Large Type Vacuum Unit Series ZR

(L) Lead wire length 0.6 (3.0) m PNP output 27 (L) Lead wire length 0.6 (3.0) m NPN output D3 26 (L) Lead wire length 0.6 (3.0) m Analog output 67 (L) Maximum vacuum pressure Lead wire length 0.6 (3.0) m PNP output S 84kPa Vacuum switch specifications (E) L 53kPa Nil Lead wire length 0.6m Grommet type L Lead wire length 3.0m Ejector exhaust type C Lead wire length 0.6m CL Connector type

Speed Controller with One-touch Fittings

min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS-FG AS-FP AS-FM AS-D Number of needle rotations Number of needle rotations Number of needle rotations AS-T Construction AS1002F, AS2002F, AS2052F AS1002F-02, AS3002F, AS4002F ASP w e r u !

Guide Table Series MGF ø40, ø63, ø100 1

40 50 40 DMGF63 Load weight m0 (kg) Load weight m0 (kg) Load weight m (kg) Load weight m (kg) 30 30 20 -X 20 20 MGF40 MGF40 20MGF40 MGF40 10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow Type (Metal Body) Flow rate and effective area AS220M-02 Model AS120M AS220M-01 R 1/4 Cylinder side Tubing side M5 x 0.8 10-32UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Rc 1/8 l/min (ANR) {Nl/min} Flow rate 38 7 12 Controlled flow Effective area mm 0.6 0.1 0.2 l/min (ANR) {Nl/min} 420 Flow rate 105 280 Free flow 6.5 1.6 4.3 Effective area mm Note) Flow rates are values measured with

Process Pump Series PA3000/5000/PAX1000 Series PB1000

(A) 2 0.7MPa (101psi) 0.15MPa (22psi) 1.8 (0.1) 10HZ 3 (R) 1 (P) 3 (R) 1 (P) Refer to Best Pneumatics (1) Page 2.2-1 Mist Separator Series AM Specifications Models Model Compressed air 1.0MPa (145psi) 0.05MPa (7psi) Fluid AM150 AM250 Maximum operating pressure Rated flow rate (ANR) 300l/min (10.5SCFM) 750 l/min (26.5SCFM) Note 1) Series AM separates and removes the oil mist in compressed

Process Pump Series PA3000/5000/PAX1000 Series PB1000

(A) 2 0.7MPa 0.15MPa 1.8 (0.1) 10HZ 3 (R) 1 (P) 3 (R) 1 (P) Refer to Best Pneumatics (1) Page 2.2-1 Mist Separator Series AM Specifications Models Model Compressed air 1.0MPa 0.05MPa Fluid AM150 AM250 Maximum operating pressure Rated flow rate l/min (ANR) 300 750 Note 1) Series AM separates and removes the oil mist in compressed air which is troublesome for ordinary filters, and removes fine

PA3000/5000/PAX1000

(A) 2 0.7MPa 0.15MPa 1.8 (0.1) 10HZ 3 (R) 1 (P) 3 (R) 1 (P) Refer to Best Pneumatics (1) Page 2.2-1 Mist Separator Series AM Specifications Models Model Compressed air 1.0MPa 0.05MPa Fluid AM150 AM250 Maximum operating pressure Rated flow rate l/min (ANR) 300 750 Note 1) Series AM separates and removes the oil mist in compressed air which is troublesome for ordinary filters, and removes fine

CEx-OMQ0013

n F G C D () T J 50 50mm K 63 63mm 80 80mm N 100 100mm R H Z mm mm mm 40 25~850 25~700 1200 950 50 25~800 25~650 1150 900 63 25~800 25~650 1150 900 80 25~750 25~600 1100 900 100 25~750 25~600 1100 850 4-2 CEU2 NPN P PNP 15 4-3 CE1-R 5 5m 10 10m C 15 15m 20 20m A B CD E F G () 16 5. 5-1 17 18 5-2 19 5-3 20 6. 6-1 1 3 4 7 5 2 6 8 9 10 11 6-2 1 11 10 9 2 3 4 5

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenl '1 '100 vAc ,2 2OO VAC 5 24 VDC s 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

Non-contact Gripper XT661 Series

air Grease Grease-free R Clockwise L Counterclockwise Body material A2017 Weight (g) 12.5 49 114 206 310 * Air purication rating: JIS B 8392-1 (ISO8573-1) Quality Degree 4, 4, 2 or more 2A 3A Low profile cyclone type Outer body diameter (mm) 20 25 Piping port size 1.6 Fluid Air* XT661 X260 2A R Operating pressure 0.01 to 0.5 MPa Proof pressure 0.75 MPa Ambient and operating temperature 5

lVFl 10

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenl '1 '100 vAc ,2 2OO VAC 5 24 VDC s 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

Speed Controller with

AS2002F-04 When connecting 4 pcs. and mounting L-brackets on both sides Speed controller AS2002F-04 4 pcs. L-bracket AS-20L 2 pcs.

PFMC.eng

Only air, N2, are applicable. [ 25] 25 L/min (PFMC7501) End stop position Set value [P_1] [ H_1] Hysteresis of OUT1 [ 50] 50 L/min (PFMC7102) Hysteresis [H_1] 225o [ 100] 100 L/min (PFMC7202) Flow [L/min] Do not use the product in a place where static electricity is a problem.

REC

Therefore, the length of time for the stroke could be longer than that of ordinary cylinders. 4.9-5 Series REC 20, 25, 32, 40 Sine Cylinder How to Order RE C L 25 150 C73 Sine cylinder Number of auto switches Rod style Bore size 2 S 1 20 20mm n n Mounting 25 25mm 32 40mm B C 32mm Basic Single clevis 40 L D Axial foot Double clevis Auto switch F U Front flange Front trunnion Without auto

Process Pump

The result is approximately 10 L/min (ANR). Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5 MPa 100 P = 0.5 MPa Load weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1

tTV2000/3000

Note 3) The minimum unit for 1ry205 is l PSl I'relerre# i.rirfilri:: i'fiprafi: How to Order Model Pressure 0 Current WDe 4 to 2OmA Cunent type 0 to 20mA 2 Voltaoe tvpe 0 to SVDC 3 Voltaoe tvoe 0 to 1oVDC connector type S : l Straioht tvDe 3m L Right angle type 3m N Without cable connector d Preset input Monitor output Option (bracket) Thread type Port size 2 114 (2OOO,3000 type) 3 3/8 (2000

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SImA, rma l vollaQl9"IV ()( less ZSE4B-~: -26 Vacuum Analog output 1-5V( S%F S.I. load lq>edaoc:e: IkO ZSE4B -~: -65 P NP output PNP open co~ eclor MmA ISE4LB~i -25 Posilive pressure NPN output NPN0)J (l OJi eclGf 30V. 8rhA, resma l vol tage'!

REC

Stroke (cm) Mounting style Applicable max. stroke according to buckling strength 1000 900 800 700 600 500 400 REC40 Operating pressure (MPa) RE A B REC32 Mounting bracket symbol and figure Symbol REC REC25 REC 300 Load weight M (N) 25 32 40 20 REC20 200 Rod side flange style: F Head side flange style: G CX 39 50 56 61 0.3 Foot style : L L 100 30 38 43 47 0.5 W W W CY F 50 24 31 36 39 0.7

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

100 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations AS4201FSl, AS4211FSl AS3201FSl, AS3211FSl 12, 13, 16 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10, 11, 12 1500 1000 08, 09 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 10, 11 06, 07 1000 500 500 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations Note) The numbers above the flow rate