HRX-OM-S010

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

Adsorption Plate

Adsorption surface size SP2330 SP2430 SP2530 SP2630 150 x 150 180 180 20 150 82.5 82.5 105 16 200 x 200 230 230 20 200 107.5 107.5 130 25 250 x 250 280 280 25 250 132.5 132.5 155 36 300 x 300 330 330 25 300 157.5 157.5 180 49 755 SP Series Made to Order Please contact SMC for detailed specifications, delivery and pricing.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12

S 8 50, 100, 150, 200, 250, 300 "n" pcs. n 12 50, 100, 150, 200, 250, 300, 350, 400 Auto switch type Adjuster option Nil Without auto switch (Built-in magnet) Nil Rubber stopper B Shock absorber Metal stopper C One side centralized piping, switch rail Only for MXY12 One side centralized piping, with switch rail Nil Without one side centralized piping, without switch rail N The auto switch

MB1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper 80 1400 C95 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

NAAMS Standards Compliant

Calculation example Allowable arm length Arm length Allowable arm length Clamp arm Shim [mm] Clamping block Bore size Allowable arm length 50 300 63 300 Load cell Fulcrum Allowable load mass The allowable load mass changes depending on the arm opening angle.

VZ1000

Cylinder Speed Chart Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VK VZ1120--M5 (Piping: 4 x 1 m) VZ VF AS1301F-M5-04/AN120M5 AS1301F-M5-04/AN120-M5 Speed controller/Silencer VFR

HRX-OM-X027

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-X027 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-O021

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-O021 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Digital Pressure Switch

1 k S: Analogue output 4 to 20 mA Max. load impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Min. load impedance 50 -S/-R (Auto-shift input mode) With auto-shift switch output NPN open collector output type 2 output Max. 28 V, 80 mA Residual voltage 1 V or less -17No.PS-OMM0003-J -V/-T (Analogue output mode) Switch output PNP open collector output type 2 output Max

AS-FG/ASD-FG

Speed controller Cylinder Solenoid valve Tube Silencer Maximum return speed mm/s 100 200 300 6 ASD230FG CJ2 VJ500 TU0604 1m AN11001 10 16 Cylinder size 20 ASD330FG CM2 VZ500 TU0604 1m AN11001 25 Cylinder size 32 Values for pressure of 0.5MPa and temperature of 20C.

AMX-OM-Q015E

Membrane module kit and Dew point indicator kit Name Membrane module kit Dew point indicator kit Model IDG3 (Option : S) IDG-EL3 IDG3H (Option : S) IDG-EL3H IDG5 (Option : S) IDG-EL5 IDG5H (Option : S) IDG-EL5H IDG10 IDG-EL10 IDG-DP01 IDG10H IDG-EL10H IDG20 IDG-EL20 IDG20H IDG-EL20H IDG30A IDG-EL30A IDG50A IDG-EL50A IDG60LA, 60SA IDG-EL60LA IDG75LA, 75SA IDG-EL75LA IDG100LA, 100SA IDG-EL100LA

AMX-OM-Q018E

Membrane module kit (Element) and Dew point indicator KIt Name Membrane module set Dew point Checker set Model IDG3 (Option : S) IDG-EL3 IDG3H (Option : S) IDG-EL3H IDG5 (Option : S) IDG-EL5 IDG5H (Option : S) IDG-EL5H IDG10 IDG-EL10 IDG-DP01 IDG10H IDG-EL10H IDG20 IDG-EL20 IDG20H IDG-EL20H IDG30A IDG-EL30A IDG50A IDG-EL50A IDG60LA, 60SA IDG-EL60LA IDG75LA, 75SA IDG-EL75LA IDG100LA, 100SA

Digital Pressure Switch

(See Figure on page 59) Switch output NPN or PNP open collector output: 1 output NPN or PNP open collector output: 2 outputs Max. load current 80 mA Max. applied voltage 28 V (NPN output) Residual voltage 1 V or less (at 80 mA load current) 4 ms or less (with anti-chatter function: 20 ms, 100 ms, 500 ms, 1000 ms, 2000 ms, 10 s, 30 s or 60 s selected) Delay time Short circuit protection Provided

PSxx-OMM0002CN

-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -17No.PS-OMM0002CN-F -V/-T () PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 -V/-T () PNP 2 Max.80 mA 1 V -A NPN2 Max.28 V80 mA 1 V -B PNP2 Max.80 mA 1 V -18No.PS-OMM0002CN-F ONOFF () ON OFF ON5OFF 20 P 1 H_1 [Pa] ON OFF [s] -19No.PS-OMM0002CN-F <> (19)

Pneumatic Transfer System Series MF

Nil S n Auto switch type 15 32 15mm 32mm Nil Without auto switch Refer to the table below for auto switch part numbers. Straight type Stroke Air supply unit Note 1) 200 250 300 350 400 450 500 600 1000 200mm 250mm 300mm 350mm 400mm 450mm 500mm 600mm 1000mm Qty.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Flow Speed 3/4B (21.6) 1B (27.6) 11/4B (35.7) 11/2B (41.6) 2B (52.9) 21/2B (67.9) 2 1.8 3B (80.7) 1.6 1.4 Flow speed (m/s) 1.2 1 4B (105.3) 0.8 5B (130.8) 0.6 6B (155.2) 0.4 0.2 50 100 150 200 250 300 350 400 0 Flow rate (l/min) ( ): Gas pipe bore sizes 16-12-10 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

XLA Series

H 5 Initial power/ Power 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models.

XLA- ∗ -F7NJ ∗ - ∗ Series

H 5 Initial power/ Power consumption (W) 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models. 200V The heaters are PTC thermistor type design.

XLF Series

H 5 Initial power/ Power consumption (W) 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models. 200V The heaters are PTC thermistor type design.