ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

Rotary Actuator/Vane Style Series CRB2

Single flat D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note ) Dimensions and tolerance of the shaft and single flat (a parallel key for size 40) are the same as the standard.

Power Valve: Economy Valve Series VEX5

Cylinder Speed Chart Bore size Series CS1/CS2 Pressure 0.5 MPa, Load factor 50% Cylinder stroke 300 mm Average velocity (mm/s) System 125 140 160 180 200 250 300 1000 Vertically upward movement Horizontal movement 900 800 700 600 500 400 300 200 100 0 A 800 900 1000 700 600 500 400 300 200 100 0 B 900 1000 800 700 600 500 400 300 200 100 0 C 800 900 1000 700 600 500 400 300 200 100 0 D 800

Sine Cylinder Series REC

Basic mass 0.90 (Foot style 32) Additional mass 0.09/50 st Cylinder stroke 200 (st) 0.90 + 0.09 x 200/50 = 1.26 kg CX MQ RHC Mounting Bracket Part No.

Sine Cylinder Series REC

Basic mass 0.90 (Foot style 32) Additional mass 0.09/50 st Cylinder stroke 200 (st) 0.90 + 0.09 x 200/50 = 1.26 kg CX MQ RHC Mounting Bracket Part No.

Sine Cylinder Series REC

Basic mass 0.90 (Foot style 32) Additional mass 0.09/50 st Cylinder stroke 200 (st) 0.90 + 0.09 x 200/50 = 1.26 kg CX MQ RHC Mounting Bracket Part No.

Ionizer

(c)When a sensor is not connected.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Flow Characteristics Series Flow characteristics C [(dm3/sbar)] b Cv 0.12 0.21 0.74 0.36 0.32 0.35 0.46 0.83 2.9 SYJ3000 SYJ5000 SYJ7000 Cover (stainless steel) Rubber seal 4/5 Port Solenoid Valve Series SYJ3000/5000/7000 Variations Option Manual override Sonic conductance: C [dm3/(s.bar)] Type of actuation Series Voltage Electrical entry With light/surge voltage suppressor SYJ3000 For DC

HEC_W-E

Therefore, if the target temp. is 23.0 C and 1.5 C is set in this item, the warning [WRN] arises when temp. lowers 21.5 C. H i g h T e m p . 8. High Temp. Cutoff Setting range : 11.0 to 70.0 C Min. increment : 0.1 C Indicated content : High temp. cutoff by internal temp. C u t o f f M O D E < 7 0 . 0 C sensor (Ex. : 70.0 C).

HRX-OM-M005

Table 7-1 Water Quality Standards Substance Facility water Circulating water spec. spec. pH (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 Sulfate ion (mgSO42-/L) Max. 200 Max.50 Acid consumption (pH4.8) (mgCaCO3/L) Max. 100 Max.50 Total hardness (mgCaCO3/L) Max. 200 Max.70 Calcium hardness (mgCaCO3/L) Max. 150

CV/MVGQ

B59W G59 G5P K59 G39 K39 G59W Relay, PLC 100 V MVGQ Reed switch Solid state switch PLC Yes 100 V, 200 V Relay, PLC 12 V CC 24 V 2-wire PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet RB Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) J 5 V, 12 V 24 V IC circuit Grommet 100 V, 200 V D2-wire 12 V IC circuit 3-wire (NPN) 2-wire 5 V, 12 V Terminal

VZ1000

6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 3-3-92 Series VZ Made to Order Specifications: Please contact SMC for detailed specifications, dimensions, and delivery. 6.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

(For F, L, S, T kit) VVQ4000 3A 1 VVQ4000 2A 1 Electrical entry Electrical entry L F C L F C F , L, T, S kit F kit (Connector side) C kit (Plug lead type) F , L, T, S kit F kit (Connector side) C kit (Plug lead type) (1) (1) Option Option VQC Nil W CD SD Standard IP65 enclosure For exhaust cleaner mounting Direct exhaust with silencer box Nil W CU SU Standard IP65 enclosure For exhaust cleaner

3 Position Cylinder Series RZQ

C A B Full stroke Entire stroke extension by pressurizing A, B and C ports. 3 Position Cylinder Series RZQ 32, 40, 50, 63 How to Order RZQ 32 200 100 A F9N Mounting Number of auto switches A B L F G D Nil Both ends tapped 2 pcs.

Micro Mechanical Valve Series VM1000

Side mounting Panel mounting VM100/Bottom ported only 3 (R) (3 port) Pneumatic indicator 2 (A) 1 (P) Series VM100/200 CAT.ES12-8A a Series VM100/200 Actuator Variations * It is possible to change the actuator assembly and mount to basic type.

Series KV2 Fittings

100/200 100/200 100/200 100/200 100/200 100/200 * Dimension A reference after installation. 11 Series KV2 Union Y KV2U_ _-_ _ Applicable Tube A Applicable Tube B P MB MA L2 L1 4.2 8 Q MC D1 Applicable Tube C D2 L3 D3 App.

IZx-OMX0087

200 300 300 5m/s 2m/s 2m/s 400 400 2) Flow rate : 60L/min 5) Flow rate : 60L/min 75 50 25 0 25 50 75 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm mm ionizer to workpiece [mm] ionizer to workpiece [mm] Installation distance from Installation distance from 200 200 10m/s 400 400 10m/s 5m/s 600 600 5m/s 800 800 2m/s 2m/s 1000 1000 3) Flow rate : 250L/min 6) Flow rate

48

The C dimension is 77.5 mm.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Without auto switch CRB1B J Size Rotating angle Port location Vane type Shaft type J K S T X Y Z Double shaft (Long shaft without keyway & Four chamfers) Double round shaft Single shaft key Single round shaft Single shaft with four chamfers Double shaft key Double shaft with four chamfers CRB2 CRBU2 CRB1 MSU J Z Y K S T X Key Key CRJ D C D D D D D CRA1 C C C CRQ2 MSQ MRQ C D D DKey 20(mm)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

D D D D D CRA1 C C C CRQ2 MSQ MRQ C D D DKey 20(mm) Nominal size C D 50 63 80 100 19.5 39.5 21 45 23.5 53.5 30 65 Note) Dimensions and tolerance of the shaft and keyway are the same as the standard.