Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

3/8" 1/2" 3/4" 1/2" 3/4" 1" 3/4" 1" 1 1/4" 29.5 39.5 37.5 51 49 48.5 54 58 57.5 56 59.8 69.5 68 66.5 80 78.5 77.5 96.5 95.5 93.3 14 9 1/4" 17 16 43.5 42.5 14 20 16 55 52 3/8" 22.5 21 18 19.5 25 62 59 64 62 1/2" 24.5 24 22 29 22.5 69.3 67.1 3/4" 76 73.5 26.5 32 30 37 24 1" 88 84 30 41 36 49 26 1 1/4" 106 106 35 50 46 64 35 326 Series LQ3 Fluoropolymer Fittings Hyper Fitting / Flare Type Dimensions

High Pressure Coolant Valve

-15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 217 (219) 246.5 (248.5) 282 (284) 301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 1 8 1 2 3 x 3 4 3 x 1 1 4 95.5 111 119 VNH VNH 1 4 VND Note) ( ): CE-compliant product (-Q) VCC Model J K L M N O P Q R S T U VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

VS7-6

2 (Top) 1 2 (Both sides) 1 2 (Bottom) 3 4 (Top) 3 4 (Both sides) 3 4 (Right) 3 8 (Right) 1 2 (Left) 3 8 (Left) 1 2 (Bottom) 3 8 (Bottom) 1 2 Combination Without air release valve 1 1 Without air release valve With air release valve 04D 04U 04B 06D 06U 06B Without silencer box With silencer box 03R 04R 03L 04L 03Y 04Y ... ... 1 2 3 4 10 10 100A CV 50/60Hz 200A CV 50/60Hz 24V DC 12V DC Others

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

Air Cylinder/Low Friction Series MBlQ 32, 40, 50, 63, 80, 100 How to Order MB L Q F 32 50 Standard MDB L F 32 50 Q A53 With auto switch Built-in magnet Number of auto switches S 3 n 2 1 3 n Mounting Basic/Without bracket Axial foot Front flange Rear flange Single clevis Double clevis Center trunnion B L F G C D T Bore size 32mm 40mm 50mm 63mm 80mm 100mm 32 40 50 63 80 100 Auto switch/Tie

Guide Table Series MGF ø40, ø63, ø100 1

Bore size/ Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

Mey = 1/3 x 3.36 x 9.8 x (50+19)/1000 = 0.76 We = 3.36 A3 = 19 Obtain Meay = 4.2 from Va = 420 in Graph (2). 2' = 0.76/4.2 = 0.18 pitch, yaw moment: Graph (2) 2 = Me/Mea Meay Nm 4.2 420 V mm/s 3-3 Sum of the Load Factors 1 + 2 + 2' = Applicable because 0.008 + 0.15 + 0.18 = 0.34 < 1 Use is possible if the sum of the load factors does not exceed 1. 1 + 2 < 1 8-9-6 6 Model Selection Series

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage Lead wire length 5 6 V S R 1 2 Electrical entry 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Nil 6 10 15 20 25 30 50 G H L LN LO M MN MO W0 Grommet, 300 mm lead wire Grommet, 600 mm lead wire

VM

VR VH VHS Construction VHS20/30 VHS40/40-06/50 6 8 7 2 2 5 5 1 4 IN OUT OUT IN 1 9 3 EXH. EXH. Component Parts No.

Rotary Table

4 20 Round head no.0 Philips screw 1 19 Bearing 1 High precision type:2 (angular duplex bearing) 18 Bearing 1 17 Piston seal 4 16 Wear ring 4 15 Magnet 2 14 Bearing retainer 1 13 Table 1 12 GasketEnd cover 1 11 GasketCover 1 10 Push nut 2 9 Shock absorber holder 1 8 Arm 902 pcs. 1801 piece 7 Pinion 1 6 Piston 2 5 End cover 1 4 Seal 1 3 Plate 1 2 Cover 1 1 Body 1 No Description Qty Note 21

Digital Flow Switch (Remote type monitor unit)

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM510--1 10 (5) PFM510--2 10 (5) PFM525--1 25 (12.5) PFM525--2 25 (12.5) PFM550--1 50 (25) PFM550--2 50 (25) PFM511--1 100 (50) PFM511--2 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 -55No.PF-OMJ0018-F Dimensions PFM3 Panel cut-out dimensions Panel thickness: 0.5 to 6.0 mm Individual Two or more in a row (n: The number of products

Clean Air Module

Note 2) Refer to the specifications of display unit for the flow rate value per pulse. 340 Clean Air Module LLB Series Dimensions LLB3-1-PRVSF V2 49.5 HAA HAW Mounting hole for 4 x M4 AT 45 37 35 IDF IDU 1.5 4 20.5 278.5 50 IDF FS A Valve open and locked position Rc 1/4 (NPT 1/4) Rc 1/4 (NPT 1/4) IDFA 90 (Lever operating direction) Max. 91 IDFB A Hand valve Valve closed position 5.5 39 IDH

JXCx-OMY0008

Movement Speed Position Acceleration Deceleration Force Value Area 1 Area 2 In pos force speed force mode mm/s (mm) mm/s2 mm/s2 (mm) (mm) (mm) mm/s 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0, 1 (E.g.) Flow chart Controller (1) Select Step No.1.

A_HEC-OM-K001

A_HEC-OM-K001-1.7 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the Chemical Thermo-con . 1-1 1.2 Safety training . 1-1 1.3 Hazard Levels . 1-2 1.3.1 Definitions of Serious injury and Minor injury . 1-3 1.3.2 Symbols . 1-3 1.4 Hazard Warning Labels . 1-5 1.4.1 Location of hazard warning labels . 1-6 1.5 Safety Measures . 1-12 1.5.1 Precautions . 1-12 1.5.2 Protective

Ionizer

Bar length (mm) IZS31-E3 IZS31-E3 IZS31-E4 IZS31-E5 1 300 30 1 380 1 1 620 80 1 1 780 L 1 3 1100 3 1 1260 2 2 1500 Part no L 5 1 1900 IZS31-E3 IZS31-E4 IZS31-E5 200 4 2 2300 280 360 The model number requires the suffix -X14 to indicate that the body is to be shipped fitted with a security cover. IZS31 Standard part no.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

entry) Internal pilot / Built-in silencer External pilot SUP/EXH block assembly 1 SJ3000-50-1ARS-ll X port: Metric size 4 Inch size 5/32" SJ3000-50-3A-ll External pilot / Built-in silencer (Inch size) N7: With 1/4" one-touch fitting (straight) N9: With 5/16" one-touch fitting (straight) For different pressures, internal pilot Note 1) For different pressures Note 1) Internal pilot / Built-in

ZP

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

6 4 1 5 500 Stroke (mm) 100 50 0.05 0.1 0.5 1 2 0.05 0.1 0.5 1 2 Load (kN) Load (kN) Bore size 32 Bore size 40 800 6 8 6 4 8 3 7 5 3 7 4 5 1 500 1 Stroke (mm) 100 50 0.05 0.1 0.5 1 2 3 0.1 0.05 0.5 1 2 5 Load (kN) Load (kN) 20 Series CHN Technical Data 3-1 Cylinder Cushion Selection Procedure Caution Use a cylinder cushion within the maximum absorbed energy range.

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Indicator Valve size 16 25 40 50 Without XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 With XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 Indicator Valve size 63 80 Without XLFV63-30-1-2 XLFV80-30-1-2 With XLFV63A-30-1-2 XLFV80A-30-1-2 Note 1) Add the seal material symbol shown on page 8 at the suffix of the model number.

Vacuum Equipment

Selection Graph (2)-1 Pad Diameter Selection Graph by Lifting Force Vertical Lifting (2 to 50) Selection Graph (1)-1 Pad Diameter Selection Graph by Lifting Force Horizontal Lifting (2 to 50) 50 40 32 25 20 16 13 10 8 50 40 32 25 20 16 13 10 8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200