CLQ

1 !

Steam Valve

port 12(P1) 2.5 Indicator (Option) 1 8 2 x 2 x 1/8 (Back side 10(P2)) P1 51.5 75 40 64 (12.5) 1(A) (Back side 2(B)) Main port Port size: refer to table below (1.6) 23 24 (21) 45 27 Bracket (Option) 2 x 4.5 2 x M4 x 0.7 depth 7 18 50 Main port 1(A), 2(B) Model VND10D-6A VND10D-8A VND10D-10A 1 8 1 4 3 8 18 Port size: 10A, 15A, 20A, 25A M G (Valve open) Q N R Pilot port 12(P1) Indicator (Option

HRX-OM-M005

HRX-OM-M005 Table of Contents Table of Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using this Product . 1-1 1.2 Hazards. 1-2 1.2.1 Hazard Levels . 1-2 1.2.2 Definitions of Serious injury and Minor injury . 1-2 1.2.3 Symbols . 1-3 1.3 Hazard Warning Label . 1-4 1.3.1 Type of hazard warning label . 1-4 1.3.2 Location of hazard warning label . 1-5 1.4 Location of Model Label . 1-

AMP

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model Maximum flow capacity l/min (ANR) 1000 200 500 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 0.43 0.68 Weight kg Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less Ambient and fluid temperature 5 to 50C Filtration degree

AMPSeries

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

3/5 Port Solenoid Valve

Mounting Warning 1. Operation Manual (this document) In the case of diodes, the residual voltage is approximately 1 V. 4.

VND

-25A VND50D-32A VND50D-32F VND60D-40A VND60D-40F VND70D-50A VND70D-50F 1 8 1 4 26 28 31 120 130 240 380 7 0.3 3 8 15 0.6 1 2 3 4 20 0.9 1.4 2.3 5.5 3.6 7.2 5.7 10.8 25 1 VC 1 4 1 440 32 32 1 2 1 VDW 920 40 40 2 VQ 1500 50 50 Note) The companion flange is JIS B 2210 10K (standard) or its equivalent.

High-precision Digital Pressure Switch

value (main display). (1) Press and hold the SET button for 1 and 3 seconds in measurement mode.

Thermo-con

400 W Note 1) 320 W Note 1) Heating capacity 770 W Note 1) 0.018 to 0.054F (0.01 to 0.03C) Temperature stability Note 2) Pump capacity Refer to performance chart.

IR30-OM00013

Rc1/8 [2 ] 0.64 (1) (0.1MPa) (2) IR3000:0.2MPa (3)2 ON-OFF () (4) 4- (C) (C) (A) (A) (C) (A) (C) BLEED SUP OUT SU P N/ M Pa/ ( S) N N m 1 1 M Pa/m ( ) m 2 M Pa M Pa (A) /N (B) / ( ) m 2 ( A ) m 2 5- I R 3 0 0 1 SUP OUT 2 3%F.S. 3 R B(P36203018) G 2 3 RcF N IR3000G43-2-01 G43-P2-N01-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03

VQ4000

Note 1) How to Order Sub-plate Note 2) VQ4000 Note 3) Electrical entry Port size P S Plug-in conduit terminal Plug lead 02 03 Rc1/4 Rc3/8 Piping B Side piping Note 1) Bottom piping type is applicable to only Rc1/4. Refer to p.1.11-46 for thread standard.

Antibacterial Filter (5μm) Antibacterial Filter (0.1μm) Odor Removal Filter Bacteria Removal Filter

How to order HF2BFB 30 02 (1) (2) (3) (4) (5) (2) Symbol Details Body size 30 40 BFA Antibacterial Filter (5m) BFB Antibacterial Filter (0.1m) (1) Filter type BFC Odor Removal Filter BFD Bacteria Removal Filter Nil Rc N NPT (3) Thread type F G 02 1/4 (4) Port size 03 3/8 04 1/2 Nil Flow direction: left to right (5) Semi-standard R Flow direction: right to left 10 5.

Moisture Control Tube

Note 3) Do not cut the tube. 1 Use the product in an operating environment where humidity is as low as possible. 2 The value at which the moisture control tube is bent or flattened at 20C. Be careful not to bend or flatten the tube and the inner sleeve even if the value is more than the minimum bending radius. 2 Inner sleeve R How to Order IDK 02 100 Moisture control tube O.D.

EX600-WEN_WSV.eng

(Pairing) Red/green 24 V (Control and input) 24 V (Control and input) 1 1 FRANCE (33) 1 6476 1000 Orange LED is ON.

EXxx-OMV0028.eng

(Pairing) Red/Green 24 V (Control and input) 24 V (Control and input) 1 1 FRANCE (33) 1 6476 1000 Orange LED is ON. Forced output mode. 3 2 1, Boulevard de Strasbourg, Parc Gustave Eiffel Bussy Saint Georges F-77607 Marne La Vallee Cedex 3, France 2 24 V (Output) 2 24 V (Output) 1 2 OFF Base is not registered. 4 5 4 1 0 V (Control and input) 3 0 V (Control and input) Green LED is ON.

AMC

(Except AMC220) Thread style (1) (2) 2 Female thread R(PT), Rc(PT) 03 3 8 1 Indicate "BD" if both are required.

CL

1 !2 !3 !4 !5 !6 !7 No.

Siiiil"Tivrc

J 1n 114 250 3/8 350 112 450 3/4 5 5 0 1 650 1 1i2 850-2 I I Port Sr" I PT pofts ilodel Bracket Beplacement Element AMG150 BM5'I AMG-EL150 02 1/4 (AMG 1s0) 03 3y8 (AMG 250) 04 1/2 (AMG 350) 06 3/4 (AMG 4s0) 1 o 1 ( A M G 5 5 O ) 14 1 1/2 (AMG 6s0) 20-2(AMGsso) AMG250 BM52 AMG-EL25O AMG35O BM53 AMG-EL35O AMG45O BM54 AMG-EL45O AMG550 BM55 AMG-EL55O AMG65O BM56 AMG-EL65O AMG850 BM57 AMG-EL85O

Precision Regulator

panel mounting) + b Pressure gauge Nil Without pressure gauge Options G Round type pressure gauge EA NPN open collector 1 output (Note 1) EB PNP open collector 1 output (Note 1) EB PNP open collector 1 output c With digital pressure switch c With digital pressure switch EC NPN open collector 1 output + analog voltage output ED NPN open collector 1 output + analog current output + d Flow