AMG

Model AMG250 AMG350 AMG450 AMG550 AMG650 AMG850 AMG150 (1) Flow rate (l /min (ANR)) 750 1500 2200 3500 6000 12000 300 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 3/4, 1 1, 11/2 11/2, 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow is at 0.7MPa. Max. flow depends on operating pressure.

Pneumatic Positioner IP300/IP3100

FIG. 1) OUT 1 OUT2 Direct ? OPEBATION ACTUATOR 315 DSi used pruggeo 1/2 Solit D c pruggeo used 1/2 Solit B 3-15 osi c USEO plugged '1l2 Solit B 3-15 nsi pruggeo used '112 Solit D Fig. Reverse = ) Y INSTALLATION STYLE (REF. FrG. 1) QW tP3100 METHOD OF OPERATION Signal pressure trom a controlled pressure source enters the lP3l00 positioner through the signal port.

IR30-OM00013

Rc1/8 [2 ] 0.64 (1) (0.1MPa) (2) IR3000:0.2MPa (3)2 ON-OFF () (4) 4- (C) (C) (A) (A) (C) (A) (C) BLEED SUP OUT SU P N/ M Pa/ ( S) N N m 1 1 M Pa/m ( ) m 2 M Pa M Pa (A) /N (B) / ( ) m 2 ( A ) m 2 5- I R 3 0 0 1 SUP OUT 2 3%F.S. 3 R B(P36203018) G 2 3 RcF N IR3000G43-2-01 G43-P2-N01-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03

VFR2000-OMM0001

(N.O.)3 3 B 1.VFR200 2.VFR210 P8 0.9Nm -10No.VFR2000-OMM0001 ) ARBF2000 P 1.0MPa 1) 0.05to0.83MPa 2) -5to60oC ()3) M5X0.8 (kg) 0.16 PA 5.5 (mm2) P1=0.7MPa,P2=0.5MPa S PB 5.1 DIN DIN DIN DIN / / / / AEA 12 (mm2) DIN 180 P2=0.5MPa S BEB 11 )0.9MPa ) )50oC )2 ) P A B -11 No.VFR2000-OMM0001 01C 01T COM A (A B B AB ) COM AB+ BVFR2100 A COM VFR2200 A COM B 3 400 5 A COM

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

"Z") 84.5 ( Without "Z": 66.5) 36.5 75.5 (Without "Z": 57) 2(A) port 24 32 40 119 Pilot EXH 14 3(R) port 2 x 5.5 Mounting hole 2 x 1/4 (: Thread type) 19 1 3 Manual override 9 23 1(P) port 3(R) port DIN terminal VFN212N-l D (Y)ll-02l-D-l 216 19 23 2(A) port Indicator light (With "Z") Applicable heavy-duty cord O.D. 6 to 8 Pg 9 84.5(Without "Z": 66.5) 36.5 75.5(Without "Z": 57) 24 SMC 32

Exhaust Cleaner for Clean Rooms AMP Series

Exhaust into clean room Silencing effect: 40dB (A) or more Series variations Thread type Port size Optional Model 1/4 3/8 1/2 3/4 Double packaging Shipped in double packaging using antistatic bags.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

Valve stations are numbered from station 1 on the D side. Indicate the valves to be mounted below the manifold part number, in order starting from station 1 as shown in the drawing. When a layout becomes complicated, please indicate it on a manifold specification sheet.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

How to Order Symbol 2 1 01 06 2 AS 1 F E S K JIS Symbol Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Applicable tubing O.D.

Thermo-chiller

30 40 50 Sensitivity current [mA] 30 Rated operating current4 [A] 17 32 41 Rated power consumption4 [kW(kVA)] 5.4 (5.9) 10.5 (11.0) 13.1 (14.2) Noise level (Front 1 m/Height 1 m)4 [dB(A)] 75 75 71 Accessories Operation Manual (for installation/operation) 2 pcs.

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: F02 (G1/4), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: S (Bracket for w/Flow Adjustment Valve)

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 100～Less than 500, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: Female Thread, Plumbing Thread Type: [G] G, Plumbing Thread Nominal: [1/4] 1/4, Pressure Resistance

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/Flow Adjustment Valve

VXH

B 0 Normally Closed/Single unit Electrical option Nil None Port size S With surge voltage suppressor L With indicator light 02 03 04 Rc 1/4 Rc 3/8 Rc 1/2 With light/surge voltage suppressor Z Refer to the table (1) given below for availability.

Pressure Control Valve AP100

NPT G Set pressure range 0.02 to 0.2 MPa X201 AP100 Accessory Connection thread Symbol Nil B Description With bracket Symbol 01 02 Size 1/8 1/4 Precautions Relief Characteristics Do not use this product as a safety valve.

VXH

@) 6 ( : # # 1<' = & $ # "" ! 2 VX3 ) VXA How to Order VN VXH2230 02 1 G LVC LVA Bracket Nil B 3 -B JIS Symbol LVH LVD Valve/Body 0 3 ' +0 Electrical option Nil 3 LVQ S ( L LQ Z + ( Port size 6 ( 2 (-' LVN 02 03 04 6 +" 6 &+$ 6 +! TI/ TIL Electrical entry G 8 PA Rated voltage C ) 2 ! >) +# = 1 >) +# = D 543 PAX T ) 3 >) +# = 6 ( 4 !! >) +# = PB 7 !"

VXH

B 0 Normally Closed/Single unit Electrical option Nil None Port size S With surge voltage suppressor L With indicator light 02 03 04 Rc 1/4 Rc 3/8 Rc 1/2 With light/surge voltage suppressor Z Refer to the table (1) given below for availability.

Series VF1000/3000/5000 Pilot Operated 5 Port Solenoid Valve Single Unit Note) Only DIN and conduit terminal types are available with AC mode. Refer to the electrical entry for details.

X500 AC (50/60 Hz) 1 2 3 4 7 B DC 5 6 24 VDC 12 VDC X600 TRIAC output specification (Refer to page 14.) 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 240 VAC 24 VAC PE port EA/EB port VF1000 VF3000 > VF5000 > A, B port size VF5000 > > VF1000 > > VF3000 > > Port size M5 x 0.8 1/8 1/4 3/8 Symbol M5 01 02 03 Refer to Made to Order (Page 14) when piping to PE port is required.

Series VP300/500/700 Rubber Seal 3 Port/Pilot Poppet Type Body Ported/Single Unit

DC 5 6 24 VDC 12 VDC Port size AC (50/60 Hz) Symbol Port size VP300 1/8 1/4 3/8 1/2 VP500 VP700 1 2 3 4 7 B 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 240 VAC 24 VAC 01 02 03 04 Made to Order Nil Electrical entry Pilot exhaust port with piping thread (M3) specification (Refer to page 24).

AP3100

turn lever knob 6) Pull twist knob 8) Multi turn round knob (1 1/2 turn) Knob Option (Part number: AP PL227) 9) Operational Safety Device (OSD) N/A N/A Standard Option (Part number: AP PL225) 9) LOTO (Lockout) 6) Optional lever color available.