C95

9 34.5 6.5 32 2.2 28 5.5 31 Auto Switch Mounting Height D-F5, D-J5 D-F5W, D-J59W D-F5BAL, D-F5NTL D-F59F D-A3, D-K39 D-G39 D-A44 D-Z7, D-Z80 D-Y59, Y7P D-Y7W D-A5 D-A6 D-A59W D-Y69, D-Y7PV D-Y7WV D-Y7BAL D-P5DWL Bore size (mm) Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 32 23 30 23 26.5 23 25.5 27.5 77 27.5 67 25 32.5 24.5 35 31 38 40 26 34 26 30 26 29.5 27.5 81.5 27.5 71.5 27.5 36.5

CL

ML1C 25 Bore size (mm) Auto switch model D20 20 25 32 40 32 20 D-B5/B64 D-G5/K5 BA-01 BA-02 BA-32 BA-04 25 20 -X 10 D-C7/C80 D-H7 BMA2-020 BMA2-025 BMA2-032 BMA2-040 20Mounting screws set made of stainless steel The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

Metal Seal/Rubber Seal Series VQ Body Ported

Max. 16 stations C3, C4, C6, M5 C6 VQ1000 Side D-sub Connector (25 pins) D side U side Stations 1 2 3 Cable assembly 015 030 050 AXT100-DS25Wire Color by Terminal No. of D-sub Connector Cable Assembly The D-sub connector cable assembly can be ordered individually or included in a specific manifold model no. Refer to How to Order Manifold. Terminal no.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

D D D D SV SS5V1-W10S4VWD-05B-C6 1 set (manifold part no.)

Air Cylinder

(n: Number of auto switches) Different surfaces Same surface Different surfaces Same surface D-M9 D-M9W D-M9A D-A9 10 151 451 15 + 35(n 2) 2 (n = 2, 4, 6)3 45 + 15 (n 2) (n = 2, 3, 4, 5) CJ1 CJP D-M9V 5 151 35 15 + 35(n 2) 2 (n = 2, 4, 6)3 35 + 25 (n 2) (n = 2, 3, 4, 5) CJ2 CJ2 D-M9WV D-M9AV 10 151 35 15 + 35(n 2) 2 (n = 2, 4, 6)3 35 + 25 (n 2) (n = 2, 3, 4, 5) JCM D-A9V 5 10 35 10

Integrated Controller

Description Material Note 24 Return plate Aluminum alloy Coating 25 Cover plate Aluminum alloy Anodized 26 Table spacer Aluminum alloy Anodized 27 Belt Replacement Parts (Right/Left side parallel only)/Belt No. Size Order no. 16 LE-D-6-5 25 LE-D-15-1 32 LE-D-19-1 40 LE-D-19-2 27 Replacement Parts/Grease Pack Applied portion Order no.

Aluminum High Vacuum Angle Valve

D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 41 113 40 38 30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for

KQ2

(mm) 3.2 4 6 Effective area (2) (mm2) Nylon Urethane (1) 3 x applicable tubing Mass (g) D Model D L Q M KQ2T23-00 KQ2T04-00 KQ2T06-00 5 7 10 3.4 6.4 13.4 2.9 4.4 10.6 9.6 10.4 12.8 17.5 18 21 4.3 4.5 5.3 15.5 16 17 D D 8 KQ2T08-00 15.2 24 6 18.5 25.6 17.7 15 10 KQ2T10-00 18.5 26.5 6.8 21 40 28.4 25 12 KQ2T12-00 20.9 28.5 7.5 22 57.4 45.4 29 K 16 KQ2T16-00 26.5 34 10 25 100 (84) 40 8 4.2 Note

42

side U side D side n n U side 8 8 Manual override 7 7 A B A B A B A B A B A A A B A B A B A B A B A A B B B A A A A A A A 6 6 5 5 215 P = 25 44 L1 L2 L1 L2 4 4 B B Indicator light 3 3 2 2 P = 25 1 1 27 38 50.5 27 38 50.5 44 Stations Indicator light Stations 11.7 D side D side U side U side 16.2 43.2 11.7 Manual override 16.2 43.2 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610

5 Port Solenoid Valve

, D-sub connector, 25 pins, 16 outputs EX600-DYPE PNP output, D-sub connector, 25 pins, 16 outputs EX600-DYNF NPN output, Spring type terminal box, 32 pins, 16 outputs EX600-DYPF PNP output, Spring type terminal box, 32 pins, 16 outputs w Digital Output Unit EX600-DMNE NPN input/output, D-sub connector, 25 pins, 8 inputs/outputs EX600-DMPE PNP input/output, D-sub connector, 25 pins, 8 inputs

One-touch Fittings

D P [mm] M L2 A L1 2 x N Q Q D 2 x O d Applicable fitting size d Different Diameter Union Y: KQ2U Applicable tubing O.D.

Tie-rod Type Hydraulic Cylinder

W W D d E E D M MA a a M MA F NA NA F K A A K C H + Stroke S + Stroke H B ZZ + 2 strokes (mm) Bore size (mm) B C A a d E D F G GA J K M MA MM NA P R S T V W H ZZ 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 23 10 60 44 18 25 14 17.5 M8 x 1.25 18 13 20 M14 x 1.5 30 1/4 37 114 11 7.5 8 66 246 50 19 50 25 9 73 53 20

V

rib Deep type Pad Dia (mm) 2, 4, 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 10, 13, 16, 20, 25, 32, 40, 50 10, 16, 25, 40 Material (Color) NBR (Black) Hardness 50 shore D I M E N S I O N S PA D D I A M E T E R S 20, 25, 32 D I M E N S I O N S PA D D I A M E T E R S 2, 4, 6, 8 F L AT T Y P E F L AT W I T H R I B H : M6x1 H : M8x1 Y Model A B D C E F G I C E F G I Flat Flat with rib F L AT T Y P

Stability of suction position,

D D D D D 40 26.5 31 31 26 26 2 3 53 50 6 40 6 35 32 6 Width across flats 6 2.5 14.5 Width across flats 6 Width across flats 6 43 19 19 19 D-D D-D D-D 16 16 16 8.5 8.5 8.5 Dimensions Dimensions Dimensions Model A B ZP3E-Y32UMlJB10 66.6 110.6 ZP3E-Y32UMlJB30 91.6 135.6 ZP3E-Y32UMlJB50 111.6 155.6 Model A B ZP3E-Y40UMlJB10 66.6 110.6 ZP3E-Y40UMlJB30 91.6 135.6 ZP3E-Y40UMlJB50 111.6 155.6 Model

Table of Contents

4 6 8 10 12 3 5 10 17 25 2.8 6.5 14 24 34 9.3 11.6 15.2 18.5 21.7 33.5 37.1 53.3 63.6 70.2 2-Applicable tubing D Inch Size Weight (g) Effective area (mm2) D L M Model Applicable tubing O.D.

CNG

Note 1) Note 2) Maximum available stroke (mm) Bore size (mm) 20 25 32 40 Standard stroke (mm) Model Long stroke (mm) 1 pc. 201 to 350 301 to 400 301 to 450 301 to 800 25, 50, 75, 100, 125, 150, 200 D-C7, C8 D-B5, B6 D-H7 D-G5N 15mm 10mm 1500 25, 50, 75, 100, 125, 150, 200, 250, 300 20mm 20mm 15mm 10mm D-B59W D-H7LF Note 1) Intermediate strokes other than the above are produced upon receipt

Cylinder with Lock

4, 8, 12, 16) 1 90 15 100 110 120 2 (Different surfaces, Same surface), 1 25 110 120 130 140 D-F5NTL (n 4) 2 25 + 55 (n 2) 2 120 + 55 (n 4) 2 (n = 4, 8, 12, 16) 130 + 55 (n 4) 2 (n = 4, 8, 12, 16) 140 + 55 (n 4) 2 (n = 4, 8, 12, 16) 110 + 55 n (Same surface) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) Different surfaces Same surface 15 75 90 100 110 D-B5/B64 D-G5/K59 D-G5W D-K59W D-G5BAL D-G59F

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Auto Switch Proper Mounting Height [mm] Auto switch model D-B5l D-B64 D-B59W D-G5l D-K59 D-G5NT D-G5lW D-K59W D-G5BA D-G59F D-Z7l D-Z80 D-Y59l D-Y7P D-Y7BA D-Y7lW D-M9l D-M9lW D-M9lA D-A9l D-A3l D-G39 D-K39 D-A44 D-A5l D-A6l D-A59W D-Y69l D-Y7PV D-Y7lWV D-P3DWA D-P4DW D-M9lV D-M9lWV D-M9lAV D-A9lV Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Hs Hs Hs Ht 40 30 30 34 30 31 30 30 30

Table of Contents

(mm) Proper tightening torque (Nm) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187)

0.4

, 25 pins, 16 outputs Digital output unit EX600-DYPE PNP output, D-sub connector, 25 pins, 16 outputs EX600-DYNF NPN output, Spring type terminal box, 32 pins, 16 outputs EX600-DYPF NPN output, Spring type terminal box, 32 pins, 16 outputs EX600-DMNE NPN input/output, D-sub connector, 25 pins, 8 inputs/outputs EX600-DMPE PNP input/output, D-sub connector, 25 pins, 8 inputs/outputs Digital