Style Series CRB1

Set screw CDRB2BW10/15 CDRBU2W10/15 CDRB2BW20 to 40 CDRBU2W20 to 40 CDRB1BW50 to 100 144 Rotary Actuators Series CDRB2/CDRBU2/CRB1 Adjustment of Auto Switch Rotation range of the output shaft with single flat (key for size 40 only) and auto switch mounting position Size: 10, 15, 20, 30, 40 Rotation: 90 Rotation: 180 Rotation: 270 CRB2 Switch for end of rotation Switch for end