LV50-OMQ0002

Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g LFE14 48 39 4.6

LFE-OMY0008

[%F.S.] 2.0 1.5 1.0 0.5 0.0 0 1 2 3 4 5 [s] [S] [MPa] [MPa] [MPa] [MPa] [ [ [ [ ] ] ] ] 2 69 No.LFE*-OMY0008 / / / / A B C 1 V 1.1 V 5 V 4 mA 4.4 mA 20 mA [L/min] LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 70 No.LFE*-OMY0008 2x )M12 () 1.6mm A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67

LFE-OMZ0011

R Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g

LFE-OMZ0012

Without bracket (Bottom view) Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28

IZS30_eng

) } IZS30-BM ~ ~ }} ~~ )h dl g0i dQ j Thread for mounting M5 (Should be prepared by user) Angle ajustment available (90) Surface electric potential sensor (IZS30-D1) Sensor bracket (IZS30-BS) 2X2-M5X0.8 dpt6 2-M5X0.8 dpt7 Detecting hope 6P Modular jack (For Sensor plug for cable) l g0h l)i dQ Shaft 8 for mounting (Should be prepared by user) Mounting hole 8 Attached thread M5x0.8 IZS30

IZD10_eng

Installation distance mm Min. installation interval mm Object that is not to be measured Sensor head Charged object 10 20 20 40 Installation distance 25 45 30 55 40 65 50 75 60 90 Min. installation interval 70 100 75 105 Electrostatic sensor is affected by electric field or electromagnetic field due to its operation principle.

ZVB40_E_

.: ZVB-P1A) Hose band (Material: SUS) Exhaust duct hose (Material: PVC) (*) Connection inside diameter Duct collector bag filtration rating 10m (Material: Polyester) Hose band (Material: SUS) -12- 2.5 Offset Voltage and Discharge Time Ionizer 100 230 90 90 400 Actual measurement values of the static elimination performance at the points 1 to 6 are shown below.

HRX-OM-M090

Table 3-1 Amount of radiation and required ventilation Required ventilation amount m3/min Heat Differential temp. of 3 oC Differential temp. of 6 oC Radiated Model between inside and outside between inside and outside kW of installation area of installation area HRS012-AApprox. 2 40 20 HRS018-AApprox. 4 70 40 HRS024-A-20 Approx. 5 90 50 The water-refrigerated thermo-cooler discharges heat

HRX-OM-W060

100 110 120 Circulating fluid flow [L/min] Fig. 8-9 Pump capacity(HRL100-A-20 CH1) 8.5.2 HRL200A20 CH1 0.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow [L/min] Fig. 8-10 Pump capacity(HRL200-A-20 CH1) HRL Series 8.5 Pump

HRX-OM-Y098

-A-20 CH1) 8.5.2 HRL200-A-20 CH1 0.6 60 Circulating fluid outlet 0.5 50 Lifting head [m] 0.4 40 Pressure [MPa] 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow[L/min] Fig. 8-10 Pump capacity(HRL200-A-20 CH1) HRL Series Documents 8-9 HRX-OM-Y098 Chapter 8 Documents 8.5.3 HRL300A20 CH1 0.7 70 Circulating

HRX-OM-X037

Fig. 9-22 Cooling Capacity (HRL100/200-W-40-T2 CH2) HRL Series 9.4 Cooling Capacity 9-19 HRX-OM-X037 Chapter 9 Documents 9.5 Pump Capacity 9.5.1 HRL100-A/W-40 CH1 0.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 Circulating fluid flow [L/min] Fig.

HRX-OM-Z002

HRLE Series 9.2 Refrigerant and GWP Value 9-7 HRX-OM-Z002 Chapter 9 Documents 9.3 Dimensions 9.3.1 HRLE050-A-20445 965 (90) (10) (62) 1055 Unit:mm Fig. 9-1 Dimensions 484 385 150 Fig. 9-2 Dimensions for the positions of the anchor bolts 9.3 Dimensions HRLE Series 9-8 HRX-OM-Z002 Chapter 9 Documents 9.3.2 HRLE050-W-20(90) 965 (62) 445 (10) 1055 Unit:mm Fig. 9-3 Dimensions 484 385 150 Fig.

HRX-OM-W002

The factory default pump output setting is 90%. 4.2 Starting and Stopping HRR Series 4-2 HRX-OM-W002 Chapter 4 Starting the Product ECO F RUN Lighting up MPa ALM RUN PSI MPa ALM WRN LPM GPM WRN LPM RUN M RMT RMT H H SEC EXT SEC AT MENU RUN/ STOP MENU RUN/ STOP ENT RESET Press and hold for approximately 1second.

High Vacuum L Type Valve

Heater specifications Item XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 Rated voltage of the heater 90 to 240 ACV Heater assembly number XL1A25-60S-1 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

High Vacuum L Type Valve

Heater specifications Item XLC-25-2 XLC-40-2 XLC-50-2 XLC-63-2 XLC-80-2 Rated voltage of the heater 90 to 240 ACV Heater assembly number XL1A25-60S-1 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

High Vacuum L Type Valve

Heater specifications Item XLF-25-2 XLF-40-2 XLF-50-2 XLF-63-2 XLF-80-2 Rated voltage of the heater 90 to 240 ACV Heater assembly number XL1A25-60S-1 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

Rotary Table

Specifications Size 1 2 3 7 Fluid Air (Non-lube) Maximum operating pressure 0.7MPa Minimum operating pressure 0.1MPa Ambient and fluid temperature 0 to 60C (with no freezing) Cushion No cushion Lubber cushion Allowable kinetic energy 0.001J 0.0015J 0.002J 0.006J Angle adjustment range 0 to 190 Maximum rotation 190 Rotation time adjustment range 0.2 to 0.7 s/90 0.2 to 0.1 s/90 Cylinder bore

LEJ-OM004xx

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

Electric Actuator / Rod Type Dust-tight / Water-jet-proof (IP65 Equivalent / IP67 Equivalent)

or less 30 or less Positioning repeatability [mm] +/0.02 Lost motion [mm] Note 6) 0.1 or less Lead [mm] 12 6 3 16 8 4 16 8 4 Impact resistance/vibration Resistance [m/s2] Note 7) 50/20 Drive method Ball screw (LEY*D) Guide type Sliding bush (Piston rod part) Enclosure Note 8) IP65equivalent / IP67 equivalent Note 14) Operating temperature range [] 5 to 40 Operating humidity range [%RH] 90

JXCx-OMT0005CN

(DC24V) DC24V10% 100mA A/B 800 / EEPROM LED PWR LED ALM MS NS 20m 040 90%RH ) 50MDC500V 210g() 230g(DIN ) DeviceNet DeviceNet CT-27 Volume1Common Insustrial Protocol(CIP) Edition3.14 Volume3DeviceNet Adaption of CIP Edition 1.13 063 / Data Rate 125/250/500 kbps / Group 2 Only Server EDS 4122036Byte 4 Byte 41020Byte 4 Byte ID 07hSMC Corporation 43h(Generic Device) DDh