Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Flat finger [3] 4 x MM thread depth L Thread for mounting attachment K J A A D G B D B K J F C S W O (mm) Weight (g) F G Open Closed 2 2.5 3 4 L MM J K D C B Model A W MHZ2-10D3 1), 2) 11221122112211220 -0.05 0 -0.05 0 -0.05 0 -0.05 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.025 0 +0.025 0 +0.025 0 +0.030 0 +2.2 0 +2.2 0 +2.3 0 +2.5 0 60 125 250 450 5 6 8 10 M2.5 x 0.45 M3 x 0.5 M4 x 0.7

VS 8-2/VS 8-4

(Option -K) Note 1) When selecting SI units with SDTC or SDTD specifications, there are limits to the supply current from the SI unit to the input block or valve. Refer to the operation manual for details. Note 2) When selecting SI units with SDZCN specifications only, IP40 is compatible.

Air Tank Series AT 1

hole Anchor bolt mounting hole AT150C/220C AT55C to 125C Cleaning hole blank flange Gauge port socket Gauge port socket K (Safety valve port) Air outlet Air outlet K (Safety valve port) Manhole Air inlet Inspection hole Air inlet socket Drain Drain Anchor bolt mounting hole Anchor bolt mounting hole Model Air connection Socket Flange A B C D E F G H J K L Anchor bolt 406.4 609 609 609 962

CE

COM RS Q G 1 k ( ) or Control signal input RS H A 2.2 k (Select Reset/ Hold/Bank) Power supply (24 or 12 VDC) RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-12-29 CEU1 Counter drive power supply Nil D 100 VAC 24 VDC Output mode selection Nil P NPN open collector output PNP open collector output Connection Method Shield White Blue Yellow Brown Red Black Extension cable

CJP

B C E G H K MM NN 5 st 10 st F 15 st R 5 st 10 st S 15 st W Q 5 st 10 st Z Bore size (mm) 6 10 15 A 15 st M3 x 0.5 3.5 3 8.5 9 41.5 26.5 34.5 19.5 27.5 12.5 3 6 32.5 13.9 25.5 12 18.5 7 M10 x 1.0 9 M4 x 0.7 3.5 5 12 46 28 39 21 32.5 14.5 4 6 34 22 27 19 20.5 10 M15 x 1.5 13 12 M5 x 0.8 4.2 6 14 50 29 43.5 22.5 37.5 16.5 5 7 36 31 29.5 27 23.5 12 M22 x 1.5 20 19 6-2-16

Fieldbus system EtherCAT compatible SI Unit

0 Channel 31 (Open circuit detection) Enum0800 0=Disable 1=Enable 40x2:0 Monitor counter limit UNSIGNED8 Number of Channels 40x2:01 40x2:20 Channel 0 Channel 31 (ON/OFF count upper limit detection) Enum0800 0=Disable 1=Enable 40x3:0 Counter limit value (1-65000k) UNSIGNED8 Number of Channels Channel 0 Channel 31 (ON/OFF count upper limit value 40x3:01 40x3:20 UNSIGNED16 1 to 65000 (k)

Sensor Monitor

(example: If the Pressure switch with output impedance of 1 k is connected to the A/D converter to detect the analogue output of 5 V, the detected voltage by the A/D converter becomes 5 (V) x 1 (M)/(1 (k) + 1 (M)) 4.995 (V), and there is an error of approximate 0.005 V). Output impedance Operation mode Either hysteresis mode or window comparator mode can be selected.

Digital Flow Switch

Internal voltage drop K Key-lock function A function that locks the set buttons so that no accidental setting changes can be made. -14No.PF-OMO0005-F Terminology Definition M The resolution of set and display values. If the minimum setting unit is 1 L/min, the flow can be displayed in 1 L/min units, i.e. 10, 11, 12.

PFxx-OMP0001CN

. -16No.PF-OMP0001CN-F FG 1 DC(+) 2 OUT2// 3 OUT1 4 DC(-) -17No.PF-OMP0001CN-F NPN(2 ) PFMB7--ADC(+) OUT1 OUT2 DC(-) 28 V 80 mA 1 V NPN(1 )(15 V) PFMB7--CNPN(1 )(420 mA) PFMB7--DDC(+) OUT1 DC(-) 28 V 80 mA 1 V C15 V 1 k D420 mA 600 NPN(1 ) PFMB7--GDC(+) OUT1 DC(-) 28 V 80 mA 1 V 0.4V ()30 msec. -18No.PF-OMP0001CN-F PNP(2 ) PFMB7--BDC(+) OUT1 OUT2 DC(-) 80 mA 1.5 V PNP(1 )(15 V)

PFxx-OMS0001CN

. -17No.PF-OMS0001CN-A FG 1 DC(+) 2 OUT2// 3 DC(-) 4 OUT1 -18No.PF-OMS0001CN-A NPN(2 ) PFMC7--ADC(+) OUT1 OUT2 DC(-) 28V 80 mA 1 V NPN(1 )(15 V) PFMC7--CNPN(1 )(420 mA) PFMC7--DDC(+) OUT1 DC(-) 28V 80 mA 1 V C15 V 1 k D420 mA 600 50 NPN(1 ) PFMC7--GDC(+) OUT1 DC(-) 28V 80 mA 1 V 0.4V ()30msec. -19No.PF-OMS0001CN-A PNP(2 ) PFMC7--BDC(+) OUT1 OUT2 DC(-) 80 mA 1.5 V PNP(1 )(15 V)

Voltage Monitor for PFMV5

Internal voltage drop K Key-lock function A function that locks the set buttons so that no accidental setting changes can be made. M The resolution of set and display values. If the minimum setting unit is 1 L/min, the flow can be displayed in 1 L/min units, i.e. 10, 11, 12.

Digital Flow Monitor

K Key-lock function Function that prevents changes to the settings (disables button operation). M Max. applied voltage The max. voltage that can be connected to the output of an NPN device. Max. load current The max. current that can flow to the switch output. Measurement mode Operating condition in which pressure is being detected and displayed, and the switch function is working.

Digital Flow Switch (Remote type sensor unit)

Output for PF2A3 type PF2A5-Output impedance: 1 k 1: Refer to the PF2A3 operation manual for details of the flow monitor.

Digital Flow Switch (Remote type sensor unit)

Output for PF2W3 type PF2W5-Output impedance: 1 k 1: Refer to the PF2W3 operation manual for details of the flow monitor.

High Vacuum L Type Valve

flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2 90 257 117 65 11 114 110 83 104 39 9 13 XL-OMV0007 6.

XL-OMV0002

) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55 11 134 130 102 139 58 9 XLC-160 138 339 200 65 11 190 180 153 124 62 12.5 10 XL-OMV0002 5. 200 1680 100 100,160[ ]18 12 Assy O XLC-16,XLC-25,XLC-40,XLC-50,XLC-63,XLC-8 200 XLC-100,XLC

Standby E/P Regulator (Air Management System/ELECTRO-PNEUMATIC REGULATOR)

Bit BYTE 64 (Maximum) Value The Bits 49 54 56 32 30 35 30 2D 49 4C 33 30 2D 31 2D 4B 2D 58 33 39 39 (hexadecimal number) indicate "ITV2050-IL30-1-K-X399."

DOC1023126

Parallel I/O input circuit NPN specification (EQ--B5) PNP specification (EQ--B6) External Inside the electric actuator External Inside the electric actuator Internal power supply 24 VDC To internal circuit IN0,IN1 10 k 10 k 2.7 k To internal circuit IN0,IN1 100 2.7 k Parallel I/O output circuit NPN specification (EQ--B5) PNP specification (EQ--B6) Inside the electric actuator External

JXCx-OMT0023

A = P K T . (10.1) A : Heat dissipation area [m2] P : Loss generated in the control box [W] T : Difference between internal and ambient temperatures [ ] K : Heat dissipation coefficient [5 to 6] When calculating the heat dissipation area with Equation 10.1, assume that P is the sum of all losses generated in the enclosure. Refer to Table 10.1 for heat generated by the driver.

LV50-OMQ0004

. -10No.LV50***-OMQ0004-F Model Indication and How to Order LFE Option Body size (Flow rate range Symbol Content Symbol Lead wire Bracket 1 0.5 20L/min Nil Yes 2 2.5100L/min 1 3 5200L/min 2 Yes Yes 3 Yes Output Specifications Symbol OUT2 J Analogue 1 to 5V K Analogue 4 to 20mA Thread type Piping port size Symbol Description Rated flow range Symbol Port size Nil Rc 1 2 3 N NPT 3 3/8 Yes F