SI Unit for Vacuum Manifold

Cable colour: Signal 1 Yellow : TD+ Connector M12 Straight M12 Straight 2 White : RD+ Cable O.D. 6.5 mm 3 Orange: TDNominal cross section AWG22 4 Blue : RDMin. bending radius (Fixed) 19.5 mm Fig. 9-4 EX9-ACxxxEN-PSPS -37No.EX-OMY0014-A (5) Cable with communication connector (M12 M12, Angle) Part number: EX9-AC 005 EN-PAPA Cable length (L) 005 500 [mm] 010 1000 [mm] 020 2000 [mm] 030 3000

SI Unit for Vacuum Manifold

Accessories (1)Cable with communication/power connector on both sides (M12 M12, Straight) Part number : EX9-AC 005-SSPS Cable length (L) 005 500 mm 010 1000 mm 020 2000 mm 030 3000 mm 050 5000 mm 100 10 mm Item Specification Pin No.

High Vacuum L Type Valve

External seal, Valve seal 1, Valve seal 2 Valve size Description Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V

High Vacuum L Type Valve

External seal, Valve seal 1, Valve seal 2 Valve size Description Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V

Series VQ Base Mounted Metal Seal/Rubber Seal

Note 4) Refer to Options on p.1.10-161 for One-touch fittings in inch sizes. 1.10-124 VQ 1000/2000 Plug-in Unit Base Mounted SY SYJ SX VK Electrical Wiring Specifications D-sub cable ass'y VZ AXT100DS25 015 030 050 wire color table VF Polarity Terminal No.

Base Mounted Metal Seal/Rubber Seal Series VQ

Note 2) Note 4) Note 3) Note 4) 2-4-158 Base Mounted Series VQ1000/2000 Plug-in Unit D side U side VQC 1 2 3 Stations SQ VQ0 Electrical wiring specifications Circular connector cable assembly VQ4 015 030 050 AXT100-MC26Wire Color Polarity Terminal no.

High Vacuum L Type Valve

External seal, Valve seal 1, Valve seal 2 Description Valve size Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V

High Vacuum L Type Valve

Valve size Valve size Material 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Description

High Vacuum L Type Valve

External seal, Valve seal 1, Valve seal 2 Valve size Description Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V

High Vacuum L Type Valve

External seal, Valve seal 1, Valve seal 2 Valve size Description Valve size Material Part indication No. 16 25 40 50 Standard AS568-025V AS568-030V AS568-035V AS568-039V External seal (4) Special AS568-025 AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V

42

For details, refer to page 457. 456 Base Mounted Plug-in Unit VQ4000 Series P Electrical wiring specifications D-sub connector assembly 015 030 050 Standard wiring Wiring with control unit AXT100-DS25Wire colors D-sub connector Terminal no. Terminal no.

HRX-OM-W058

10 15 20 25 Circulating fluid flow [L/min] Fig 9.6-2 Pump capacity(HRS018/030-A-20-T-R) HRS-R Series 9.6 Pump capacity 9-9 HRX-OM-W058 Chapter 9 Documents 9.7 Compliance This system conforms to the following standards.

Table of Contents

Characteristics 65 or less Cable length (L) 9 stations{ Conductor resistance /km, 20C 10 stations{ 11 stations{ 1.5 m AXT100-DS25-015 Cable 25 core x 24AWG 3 m AXT100-DS25-030 Voltage limit V, 1 min, AC SOL.A SOL.B 1000 5 m AXT100-DS25-050 12 stations{ SOL.B COM. Connector terminal no.

5 Port Solenoid Valve

Note SOL.A 9 Station 9 SOL.B 22 1.5 m 3 m 5 m AXT100-DS25-015 AXT100-DS25-030 AXT100-DS25-050 Cable 0.3 mm2 x 25 cores SOL.A 10 Station 10 SOL.B 23 SOL.A For other commercial connectors, use a 25pin type with female connector conforming to MIL-C-24308.

SI unit (CC-Link compatible)

. -29No.EX-OMP0005-I Cable with both sides connector (SPEEDCON) Part number: EX9-AC 005 MJ SSPS (Socket/Plug) Cable length (L) Connecter specification 005 500 mm SSPS Socket side: Straight, Plug side: Straight 010 1000 mm 020 2000 mm SAPA Socket side: Angled, Plug side: Angled 030 3000 mm 050 5000 mm 100 10 mm Straight connector type (EX9-AC#MJ-SSPS) Angled connector type (EX9-AC#MJ-SAPA)

Metal Seal/Rubber Seal Series VQ Body Ported

Characteristics 65 or less Cable length (L) 9 stations{ Conductor resistance /km, 20C 10 stations{ 11 stations{ 1.5 m AXT100-DS25-015 Cable 25 core x 24AWG 3 m AXT100-DS25-030 Voltage limit V, 1 min, AC SOL.A SOL.B 1000 5 m AXT100-DS25-050 12 stations{ SOL.B COM. Connector terminal no.

0.4

Cable Assembly Electrical Wiring Specifications AXT100-DS25015 030 050 D-sub connector D-sub connector cable assembly can be ordered with manifolds. Refer to How to Order Manifold. As the standard electrical wiring specifications, double wiring (connected to SOL. A and SOL.

Series VQ Metal Seal/Rubber Seal Body Ported

Electrical Wiring Specifications L D-sub cable ass'y 015 (AXT100-DS25-030) 050 wire color table 16 44 8 Terminal No.

VQ5000

Bottom 1/2 D Sub Connector Kit (25P) Cable Assembly AXT100-DS25015 030 050 D sub connector cable assemblies can be ordered by inclusion with manifold part numbers. Refer to the section "How to Order Manifolds".

VQ4000

For details, refer to page 2-5-11. 2-5-10 11 Base Mounted Series VQ4000 Plug-in Unit Electrical wiring specifications D-sub connector assembly 015 030 050 Standard wiring Wiring with control unit AXT100-DS25D-sub connector Wire colors Terminal no. Terminal no.