CQS

13 14 5 5.5 9.5 11.5 19.5 21.5 25 27 Bore size (mm) Double acting: double rod 3.5[6] 3[5.5] 8[10.5] 10[12.5] 1.5 2 6 7 5.5 5 10 12 1.5 2 6 7 5.5 5 10 12 12 16 20 25 17 19 22.5 24.5 5.5 6 10 11 9.5 9 14 16 0.5 1 4 6 5.5 6 10 11 9.5 9 14 16 19.5 21.5 25 27 Bore size (mm) CU CQS Auto switch model No.

Series KP/KPQ/KPG

Plug: KPP L A Applicable fitting size d Weight g D Model L A D d 6 32 13.8 0.4 KPP-04 4 Applicable fitting size 8 35 15.7 0.7 KPP-06 6 d 10 39 17.3 1.1 KPP-08 8 12 43 19.2 1.7 KPP-10 10 14 45.5 20.7 2.5 KPP-12 12 7 Series KPQ/KPG For Drive System Air Piping Recommended Applicable Tubing Tubing material Polyurethane: 10-series 4, 6, 8, 10, 12 Tubing O.D.

Series KP/KPQ/KPG

Plug: KPP L A Applicable fitting size d Weight g D Model L A D d 6 32 13.8 0.4 KPP-04 4 Applicable fitting size 8 35 15.7 0.7 KPP-06 6 d 10 39 17.3 1.1 KPP-08 8 12 43 19.2 1.7 KPP-10 10 14 45.5 20.7 2.5 KPP-12 12 7 Series KPQ/KPG For Drive System Air Piping Recommended Applicable Tubing Tubing material Polyurethane: 10-series 4, 6, 8, 10, 12 Tubing O.D.

KP/KPQ/KPG

Plug: KPP Applicable fitting size d Weight g D Model L A L A KPP-04 4 6 32 13.8 0.4 D d KPP-06 6 8 35 15.7 0.7 KPP-08 8 10 39 17.3 1.1 Applicable fitting size d KPP-10 10 12 43 19.2 1.7 KPP-12 12 14 45.5 20.7 2.5 4 For Drive System Air Piping Series KPQ/KPG Clean One-touch Fittings Recommended Applicable Tubing Tubing material Polyurethane: 10-series 4, 6, 8, 10, 12 Tubing O.D.

0.

for 6) C8 (for 8) C10 (for 10) Rc 1/4 Side VV3QZ35-lll VQZ3l5 VQZ300 2 to 20 stations Note) Weight for threaded connection.

IDX-OM-W034

References 6 1 Specifications . 6 1 6 2 Refrigerant with GWP reference . 6 2 6 3 Dimensions . 6 2 6 4 Electrical Circuit . 6 4 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 5 Chapter 7 Specification for Option K 7 1 Safety instructions . 7 1 7 2 Specifications . 7 1 Chapter 8 Specification for Option L 8 1 Safety instructions . 8 1 8 2 Specifications . 8 1 8 3 Specification

CV/MVGQ

2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n 2) n = 2, 4, 6, 8 Same side 15 90 100 110 35 100 100 110 100 1 Different sides 2 Same side 100 100 110 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8 Different sides n 100 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n

44

Note 6) Union nut is shipped together. Construction e q r q q Principal Parts Material No.

HRX-OM-Z002

Option . 6-1 6.1 OPTION LIST . 6-1 6.2 OPTION C [WITH INVERTER FOR COMPRESSOR] . 6-1 6.3 OPTION M [DEIONIZED WATER (PURE WATER) PIPING] . 6-1 6.4 OPTION P [WITH INVERTER FOR PUMP] . 6-2 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 ALARM NOTIFICATION . 7-1 7.2 ALARM SOUND STOP . 7-3 7.3 TROUBLESHOOTING . 7-4 7.3.1 Alarm details, causes, and troubleshooting . 7-4 7.3.2 How to

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Example: In case of 6 stations of air suction filter ZFA (single) ZFA100-01 6 pcs. (Brackets for 6 stations) ZZFA1-06 1 pc.

IDX-OM-W029

. i-5 i-2-7 . i-5 i-2-8 . i-6 i-2-9 . i-6 i-3 . i-7 i-4 . i-8 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 5-2 . 5-3 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-2 6-

IDX-OM-W031

. 6 1 6 2 Refrigerant with GWP reference . 6 1 6 3 Dimensions . 6 2 6 4 Electrical Circuit . 6 3 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 4 Chapter 7 Option Specification C 7 1 Specification . 7 1 7 2 Precautions for the installation and handling of the product . 7 1 Chapter 8 Option Specification K 8 1 Safety instructions . 8 1 8 2 Specifications . 8 2 Chapter

Compact Rotary Actuator Series CRQ2

6 !7 @7 @6 t y e @4 !0 !2 @0 !1 @2 u @5 q @1 !9 !8 !4 !3 Component Parts Component Parts Description Material Description Material No. No.

CXWM/CXWL

6 !7 !8 !

CNG

K KA M MM NA PG PH PL S LC LD LS LH LT LX LZ X Y W XA XB 141 (149) 117 (125) 24 7 5 6 3 M8 x 1.25 1/8 21.5 2 65 4 6 25 3 50 62 15 10 3 12 151 (159) 127 (135) 29 7 5.5 8 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6 28 3 57 70 15 10 3 12 154 (162) 128 (136) 35.5 8 5.5 10 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6.6 28 3 60 74 16 10 3 12 169 (178) 142 (151) 44 8.5 6 14 4 M14 x 1.5 1/8 28 2.5 81 4 6.6 33 3 68

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

closing port M3 x 0.5 Finger opening port 10 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port 25 25 6-M3 x 0.5 thread depth 6 (A, B, C common view) 3-3 depth 6 +0.02 0 34 (A, B, C common view) 12h9 0 0.043 1.5 5 19.5 12 41.5 (45) 8 17 2 8 0 0.05 2 3.5 0 0.03 3.5 0 0.03 Open: 22 Closed: 14 2-M3 x 0.5 thread depth 6 (Thread for mounting attachment) 15 15 6 5 5 6 12-5-12 13 2 Finger

Rotary Table/Rack & Pinion Style Series MSQ

6 !7 !8 !1 @5 er w@4 MSQ R (With internal shock absorber) CRA1 @1 !2 !5 !4 !9 @6 u @3 @0 @2 @9 #0 !

IDX-OM-W010

. 6 1 6 2 Refrigerant with GWP reference . 6 1 6 3 Dimensions . 6 3 6 4 Electrical Circuit . 6 5 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 7 Chapter 7 Specification for Option A 7 1 Safety instructions . 7 1 7 2 Specifications . 7 1 7 3 Air piping . 7 1 7 4 Air flow capacity . 7 1 7 5 Compressed Air and Refrigerant Circuit / Operation Principles . 7 2 Chapter

Parallel Type Air Gripper Series MHZ

6 6 6 6 6 4 4 4 4 4 4 Double acting 3.3 (0.74) 6.1 (1.37) Normally open 1.9 (0.43) Single acting Normally closed 3.7 (0.83) Single acting type, normally open Note 1) Values based on pressure of 0.5MPa, gripping point L = 20mm, at center of stroke.

MXH Series Compact Slide

Magnet holder 6 Brass 9 No.