HRX-OM-Q026

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release Fan Breaker Trip alarm . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and

IIIIIII

(3) 1 0 6 23 9) 1 5 7 (40) 1 7 1 (18) 1 0 6 t?7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: SM.9.

Mechanical Valves Series NVM, NVFM, NVZNI

(3) 1 0 6 23 9) 1 5 7 (40) 1 7 1 (18) 1 0 6 t?7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: I I I SM.9.

FSQ seies

(Nole 6) The ' ecl'on s sub cl lo the adlLst ng boll adjustment.

Air Cylinder RSQ Series Stopper Cylinder

(Nole 6) The ' ecl'on s sub cl lo the adlLst ng boll adjustment.

 

Construction Standard type Double acting type N.C. type N.O. type w e q q e w q e w y t r A B A B With flow rate adjustment u Component Parts No.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

When used as a switch output device Setting of NPN open collector 2 outputs Setting of PNP open collector 2 outputs Brown DC(+) q Brown DC(+) q Load Black OUT1 r Black OUT1 r Load Main circuit Main circuit + + 12 to 24 VDC 12 to 24 VDC White OUT2 w White OUT2 w Load Load Blue DC() e Blue DC() e When used as an IO-Link device Brown L+ q L+ Black C/Q r Main circuit C/Q IO-Link master White

Micro Mechanical Valve Series VM1000

6 PE PE !0 e !5 w !3 EA EA y A A P P r q B EB B !7 EB !4 !1 !2 t Component Parts Aluminum alloy NBR Note No. 10 Description Material No.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

) M-5-4-P01 Cap nut C3604 (With electroless nickel plated) M-01H-6, M-5H-6 M-5HL-6, M-5HLH-6 M-5-6-P01 200

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM01301 6. Construction/Replacement Parts 6.1.

4 Port Solenoid Valve Series VQD1000

34 %() +(# ' 5 & $%#6 / (7 ( , ./$ 0 1 0 1 VV061 ! ''()% ,)# % # ## ., & /, '# & , . '0 23/ 414 e u q t r y !0 V100 S070 i VQD o 23/ 4#40 56"4!4 ! VKF w /, 1 !() '!2 VK VT VS & "# # & # ''()% * 8 7 23/ 9 : : 7 23/ : 7 9;9 8 : (; ! (7( :9 : (<8 9( = ' Series VQD1000 # $ % "" "" " ! ! " & ! " * $ & "( ' " ' ( ) " " Series VQD1000 !""#"$$ # !""

Vacuum Unit Ejector / Vacuum Pump System

Note 11) When K, Q, R, S is selected, select K for (3) Combination of Supply Valve and Release Valve, select W or L3 for (6) Wiring Combinations. Note 12) Unit selection function is not available in Japan due to new measurement law.

MXH

In Graph (10), find the intersection of a 30 mm overhang and load weight of 0.1 kg, which results in a determination of 16. 8-2-13 12 Series MXH Construction MXH6 (6) MXH10 (10) y @1 !7 w q!9 t !8 i !0 @0 @0 y @1 !6 w q !9 t !8 !

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

4 q o !3 @1 @0 !1 !0 !2 r w u e !5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 r !7 !6 t !8 !0 !2 i !9 y u MHZ Component Parts MHF Description Material Description Material Note Note No. No.

IDX-OM-W019

Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical maintenance . 4 1 Chapter 5 Troubleshooting . 5 1 Chapter 6 References 6 1 Specifications . 6 1 6 2 Specifications . 6 1 6 3 Dimensions . 6 2 6 4 Electric wining diagram . 6 4 IDFB Series Table of Contents 1 IDX-OM-W019 Air dryer Table of Contents 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 6 Chapter 7 Specification

IDX-OM-W010

. 6 1 6 2 Refrigerant with GWP reference . 6 1 6 3 Dimensions . 6 3 6 4 Electrical Circuit . 6 5 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 7 Chapter 7 Specification for Option A 7 1 Safety instructions . 7 1 7 2 Specifications . 7 1 7 3 Air piping . 7 1 7 4 Air flow capacity . 7 1 7 5 Compressed Air and Refrigerant Circuit / Operation Principles . 7 2 Chapter

IDX-OM-W020

: inch (mm) 10mm N 3/8 B Q E D A G C F 1 J 31.5 [820] P L K M N H (L=2800) IDFB4E/6E/8E/11E-11 1. : inch (mm) 10mm N 3/8 A B E D Q G C F 1 J 31.5[800] H N M 4-0.5 (L=2800) [4-13] 6-3 6 3 IDFB Series IDX-OM-W020 6 IDFB15E-11 1. : inch (mm) 10mm N 3/8 E D B A Q G C F (820) K L P N M H J 4-13 (L=2800) (inch [mm]) A B C D E F G H J K L M N P Q IDFB3E 3/8 8.9 16.1 18.6

Pressure Switch/Reed Switch Type

Place them in alphanumerical order. q e w Switch Characteristics Description Symbol Example) IS10-N01-6PZ Nil N Rc NPT q q Thread type Max. contact capacity AC 2 A, DC 2 W 24 V or less Note 1) Set pressure range of 6P(L, Z) is 0.2 to 0.6 MPa (30 to 90 psi). This product is for overseas use only according to the new Measurement Law.

ZR

-www.stevenengineering.com Components Valve unit q ZL For vacuum switch and adapter A M2.5 x 0.45 x 41 2 e ZY Standard (Without options) M2.5 x 0.45 x 5 6 u With individual spacer M2.5 x 0.45 x 8 6 ZQ Standard (Without options) M2.5 x 0.45 x 49 4 !

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Rated voltage 5 6 24 VDC 12 VDC Note 1) Light/surge voltage suppressor is built-in.