3 Port Air Operated Valve Series SYJA300 1

M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C. Base mounted (with sub-plate) 0.34 0.48 1.2 0.33 0.37 1.3 N.O. SYJA524-01 SYJA712-01 SYJA722-01 SYJA714-01 SYJA714-02 0.76 0.69 0.69 0.66 0.63 0.64 0.51 0.42 0.34 0.33 0.45 0.48 2.5 2.4 2.7 2.6 2.3 2.3 0.77 0.72 0.71 0.74 0.70 0.68 0.43 0.38 0.32 0.31 0.21 0.31 2.8 2.7 2.9 3.0 2.8 2.7 N.C. N.O.

AMPSeries

Description AMP320 AMP220 AMP420 AMP-EL220 AMP-EL320 AMP-EL420 Element assembly With O-ring 4 Note) The first and second elements are integrated, and cannot be replaced separately. 4 Exhaust Cleaner for Clean Rooms Series AMP Dimensions (mm) 1in = 25.4mm N Optional specifications O T: With element service indicator P R Q S SMC M D IN C Bracket (accessory) G L J I H K B A IN Bracket mounting

AMP

Description AMP320 AMP420 AMP220 AMP-EL420 AMP-EL320 AMP-EL220 Element assembly With O-ring 4 Note) The first and second elements are integrated, and cannot be replaced separately. 2 Exhaust Cleaner for Clean Rooms Series AMP Dimensions N Optional specifications O T: With element service indicator P R Q S SMC M D IN C Bracket (accessory) G L J I H K B A IN Bracket mounting hole F Applicable

Turntable Cylinder Series MGT

groove dimensions QQ section detail drawing Notch spring force adjustment bolt 4-OA through L 4-MM depth ML QQ section 22.5 4-OB counter bore depth OL B-NN depth NL XX section Z WA Q 45 RA X0.02 RB RC T VB U X PW VA H NL HB HA: T groove for hex. bolt XAH7depth XL DB 2-P GB GA GC 6+0.05depth 6 o PB K J G (Plug) 30 S PA + Stroke C + Stroke FA FB SB SA FC B + Stroke A + Stroke AA + Stroke 60

Ejector Valve Unit Series ZYY/ZYX 1

2 Aluminum Diffuser ZYY3000-NPA Non plug assembly t !3 Stainless steel Needle y Aluminum Spool u Resin Piston i 13-8-10 11 Ejector Valve Unit Series ZYY/ZYX Construction ZYX3000 EXH. ZX B B' A B ZR A B P1 A A' ZM !

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

Body Size: 2 (1/8, 1/4), Control Type: 1 (Meter-in), Thread Type: G (G), Port Size: 01 (1/8), Applicable Tubing O.D.: 06 (ø6), Seal Method: w/o Sealant, Option: Electroless Nickel Plating, Lock Nut Option: J (Round Lock Nut)

Series: AFM, Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Mounting: B (w/Bracket), Float Type Auto Drain: w/o Auto Drain, Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: J (Drain Guide 1/8: Body Size 20; Drain Guide 1/4: Body Size 30, 40), Indicator: L (with Element Service Indicator), Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Z (Pressure

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter)

This is a legacy product, and replaced byZSE20AF-Y-01-J ZSE30 VACUUM SWITCH. SWITCH. VACUUM SERIES. ZSE30 1/8 PORTED. .35756 lb. JC.

This is a legacy product, and replaced byZSE20AF-Y-01-J ZSE30 VACUUM SWITCH. SWITCH. VACUUM SERIES. ZSE30 1/8 PORTED. .27778 lb. JC.

Body Size: 150C [10SCFM (300l/Min)], Thread: N (NPT), Port Size: 01 (1/8), Accessory: B (Bracket), Auto Drain: Drain Cock w/o Auto Drain, Rubber Material: Standard, Air Pressure: Standard, Drain Guide: J (Drain Guide 1/4 Female Threaded)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: D (Panel Mount Adapter + Front Protection Cover)

This is a legacy product, and replaced byZSE20AF-V-01-J ZSE30 VACUUM SWITCH. SWITCH. VACUUM SERIES. ZSE30 1/8 PORTED. .44019 lb. JC.

Output Specification: S (NPN Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)

This is a legacy product, and replaced byZSE20A-Y-01-J-X505 ZSE30 VACUUM SWITCH. SWITCH. VACUUM SERIES. ZSE30 1/8 PORTED. .37806 lb. JC.

Special Application: 10-AF (Clean Series), Body Size: 20, Thread: Rc, Port Size: 01 [1/8 (Size 20)], Bracket: None, Bowl Type: None, Option: J [Drain Guide (Size 20 to 60)]

Model: 31, Orifice: 1 (1.5mm), Style: 0 (N.C., Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Standard, Port Size: 01 (1/8), Thread: N (NPT), Voltage: J (230VAC 50/60HZ), Electrical Entry: D (DIN Terminal), Surge Suppressor: Non, Rectifier: R (AC Class B Coil w/Full-wave Rectifier)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)