SFOD-OMT0005CN

Ry (1 ) (3) EMG (2) M 24V (1) C 24V 0V (4) DC24V 0V LK RLS (6) Ry (2 ) (3) EMG (2) M 24V (1) C 24V 0V (4) DC24V 0V LK RLS (6) Ry (3 ) (3) EMG (2) M 24V (1) C 24V 0V (4) DC24V 0V OFF -28- (3)((2)) DC24V M24V EMG () 0V DC24V Ry (1 ) (3) EMG LK RLS (6) Ry (1) C 24V (2) M 24V 0V (4) DC24V 0V (2 ) (3) EMG LK RLS (6) Ry (1) C 24V (2) M 24V 0V (4) DC24V 0V (3 ) (3) EMG LK RLS (6

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(Values at the initial period) Flow Characteristics/Weight Response time (ms) (1) 2 3 (A R) 1 2 (P A) Flow characteristics Series Valve construction Weight (2) Standard type: 1 W AC High pressure type: 1.0 W Low wattage type: 0.5 W Model (g) Cv Cv b C [dm3/(sbar)] b C [dm3/(sbar)] VQZ100 0.25 VQZ115 0.35 0.46 1.0 0.23 0.87 13 or less 10 or less 22 or less Poppet N.C. valve 25 0.45 VQZ215

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

VQZ335 Rubber 21.6 (1.2) 25 or less 33 or less VQZ300 77 VQZ325 Metal 15.3 (0.85) 17 or less 22 or less N.O. VQZ345 Rubber 21.6 (1.2) 25 or less 33 or less Note 1) Value on sub-plate with maximum port size. Note 2) The response time is subject to the pressure and the air quality. The values are given for double solenoid types.

Bag Filter

Gauge port in the outlet side (Pressure gauge) Rp1/4 Rc2 Inlet Gauge port in the outlet side (Pressure gauge) Inlet Drain port 25(2B)JIS10KFF D C B A O.D214 O.D458 Outlet 275 D 100(4B)JIS10KFF Rc2 C 580 B Outlet A 250 25(2B)JIS10KFF Fluid release 365 289 185 Fluid release Rc2 (mm) E FGFS3A-40 FGFC3A-40 FGFL3A-40 FGFR3A-40 FGFS3B-40 FGFC3B-40 FGFL3B-40 FGFR3B-40 Model A B C D (135) (mm) 866

RSH/RS1H

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 #9 $0 $1 MK(2) RS Q G Clear anodized Clear anodized 20, 32 only 20, 32 only RS H A RZQ MI W S Nickel plated Nickel plated CEP1 Type C snap ring for shaft Type C snap ring for shaft CE1 Type C snap ring for shaft Return spring CE2 Hexagon socket head set screw Hexagon socket head set screw 20 only Nickel plated 20 only ML2B Hexagon

Compact Cylinder with Air Cushion and Lock Series RLQ

Cylinder model C D Mounting bolt size RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 90 M5 x 90 L Mounting bolt CLJ2 95 M5 x 95 L 100 M5 x 100 L CLM2 110 M5 x 110 L 8 C Flat washer D 120 M5 x 120

RSH/RS1H

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 #9 $0 $1 MK(2) RS Q G Clear anodized Clear anodized 20, 32 only 20, 32 only RS H A RZQ MI W S Nickel plated Nickel plated CEP1 Type C snap ring for shaft Type C snap ring for shaft CE1 Type C snap ring for shaft Return spring CE2 Hexagon socket head set screw Hexagon socket head set screw 20 only Nickel plated 20 only ML2B Hexagon

VXP21/22/23

Model Power source Frequency (Hz) 50 25 12 60 20 8 AC VXP21 DC 50 45 20 60 40 15 AC VXP22 DC 50 60 25 60 50 20 AC VXP23 DC Operating Fluid and Ambient Temperature High temperature water (3) Operating fluid temperature (C ) Ambient temperature (C ) Steam (3) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E) High temperature oil (3) (D) (S) 99 100 183

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

1 Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) Applicable Auto Switch Auto switch mounting Applicable rotary actuators Applicable air grippers MHZ Auto switch model Electrical entry Size Page Type Size MHF 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

1 Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) Applicable Auto Switch Auto switch mounting Applicable rotary actuators Applicable air grippers MHZ Auto switch model Electrical entry Size Page Type Size MHF 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB

PF-OMM0004_C

A 154 46 77 57.6 23 77 63 28 18 3.5 14 32 30 A 146 56 91 71.6 28.5 73 60.5 25 27.5 3.5 14 38 S T U V W Y Z 25 A 59 36 48 58 70 7 2 -86No.PF-OMM0004-D M8 ZS-40-A -87No.PF-OMM0004-D EPDM 11 11 PVC -88No.PF-OMM0004-D Revision history A B C D SMC URL http://www.smcworld.com 2008-2013 SMC Corporation All Rights Reserved No.PF-OMM0004-D

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

(Values at the initial period) Flow Characteristics/Weight Flow characteristics Response time (ms)(1) Weight (2) Series Valve construction High pressure type: 1.0 W Low wattage type: 0.5 W 0.59 2 3 (A R) 1 2 (P A) Model Standard type: 1 W AC (g) Cv Cv C [dm3/(sbar)] b C [dm3/(sbar)] b VQZ100 0.56 VQZ115 0.17 0.14 0.44 0.30 Poppet N.C. valve 25 22 or less 13 or less 10 or less 1.3 VQZ212

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

7.4

Possible to drive cylinders: Up to 25 (300 mm/s) Base Mounted For details, refer to page 741. Power consumption: 0.35 W Flow rate characteristics C [dm3/(sbar)]: 0.39 Added 3-position closed center.

NAAMS Standards Compliant

mm offset: Machined 25 mm offset: Machined A B A C B 6H6 through +0.008 0 D C E 6H6 through +0.008 0 D F 200.03 10 E G F 200.03 10 G 300.025 300.025 9 through H 300.025 300.025 I 250.05 9 through J H 250.05 I 45 M6 x 1.0 R45 500.05 M6 x 1.0 750.05 6.5 18 R25 10 3 10 1 1 6.5 R6 R25 19 18 19 R25 19 [mm] R6 19 [mm] Model NAAMS code A B C D E F G H I Weight [kg] CKZ-50A022 ACA246M 80.0 65.0 50.0

Air Cylinder

Bore Model No. 150 (1.5) 200 (2) 250 (2.5) 325 (3/25) 400 (4) D-A5, D-F5 D-A6, D-J5 NBT-150 NBT-200 NBT-200 NBT-325 NBT-325 Connector Style M8-3pins M8-4pins M12-4pins 1 2 1 4 2 1 Pin arrangement 3 4 4 3 3 Applicable standards JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 Impact resistant 300m/s2 IP degress of protection IP-67 (IEC529 standard) Insulation resistance 100M or more at 500VDC

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

Bore size 6 10 16 20 25 6 mm 10 mm 16 mm 20 mm 25 mm Port thread type Nil M thread Rc NPT G 6 to 16 TN TF 20, 25 Series MQM is not auto switch capable. Mounting Bracket/Accessories L: Foot Note F: Front flange G: Rear flange C: Single clevis D: Double clevis Mounting bracket B: Basic (1 pc.) (1 pc.) (2 pcs.) (1 pc.)

XMC/XYC Series

XMC Exterior dimensions C D L1 L2 Fn Fc C (Fc) (KF Flange) (CF Flange) J H B A G A Unit:mm Model A B C D Fn Fc G H J P.C.D L1 L2 XMC-16 40 110 38 1 30 34 17 40 26 P.C.D 27 6x4.4 XMC-25 50 120 48 1 40 26 39 28 XMC-40 65 171 66 2 55 70 41 63 36 P.C.D. 58.7 6x6.6 C D L1 L2 Fn Fd Fc C (Fc) (KF Flange) (K Flange) (CF Flange) H J K B A G A Unit:mm Model A B C D Fn Fc Fd G H J K P.C.D L1 L2 XMC-

Ionizer

(c)When a sensor is not connected.

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 -13- Auxiliary axis number Auxiliary axis number Axis selection rotary switch Axis selection rotary switch Control Control setting switch setting switch axis No. axis No.