80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

10 ?1/4andquot;, ?5/16andquot;, ?3/8andquot;?6, ?8, ?10 ?1/4andquot;, ?5/16andquot;, ?3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

10 ?1/4andquot;, ?5/16andquot;, ?3/8andquot;?6, ?8, ?10 ?1/4andquot;, ?5/16andquot;, ?3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

10 ?1/4andquot;, ?5/16andquot;, ?3/8andquot;?6, ?8, ?10 ?1/4andquot;, ?5/16andquot;, ?3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

10 ?1/4andquot;, ?5/16andquot;, ?3/8andquot;?6, ?8, ?10 ?1/4andquot;, ?5/16andquot;, ?3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

10 ?1/4andquot;, ?5/16andquot;, ?3/8andquot;?6, ?8, ?10 ?1/4andquot;, ?5/16andquot;, ?3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

10 ?1/4andquot;, ?5/16andquot;, ?3/8andquot;?6, ?8, ?10 ?1/4andquot;, ?5/16andquot;, ?3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

10 ?1/4andquot;, ?5/16andquot;, ?3/8andquot;?6, ?8, ?10 ?1/4andquot;, ?5/16andquot;, ?3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

10 ?1/4andquot;, ?5/16andquot;, ?3/8andquot;?6, ?8, ?10 ?1/4andquot;, ?5/16andquot;, ?3/8andquot;250 g (IRV20-C10)250 g (IRV20A-C10)

Speed Controller: Standard Type Series AS In-line Type 1

Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Operated Type Fitting Status Body material Max. operating pressure psig (MPa) Cv Note) Connections Page Series AK3542 AK4542 N.C. 0.29 0.5 316 SS 125 (0.9) Compression Rc, R, NPT P.1 Female thread type Compression Manually Operated Type Fitting Knob Body material Max. operating pressure psig (MPa) Cv Note) Connections Page Series 0.5 316 SS Knob with a raised section on top (indication window) 250

Series 12-REA Sine rodless cylinder ø25, ø32, ø40, ø50, ø63

Specifications Bore size (mm) 25/32/40/50/63 Item 1.05MPa 0.7MPa 0.18MPa 10 to 60C (With no freezing) 50 to 300 mm/s Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Piston speed Stroke length tolerance Grease +1.8 0 +1.4 0 +1.0 0 0 to 250 st: , 251 to 1000 st: ,1001 st to Fluorine grease Particle generation grade (Refer to front matter pages 13

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Specifications Bore size (mm) 25/32/40/50/63 Item 1.05 MPa 0.7 MPa 0.18 MPa 10 to 60C (With no freezing) 50 to 300 mm/s Proof pressure Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Piston speed Stroke length tolerance Grease Cleanliness class (ISO class) +1.8 0 +1.4 0 +1.0 0 0 to 250 st: , 251 to 1000 st: , Over 1001 st: Fluorine grease Class 5 Magnetic

Direct Operated Precision Regulator Modular Style Series ARP3000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ARX21-01 ARX21-02 0.35 0.35 IR 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) VEX 0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (

P

Speed Controller/In-line Type AS2000-N02-X800/AS3000-N03-X800/AS4000-N04-X800 P .G. information Point to Group Specialized Product Flow Characteristics AS3000-N03-X800 AS4000-N04-X800 AS2000-N02-X800 300 800 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 1500 250 600 200 1000 150 400 100 500 200 50 0 0 1 2 3 4 5 6 7 9 8 10 0 0 1 2 3 4 5 6 7 9 8 0 0 1 2 3 4 5 6 7 8 Number

VBA-OM-S002

Connecting Air Tank and Booster Regulator VBA2 is with nominal size 8, for VBA4 with nominal size 8 and 10, OUT of the air tank can be changed to suit the application. OUT port Mounting Mounting base : Tighten the optional safety valve and drain valve and drain valve No gap (2) Prepare tools: Prepare a hexagon wrench key.

VBA-OM-P019

(I) 6 : Rc3/8 OUT (J) OUT Rc1/2 IN Rc1/2 () OUT VBA2 22~24Nm(R3/8) VBA4 28~30Nm(R1/2) OUT O Rc1/4 O A B C D E F G H I J K L M O VBA20A VBA22A 481 444 394 Rc3/8 59 VBAT20A1 VBAT20A1 216 700 520 477 429.8 180 200 100 400 Rc1/2 305 236 Rc1/2 85 VBA42A VBA20A VBA22A 531 494 444 Rc3/8 59 IN OUT VBAT38A1 VBAT20A1 252 873 570 527 479.8 205 250 150 500 Rc3/4 355 250 Rc1/2 85 VBA42A

VBA-OM-S009

Connecting Air Tank and Booster Regulator VBA2 is with nominal size 8, for VBA4 with nominal size 8 and 10, OUT of the air tank can be changed to suit the application. OUT port Mounting Mounting base : Tighten the optional safety valve and drain valve and drain valve No gap (2) Prepare tools: Prepare a hexagon wrench key.