T

(mm) 12 3.2 4 6 8 10 D Tubing I.D.

S Couplers

81.7 H KKA6S-03M-1 R 3/8 51.4 44.9 138.3 L -04M-1 1/2 R 1/2 11.4 81.6 54.4 46.4 149.6 30 30.7 -06M-1 R 3/4 56.4 46.9 174.0 Female thread type (mm) Body size H Width across flats Min. bore size Model T Connection port size Weight g Effective area mm2 L D KKA3S-01F-1 Rc 1/8 44.5 37.6 T 17 -02F-1 1/8 Rc 1/4 18.5 6.1 23.4 44.8 41.2 -03F-1 Rc 3/8 49.9 43.1 19 D KKA4S-02F-1 Rc 1/4 46.1 92.2 22

LFE-OMY0008

[%F.S.] 2 1 0 OUT OUT OUT OUT 0 D 2D 3D 4D 5D IN IN IN IN 0 1 2 3 4 5 5 (5D) [] [] LFE13/8 inch 0.2 MPa LFE23/4 inch LFE31 inch (mm) D 5 D LFE1 11 55 LFE2 21 105 LFE3 27 135 68 No.LFE*-OMY0008 4.0 3.5 3.0 2.5 [%F.S.]

Electric Actuator Triple Axis P&P Unit

For detailed information about each part, please refer to information provided by P/A. 2 ) 3 ) 4 ) 5 ) 6 ) 7 ) 8 ) 9 ) 8 Triple Axis P&P Unit Dimensions (reference drawing for assembling) Stroke+240(Table movement range) 40 30 4-M8 x 1.25 thread depth 16 40 Polyurethane stopper 30 110 2-8H7depth10 Home position gauge 200 180 (Refer to 4) (Refer to 4) 110 (Refer to 4) (Refer to 4)

Low Differential Pressure Sensor

Rated differential pressure range Range For low differential pressure 0 to 2kPa 2kPa 0 Pressure Differential Pressure A C B D Pressure Differential Pressure A C B D 4 Series PSE300 Internal Circuit PSE300 NPN open collector output (2 outputs), Max. 30 V or 80 mA, residual voltage 1 V or less Analog output: 1 to 5 V Output impedance: Approx. 1 k PSE303 PNP open collector output (2 outputs)

Ejector Valve Unit Series ZYY/ZYX 1

Main circuit of switch (OUT1) Black Load 30 V, 80 mA (OUT2) + ZCU White 12 to 24 VDC Load 30 V, 80 mA Covering retainer Core wire crimping area Blue DC () AMJ Core wire Lead wire Socket Misc. Hook Covering ZSE1-18, -19 Pressure setting trimmer 1 Pressure setting trimmer 2 3.

PFxx-OMS0001CN

[cm] -70No.PF-OMS0001CN-A PFMC7501/7102/7202 2x A B D E F H K L N PFMC7501/7102 Rc1/2NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4NPT3/4G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 -71No.PF-OMS0001CN-A M8 (ZS-40-A) -72No.PF-OMS0001CN-A Revision history A [September 2016]

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS-T A (1) (2) L4 (1) (2) Weight (g) Model M1 D1 D2 L1 L2 L3 d T H Min.

VEX1

O A Model P, A port Rc(PT) 107 VEX350 1 2 3 4 123 96 112 26 30 70 90 50 60 25 30 10 15 25 25 80 100 46 60 45 51 60 82 72 95 2.3 , , 1 2.3 VEX370 1 4 Rc(PT)11 4 Rc(PT)1, 1 189 j DIN connector 9 c Bracket 166 h Grommet terminal 175.5 i Conduit terminal g Grommet 110 a Model 130 b 12 d 2 e 47 f 140.5 VEX350 120 VEX370 136 20 5 49 205 9 182 191.5 156.5 5.1-22 VEX3 Body ported/VEX390 Air operated

CEx-OMG0106

Present Position Next Target Point 20 30 Brake Point There is no braking point within the area Impossible for position determination Operating Condition: a. Speed: 100mm/sec b. Tubings length (form valve): 50cm below c. Supply Pressure: 0.5MPa (for both brake and driving purposes) d.

EX500-GPR1A.eng

BF SOL RUN Display Description NOTE When connecting manifold valve only without connecting Input unit manifold, LEDs of COM A D do not light. To make them light, connect a terminal plug to the unused connector of SI unit ( "C1" or "0" ). Settings for display Turns on: COM D is receiving data. Turns off: COM D has no received data. Turns on: COM C is receiving data.

53

time 1 min 30 s 20 s Max.

ML1

CE2 ML2B ML1C Mounting Position (Stroke End)/Reed Switch Mounting Position (Stroke End)/Solid State Switch D-E73A (L), D-E76A (L), D-E80A (L) D-M5B (L), D-M5N (L), D-M5P (L) D-M5BW (L), D-M5NW (L), D-M5PW (L) D-M5NTL, D-M5PTL REA REC RHC MTS CC Lead wire clamp/Lead wire cap (option) Series Lead wire clamp Lead wire cap ML1C LC-01 LP-01 Unit: mm Lead wire clamp/Lead wire cap (option) 25 32

Series 10-, 21- AW-B Filter Regulator

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

KA

(mm) A D M L Part No.

Antistatic One-touch Fittings Series KA

M P D L A Part No.

PSxx-OMM0002CN

[ON] 5 [oFF] [F99] -38No.PS-OMM0002CN-F / ()() 1 "Hi" 1 1 "Lo" 1 1 () 10%0 (1dight ) 1 LoC1 () < -> 5 LoCUnL () / -39No.PS-OMM0002CN-F < -> 5 [UnL] [LoC] 5 [LoC] [UnL] 41/ [UnL] [FAL] 3[LoC] -40No.PS-OMM0002CN-F [000] <> (40)~(40) [UnL] 5 [000] / 1 / ( ) 1 (/30 ) -41No.PS-OMM0002CN-F , (1015 ) <> 5 UnLLoC 5 5 (30 ) 5 000 (30 ) 41 / 1 -42No.PS-OMM0002CN-F

Multi-Axis Step Motor Controller

This control is not for synchronizing the position of the main axis and slave axis. 10 10 Current position Current position Origin 0 0 Origin 10 20 30 40 50 Axis 1 10 20 30 40 50 Axis 1 For 3 Axes JXC92 Series For 4 Axes JXC73/83/93 Series p. 3 p. 4, 5 VParallel I/O/ V Type V Width: Approx. 38% reduction Type V Width: Approx. 18% reduction 78 47 mm shorter 140 30 mm shorter JXC73/83 JXC92

AR Series Modular Type Regulator

A : Max. 3.5 AR20-A to AR25-A : Max. 4 AR30-A to AR40-06-A : Max. 8 Model Standard specifications Optional specifications Round type pressure Round type pressure gauge gauge (with color zone) Bracket mount Panel mount P1 P2 A B C D F J H J H J M N Q R S T U V W Y Z AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18 18.5 AR20-A 1/8, 1/4 1/8 40 67.4 23.5 22

AC Servo Motor Driver (SSCNET Type)

6.5.1 Initial I/O Signal Allocation . 30 6.5.2 Signal Allocation using Setup Software . 30 6.5.3 Allocation Examples . 31 6.5.4 I/O Signal Allocation Check . 33 6.6 Positioning Mode in Setup Software .34 6.6.1 Positioning Mode . 35 6.6.2 Motor speed Configuration . 36 6.6.3 Acceleration/deceleration Time Configuration . 37 6.6.4 Movement distance Configuration and Operation . 38 6.7 Saving