Valve Stations: 12 Stations, Port Size: C8 (ø8 One-touch Fitting), Thread: N (NPT), SI Unit: N (PROFIBUS DP), End Plate Type: 3 (7/8" Connector Power Supply, Max Supply Current 8A), SI Unit COM: N (-COM)

25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon or carbon dioxide. 2-color display flow switch., Sensor and monitor separation, which allows remote monitors' centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication also on the sensor., Fast response: either 50 ms, 0.5s, 1,

ZVB20_E_

Caution 1. This product has not been cleaned. When using this product in a clean room environment, flush and confirm the products purification level before use. Handling Caution 1. Do not drop, hit or apply excessive shock to the product. Even if the body is not damaged, the internal components may be damaged, leading to a malfunction. -4- 1. How to Operate 1.1 Outline 1.

ZVB40_E_

1.

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