High Vacuum L Type Valve Vibration resistance allows for normal operation of up to 30m/s2 (45 to 250Hz). Be advised that continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibration or impacts. High temperature type (temperature specification /H4 H5) 1.
Specifications Table 4 Model Note 1 XMH-16 XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 Flange (valve) size 16,CF034 25 40,CF070 50 Actuating type Manual Fluid Inactive gas under vacuum Operating temperature oC 5 to 150 Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 2 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures ,
Operation Examples (Timing Chart) . 45 8. Replacement of parts . 52 8-1-1. Disassembly of the controller assembly . 52 8-1-2. Assembly of the controller assembly . 53 8-2-1. Disassembly of the valve unit . 55 8-2-2. Assembly of the valve unit . 56 8-3-1. Disassembly of the servo valve . 57 8-3-2. Assembly of the servo valve . 58 8-4-1. Disassembly of the E-stop valve . 59 8-4-2.
Position symbols are indicated here 45 45 Position symbol: 2 Position symbol: 4 Knob Position symbol: N Table 1 Handle position symbols Piston rod position settings 2 Moves to the extended end N Current position retained 4 Moves to the retracted end 3 - 5.
See LECSA Operation Manual, section 4.4.2 for details on allocation of Output signals to pins CN1-9 CN1-12. 45 - 5.5.5 Setting a Maximum of 7 Points using the Point Table in Positioning mode (Point Table) The point table can reach a maximum of 7 points using input signals DI0, DI1 and DI2. The default allocation, allocates signals DI0 to (CN1-5) and DI1 to (CN1-23).
Driving 45 10-1. Setting of Origin Direction 10-2. Adjustment of Air Balance 11. Error Messages & Countermeasures 46 11-1. Controller 11-2. Brake Units Life Span 12. Appendix 50 12-1.
CE*-OMQ0013-F / / 1 7 1-1 1-2 1-3 1-4 8 2-1 2-2 2-3 13 3-1 3-2 3-3 15 4-1 4-2 4-3 17 5-1 5-2 5-3 21 6-1 6-2 22 7-1 7-1-1 7-1-2 7-2 7-2-1 7-2-2 7-3 7-3-1 7-3-2 7-3-3 INPUT 7-3-4 OUTPUT 7-3-5 7-3-6 28 36 9-1 9-1-1 9-1-2 9-1-3 9-2 9-2-1 9-2-2 9-3 9-3-1 45 10-1 10-2 46 11-1 11-2 50 12-1 CE2/CEU2 / *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power
Blinking P1 will blink. 45 Press either READ or WRITE to proceed to the input condition for cylinder stroke setting, while at the same time, the first decimal point will start to blink. Use LEFT and RIGHT buttons to select digit to be changed and set the digit to the desired setting through UP and DOWN, buttons. With that, input desired cylinder stroke.
Operation 32 C96N32-PS 17 Rod seal 1 pc 40 Rod seal 1 pc 41 Piston seal 1 pc 42 Large cushion seal 2 pcs 43 Small cushion seal 1 pcs 45 Cylinder tube gasket 2 pcs 40 C96N40-PS 50 C96N50-PS 63 C96N63-PS 80 C96N80-PS 100 C96N100-PS Lock part is replaced as an entire unit. The seal kit for replacement contains the rod seal for the cylinder and lock.
Operation 32 C96N32-PS 17 Rod seal 1 pc 40 Rod seal 1 pc 41 Piston seal 1 pc 42 Large cushion seal 2 pcs 43 Small cushion seal 1 pcs 45 Cylinder tube gasket 2 pcs 40 C96N40-PS 50 C96N50-PS 63 C96N63-PS 80 C96N80-PS 100 C96N100-PS Lock part is replaced as an entire unit. The seal kit for replacement contains the rod seal for the cylinder and lock.
Loosen the hexagon nut 41 of right cover 34 to remove the seal washer 40 and hexagon nut with the hexagon socket set screw 37 from the angle adjustment collar 39 . 17 15 10 3 14 11 5 12 19 9 14 12 1 4 11 6 34 35 37 40 41 15 39 45 - Assembly procedure 1. Apply the grease provided in the seal kit to parts shown in Table (20). Table (20) Parts where grease is to be applied 2.
Allowable load a b Allowable thrust loadN Allowable momentNm Size Allowable radial load a b Basic type High precision N type 1 31 41 41 0.56 0.84 2 32 45 45 0.82 1.2 3 33 48 48 1.1 1.6 7 54 71 71 1.5 2.2 Unit used as flange mount Rotary table can be mounted from three directions-Two side of axial direction and one side of lateral face.
Internal 17 45 66 104 193 318 Note 1) Gripping force per finger Effective value (N) gripping force O.D. External gripping S 7.1 27 33 45 131 217 force I.D.
66 104 193 318 S 7.1 27 33 45 131 217 C 13 38 57 83 161 267 mm 4 6 10 14 22 30 2 g D 55 115 230 420 715 1,275 SC 235 425 760 1,370 2) 4 - 2. 2-1. 1. () 2. 3. 4. 2-2. . 2 L H L H (1) (2) (3) 3. 5 - 4. 5. 6. <> (1) (2) 2 7. 2-3. 1. 2. 3. 4. 5.
Vibration resistance: No malfunction occurred in a test ranging between 45 to 2000 Hz, when the actuator was tested in both an axial direction and a perpendicular direction to the lead screw. (The test was performed with the actuator in the initial state.) Note 5) Static allowable moment is the static moment applied to the actuator stopped.
Vibration resistance: No malfunction occurred in a test ranging between 45 to 2000 Hz. The test was performed in both an axial direction and a perpendicular direction to the lead screw. (The test was performed with the electric actuator in the initial state.) 8) Do not use the product in an environment where it is exposed to oils such as cutting oil, and water.
Speed Position Acceleration Deceleration 100 0 1100 Pushing force 1 INP ON INP ON Trigger level 45 - 1 Pushing speed Moving force AREA ON 1 12AREA Area 1 ON1 2 2 Area 2 INP ON In position INP ON (2-3) LECPA No.Step No.
. 20 3IO . 21 4IO . 21 5 . 23 5.1 PWR . 23 5.2 MOTENC . 23 5.3 SII/O . 23 1 . 23 2 . 24 5.4 DeviceNet . 24 6CN1: . 25 6.1 . 25 6.2 . 25 6.3 . 26 1(C24V,M24V,0V) . 26 2(EMG) . 26 3LK RLS . 26 1 - 6.4 . 27 1 . 27 21 . 28 32 . 29 7DeviceNet 30 8LED . 31 8.1 LED . 31 8.2 LED . 31 9 . 32 9.1. . 32 9.2 No. . 32 9.3 / . 32 9.4 . 32 10 . 33 10.1 . 33 11 . 42 11.1 . 42 11.2 . 45
CN5I/O . 23 6.1 . 23 6.2 (NPNPNP ) . 23 (1) I/O (NPNPNP ) . 23 (2) I/O . 23 6.3 . 24 6.4 I/O . 27 7. . 28 7.1 . 28 7.2 . 31 7.3 . 33 8. . 34 8.1 . 34 8.2 . 34 8.3 . 35 (1) . 35 (2) (). 35 (3) . 35 8.4 . 36 8.5 . 36 9. (). 37 9.1 . 37 9.2 . 38 10. . 39 10.1 . 39 10.2 I/O . 39 (1) . 39 (2) . 40 (3) . 41 (4) HOLD. 42 (5) . 42 2 - 6 . 42 (7) . 43 11. . 44 11.1 . 44 11.2 (). 45 11.3 I/O . 46 11.4
./ . 44 15.1 . 44 15.2 . 45 15.3 . 46 15.4 . 47 15.5 . 48 15.6 . 48 16. . 49 2 - 16.1/ . 49 16.2 . 49 16.3 . 51 16.4 . 51 16.5 . 52 16.6 . 52 16.7 . 52 3 - LEC-G Series/ 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines