Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7
M5 x 0.8 Port 2 M5 x 0.8 Note) 10-V114(A) and 10-V124(A) cannot be mounted on the same manifold.
B C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W711) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W721) A B C 1 V 1.5 V 5 V 4 mA 5.9 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521 30 250 -69No.PF-OMN0011CN-C / A B C D 0.6 V 1 V 5 V 5.4 V 2.4 mA 4 mA 20 mA 21.6 mA -70No.PF-OMN0011CN-C -71No.PF-OMN0011CN-C 0.58 mm(0.56 mm) (ZS-40-W) -72No.PF-OMN0011CN-C Revision
Dimensions A B 70 53 Element Dimensions A B Model EJ701S-T EJ801S-T EJ901S-T Applicable container 157 117 FGH100 286 246 FGH200 538 498 FGH300 71 Membrane Element for FGH Series ED Series RoHS Specifications Model EDS-X20 EDS-X40 Filtration accuracy (Filtration efficiency 99.9%) Note 1) 0.2 0.4 Length 247 mm 4,000 6,200 Filtration area (cm2) 495 mm 8,000 12,400 Heat resistant temperature
(A + 72 + B) 76.5 (72 + A) 77 (72 + A) Total length 125.5 (A + 114.5 + B) 120 (114.5 + A) 125.5 (A + 114.5 + B) 120 (114.5 + A) 120 (114.5 + A) Port size w C06 (C04) 02 (C04) C08 (C06) 02 (C06) 02 (C08) Port size w C10 (C08) 02 (C08) C12 (C10) 02 (C10) 02 (C12) Model Port size q C04 (C06) C04 (02) C06 (C08) C06 (02) C08 (02) Model Port size q C08 (C10) C08 (02) C10 (C12) C10 (02) C12 (02
mounted: VPA744V(A port) Rc 3/8, 1/2 16 119.5 (PA port) Rc 1/8 16 80 67 (R port) Rc 3/8, 1/2 2(A) NO 53 66 PA 40 3(R) 1(P) NC 2-6.2 (Mounting hole) Switch mark 55.8 52 81.5 82.3 33.5 32.5 24 16 (P port) Rc 3/8, 1/2 5-5-20 9 Series VPA300/500/700 Manifold Specifications How to Order 1 04 41 02 3 VV3PA Thread type SA Nil Rc G NPT NPTF VP Air operated manifold F VA N T SA Body size A port size
connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D Applicable cable O.D.: 6 to 12 G F G F Width across flats 22 G1/2 32 H (44) H 31.5 25 C C J G1/2 J Dimensions [mm] Model A B C D E F M P Q Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-1P(N) 30 30 66 30 11 20 8 1/8 19 27 56.5 30 43 47.5 50.5 23 56.5 64.5
) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 TQ 80 90 50 60 35 44 17.5 22 85 101 93 109 5 6 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 61.5 74 637 A VND Series Port size: 32A, 40A
1 r t !1 !0 Port 1 Port 2 Port 1 Port 2 Valve element A t q q o o w Valve element B y w Port 3 3 Port valve 2 Port valve Working Principle When the pilot operated solenoid valve !2 is not energized, the valve element A t connected to the piston u is closed by the return spring i. Then valve element B y connected to the valve element A t is open. When the pilot operated solenoid valve !
VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.
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VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.
At piping This is equivalent to a magnetic field of approximately 18cm in radius from a welding area using a welding current of almost 15,000 amperes. To use the system in a magnetic field that exceeds this value, use a magnetic material to shield the sensor unit Foreign matter should not enter. Entering of foreign matter will cause malfunction.
Note) The pilot port size is VR VH How to Order Manifold VHS VVTA32 Thread type Accessory (Mounting bracket) F Rc G Nil Stations Piping Exhaust style Symbol R Side Side A Bottom Side P 02 O No A Yes 1 Common exhaust 2 Individual exhaust 2 stations N T NPT NPTF 1 0 Side Side 20 20 stations To order valves and blanking plate assembly mounted onto the manifold, list valves and blanking plate
tubing O.D. d A (2) L5 (3) A (2) Model T D1 D2 D3 L1 L2 L3 L4 M1 L5 (3) Weight Weight (g) (g) T D1 H (1) H (1) D2 D3 L1 L2 L3 L4 M1 Min.
40 40 66 5 6 4 8 M10 x 1.5 20 24 50 106.5 118 161 25 9.5 21 64 50 80 5 6 4 8 M10 x 1.5 20 24 63 106.5 118 161 25 4.5 16 59 63 End lock mechanism dimensions MGPL (ball bushing)/A, DB, E dimensions (mm) (mm) E A HN (Max.)
This product cannot be used as a check regulator by installing it between solenoid valve and actuator. 3. Port with a pressure gauge or a plug can be used as an OUT port.
Dimensions IN574-95 (Sensor head + Display part) 20 40 230 D-F8N (2 pcs.) 110 Red tape 500 20 M12 Connector Tube (3 places) Green tape Sensor head Wiring Terminal no. Description Note 1 +15 V 1 2 1 2 5 2 Output signal 1 D-F8N 3 4 3 4 Display part 3 GND Socket connector A-coded (Normal key) Plug connector A-coded (Normal key) 4 Output signal 2 D-F8N DD1677
NBR Cushion seal O-ring NBR 6 Clean Room Rodless Cylinder Series CYP Dimensions (mm) 1in = 25.4mm E Depth ED 4-MM Thread depth M T Y L T K PA 4-Counter bore dia B Counter bore depth C F 4-LD QW PB N E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting