A

1/4) 1/4, 3/8, 1/2, 3/4 10 (3/8) 1/4, 3/8, 1/2, 3/4, 1, 1-1/4 15 (5/8) 1/4, 3/8, 1/2, 3/4, 1, 1-1/4 D I M E N S I O N S N O S E M O U N T: NCJPB S Y M B O L S S Z With Auto Switch A C D F GA GB H J L B B A MM NN Bore Size W 025 037 050 075 125 025 037 050 075 125 P 0.50 0.65 0.125 0.31 0.24 0.24 0.81 0.24 0.43 0.55 0.56 0.38 No5-40UNC 3/8-24UNF 6 (1/4) 0.13 1.26 1.38 1.50 1.76 2.07 2.19 2.31

5 Port Solenoid Valve Series SY3000/5000/7000/9000

One-touch fitting (Metric size) One-touch fitting (Inch size) Symbol Port size Applicable series C4 C6 M C4 C6 C8 M Symbol Port size Applicable series N3 N7 M N3 N7 N9 M 5 32" 1 4" One-touch fitting for One-touch fitting for 4 SY3000 SY3000 One-touch fitting for Mixed One-touch fitting for 6 Mixed 5 32" One-touch fitting for One-touch fitting for 4 1 4" One-touch fitting for One-touch

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t LH l m L LT (LX) LG LF 4-LD (LV) LP LE Part no.

Compact Hydraulic Cylinder

MA T a M GB V Cushion adjustment screw Air release 4 x J R (max.)

AC Servo Motor Driver (Pulse input type/Positioning type ）

M code Outputs the first digit and the second digit of the M code in 4-bit binary respectively.

Electric Actuators

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for

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) (N) a: Average speed (mm/s) M: Static moment (Nm) = 1.4a (mm/s) FE = 1.4amg MY1H25 MY1H25 MY1H25 MY1H25 MY1H25 MY1H25 MY1H25 5 5 5 4 4 4 MY1H20 MY1H20 MY1H20 MY1H20 MY1H20 MY1H20 MY1H20 3 3 3 m FE Note 4) L1 MY1H16 MY1H16 MY1H16 MY1H16 MY1H16 MY1H16 MY1H16 ME 2 2 2 Note 5) 1 3 MY1H10 MY1H10 ME = FEL1 = 4.57amL1 (Nm) MY1H10 MY1H10 MY1H10 MY1H10 MY1H10 Note 4) 1.4a is a dimensionless coefficient

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Basic style: MGGB 20 to 50 4-F through, counterbore G Bottom 4-H M N HR HN (MAX.)

Fluoropolymer Piping Equipment

3/4" 3/4" 30 39 16 15 LQ1B44-M 10 7.4 LQ1B45-M 8 21.5 20 17 34 29.5 23 8 5.5 7 29 14 28 26 54 39 LQ1B5D-M 1/2" 9 LQ1B5G-M 3/4" 1/4" 27.5 33.5 6 6 LQ1B49-M 12 1/4" 27.5 7 29 14 28 26 54 33.5 39 6 6 LQ1B5H-M 3/4" 3/8" 29 35 10 10 LQ1B51-M 19 1/2" 30.5 10 10 38 LQ1B6A-M 1" 3/4" 36 LQ1B52-M 12 9.4 16 16 LQ1B6B-M 3/4" 15 LQ1B53-M 19 3/4" 30 39 16 15 7 29 14 28 26 54 39 LQ1B6C-M 1" 1" 35 22.5

V100

2 50 78 L1 L2 VFN Common exhaust: VV3Z4-S50 (Built-in One-touch fittings manifold) (G) (L) (M) (D) With light/surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor 4-Rc 1/4 4-Rc 1/4 4-Rc 1/4 4-Rc 1/4 61.4 R side 2-M5 x 0.8 38 19 PE 2-5.3 mounting hole 4.4 10 2-M5 x 0.8 L side Max.10 91 23 18 (Lead wire length) Manual override (Non-locking) 300 300

Table of Contents

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for

4/5 Port Solenoid Valve

mounting) 11 3 28.1 [35.1] 12.7 P R1 15 R2 M5 x 0.8 (P, R1, R2 port) 1.4 (PE port) 21 L plug connector (L): SYJ5 20-L-M5 3 4 5 M plug connector (M): SYJ5 20-M-M5 3 4 5 DIN terminal (D): SYJ5 20-D-M5 3 4 5 M8 connector (WO): SYJ5 20-WO-M5 3 4 5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 28.1 [35.1] 60.9 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead

High Purity Fluoropolymer

L H A M W E LQ1H1A-M LQ1H2A-M LQ1H2B-M LQ1H2C-M LQ1H2D-M LQ1H2E-M LQ1H2F-M LQ1H3A-M LQ1H3B-M LQ1H3C-M LQ1H3D-M LQ1H4A-M LQ1H4B-M LQ1H4C-M LQ1H4D-M LQ1H5A-M LQ1H5B-M LQ1H5C-M LQ1H5D-M LQ1H6A-M LQ1H6B-M LQ1H6C-M LQ1H6D-M 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 21 1/8" 25 11.5 10 10 31.5 1/8" 35 16.5 14 15 14 29 1/4" 36.5

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

L H A M W E LQ1H1A-M LQ1H2A-M LQ1H2B-M LQ1H2C-M LQ1H2D-M LQ1H2E-M LQ1H2F-M LQ1H3A-M LQ1H3B-M LQ1H3C-M LQ1H3D-M LQ1H4A-M LQ1H4B-M LQ1H4C-M LQ1H4D-M LQ1H5A-M LQ1H5B-M LQ1H5C-M LQ1H5D-M LQ1H6A-M LQ1H6B-M LQ1H6C-M LQ1H6D-M 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 1/8" 10 25 11.5 10 21 1/8" 31.5 15 35 16.5 14 14 1/4" 29 1

Table of Contents

K With air supply valve, Vacuum release valve Thread type Nil Rc T F NPTF G Table (1) Combination of Nozzle Diameter and Standard Supply Pressure Standard supply pressure (MPa) Nozzle diameter M (0.35) S (0.45) H (0.5) 0.5 0.7 1.0 1.3 1.5 Table (2) Lead wire with 4-wire connector P5022-6-1 (0.6 m) P5022-6-2 (3 m) 13-4-23 4 Series ZMA Model H M Standard supply pressure Nozzle diameter (mm)

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MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

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Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

SY

.SS5Y71, #1 + #4 + #10 M type plug connector .

Metal Seal/Rubber Seal Series VQ Body Ported

Y 7 1 1 0 5 MO C6 VQ Series VQ1000 D-sub connector kit with 3 m cable 1 set Manifold base part no. 4 sets Valve part no. (Stations 1 to 4) 4 sets Valve part no.

AC Servo Motor Driver (Network card type ）

[m]/ 10(STM-4) [inch]/ 10-3 [degree]/ PT16 LMPH 0h [pulse] PT17 LMNL Software limit 0h 10STM [m]/ 10(STM-4) [inch]/ 10-3 [degree]/ PT18 LMNH 0h [pulse] PT19 *LPPL Position range output address + 0h 10STM [m]/ 10(STM-4) [inch]/ 10-3 [degree]/ PT20 *LPPH 0h [pulse] 5 13 5.