Process Pump

(Inch) 1/8" x 0.086" 1/8" 1/8" x 1/16" 3/16" 3/16" x 1/8" 1/2" 1/2" x 3/8" 3/8" 3/8" x 1/4" 1/4" 1/4" x 5/32" Refer to Best Pneumatics No. 7 for further details. 13 Series PB Applicable Fluids Material and Fluid Compatibility Check List for Process Pumps The data below is prepared based on data provided by the material manufacturers.

PSE200

CAT.ES100-41 A Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 1 A single controller monitors up to 4 pressure sensors. 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 1 A single controller monitors 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 Space saving 1 40mm MPa kPa OUT1 76% OUT2 CH 1 2 3 4 PRESSURE

AC Servo Motor Driver (SSCNET Type)

Item Setting value, setting Default AXIS AXIS AXIS AXIS range value 1 2 3 4 0:mm 3 0 150 300 450 1:inch 2:degree 3:PLS Pr.1 Unit setting Movement Pr.2 Pulse number amount per 1 to 20 (Note 1) 20 2 3 152 153 302 303 452 453 pulse per rotation(AP) (Unit: PLS) Pr.3 Moving amount The setting value range differs according to the "Pr.1 Unit setting". 20 4 5 154 155 304 305 454 455 per rotation

CEx-OMI0064

No. + 3 3 3 3 3 3 + 1 1 1 1 1 1 2 2 2 2 2 2 C (O/H/C) # 0 0 D W [CR] No. No. + 3 3 3 3 3 3 + 1 1 1 1 1 1 2 2 2 2 2 2 C (O/H/C) # 0 0 D W [CR] No. No. )0 ,+O H C 29 - # 0 0 P R [CR] No.

Stainless Steel One-touch Fittings Series KG

3 8 KGE10-03 3 8 KGE12-03 37 14 92 59 12 M22 1 27 24 23 22 58.3 46.1 1 2 KGE12-04 41 18 3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 1.5 32 29 30 1 2 KGE16-04 18 44 132 Note) ( ): Values for soft nylon.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

-3 IDF55C-3 IDF75D-3 IDF120D-3 IDF150D-3 IDF240D-3 IDF55C-3 AM850-20 AMD850-20 75 AMF1000-40 AMF900-30 AMF850-20 AMD850-20 AMD910-30 AMD910-40 AMD1010-40 IDF120D-3 110 150 220 IDF120D-3 IDF150D-3 IDF240D-3 AMF1000-40 For Rotary Screw Compressors (Without Aftercooler) Air compressor Refrigerated air dryer with built-in air cooled aftercooler (4)(6) Local line Flow capacity (m 3/min)

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

PSxx-OMR0001CN

1 C 6 2 1 3 G1/8 F 3 G1/8 7 NPN1 PNP1 N P L 4 7 5 M SI N 1 2 3 4 5 6 1 2 S 6 7 8 3 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMR0001CN-J 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 10 N 6 10 3 0 G1/8 F G1/8 3 0.4MPaMPa 1 11 0.4MPaMPa 2 0.2MPaMPa C Rc1/4 3 F 12 G1/4 0.2MPaMPa 4

PSxx-OMT0001CN

1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMT0001CN-E 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 6 10 N 3 10 0.4MPaMPa 0 G1/8 F G1/8 3 1 11 0.4MPaMPa 0.2MPaMPa 0.2MPaMPa 2 3 C Rc1/4 F 12 G1/4 4

5 Port Air Operated Valve SYA3000/5000/7000 Series

2(B) (A)4 Symbol Applicable series Nil Port size Without sub-plate 2 1 8 (EA)5 1 (P) 3(EB) 01 SYA3000 With sub-plate 1 4 3 position closed center With sub-plate 02 SYA5000 2(B) (A)4 1 4 3 With sub-plate 02 SYA7000 (EA)5 1 (P) 3(EB) 3 8 With sub-plate 03 3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 5 (EA)5 1 (P) 3(EB) 1458 5 Port Air Operated

VQ4000

push style 4 1 (P) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 (P) VP4 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 3 position double check (A) 4 (B) 2 6Note) VQ4 Light and surge voltage suppressor 1 (P) 5 (R1) 3 (R2) E With W/o light/With surge suppressor VQZ Note) Refer to p.1.11-36 for double check style.

Round Type Hydraulic Cylinder

3 e r !2 !1 u t w y CHK CHN CHM CHM CHS CH2 o !

3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 1 A single controller monitors up to 4 pressure sensors. 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 1 A single controller monitors 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 Multi-Channel Controller Series PSE200 Pressure Sensor Series PSE530 Space saving 1 40mm MPa kPa OUT1 76% OUT2 CH 1 2 3 4 PRESSURE SET reduction

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

3 @1 @0 !1 !0 !2 r w u e !5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 MHZ MHF r !7 !6 t !8 !0 !2 i !9 y u MHL Component Parts MHR MHR Description Material Description Material Note No. Note No.

Series KG Stainless Steel One-touch Fittings

3 8 KGE10-03 3 8 KGE12-03 37 14 92 59 12 M22 1 24 27 23 22 58.3 46.1 1 2 KGE12-04 41 18 3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 1.5 32 29 30 1 2 KGE16-04 18 44 132 Note) ( ): Values for soft nylon.

MXF

Yawing Examine Mey. (30 + 34) Mey = 1/3 x 8.4 x 9.8 x = 1.8 1000 We = 8.4 A4 = 34 Meay = 6.40 (Same value as Meap) 3 = 1.8/6.4 = 0.28 Find the load factor 3 of the dynamic moment. 3 = Me/Mea 3-4 Sum of the load factors n = 1 + 2 + 3 1 n = 1 + 2 + 2 + 3 + 3 Use is possible if the sum of the load factors does not exceed 1. = 0.125 + 0.012 + 0.025 + 0.20 + 0.28 = 0.642 1 And it is possible

MXW

(2) 3 (3) 4 (3) 6 (4) Interference Note) Figures in parentheses are the case for D-M9, D-M9V switch types.

VXA31/32

VC Model VDW VQ Thread type Nil T F N Orifice size Rc NPTF G NPT 1 2 3 4 1.5 mm 2.2 mm 3 mm 4 mm VX2 VX Refer to the table (1) given below for availability. VX3 Port size 01 02 03 1 8 1 4 3 8 VXA Valve/Body 4 Common/Single unit Refer to the table (1) given below for availability.

Fluoropolymer Piping Equipment

Page 4 6 8 10 12 19 1/8" 3/16" 1/4" 3/8" 1/2" Material: Super PFA LQHB LQHB TL TIL TL TIL TL Metric Size TLM TILM TLM TILM P.948 TD TID TD TID TIL Inch Size TH TIH TH TIH Material: PFA 2, 3, 4, 6, 8, 10, 12, 16, 19, 25 TLM Metric Size From page 949 1/8", 3/16", 1/4", 3/8", 1/2", 3/4" 1", 1 1/4" TILM Inch Size 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 3/4"